Elionix F-125: Revision history

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10 November 2025

  • curprev 15:0815:08, 10 November 2025 Zhe talk contribs 531 bytes −8 No edit summary
  • curprev 14:5914:59, 10 November 2025 Zhe talk contribs 539 bytes +539 Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma..."
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