View source for BEAMER

Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines.
Crucially, it includes a proximity error correction (PEC) module.

For any questions regarding Beamer use, please first refer to the manual: '''Help > Help Manual (F1).''' Elionix-specific documentation: '''Help > Formatter Notes > Elionix'''.

It thoroughly covers all modules, their use, some theory, as well as includes helpful examples.

On the developer website you can find useful [https://www.genisys-gmbh.com/in-action.html tutorials] and [https://www.genisys-gmbh.com/applications.html application notes].

The Beamer software package also includes [[TRACER]] which allows for PEC for user-defined substrates, and [[ProSEM]] for image analysis.


== Quick-start guide ==
This is a quick guide to get started quickly.

The process should be tailored to your specific needs.

The full manual can be found in ''Help > Help Manual (F1)''.
=== Import ===
''Choose your design file.''

Manual: ''Modules > Layout Operation > Import''

'''Suggestion:''' Copy bigger files from N-Drive to the local machine.

=== Extract ===
''Extract the layers you want to expose.''

Manual: ''Modules > Layout Operation > Extract''

The options will only appear after the Import module has been run.

=== Heal ===
''Merge touching features and eliminate overlaps.''

Manual: ''Modules > Layout Operation > Heal''

This can also be used again after PEC with the option [[BEAMER#Reduce PEC overhead exposure time|''Healing Per Dose'']]

'''Recommended settings:''' Heal per layer

=== PEC ===
''This module takes proximity effect into consideration and changes the dose locally.'' Dose factor will be increased at the edges so they don't get underexposed, and might be decreased in the middle of large features so they don't get overexposed.

Manual: ''Modules > Process Correction > PEC''

'''Recommended settings:'''

In the ''General'' tab:

* Click ''Archive...'' and find the resist/substrate combination of your sample:
** Energy: 100/125keV (choose based on the acceleration voltage of the tool)
** Position:
*** If you etch: High
*** If you lift-off: Low
**Substrate, Layers and Resist: choose the right stack
**If it does not exist:
***Pick a similar resist on the same substrate or
***[[TRACER#How to: make a PEC for a new material stack|Create a new option using TRACER]] (takes 15-30 minutes).

In the ''Advanced'' tab, typically:
* For Si: ''Optimal Contrast'': 100
* For III-V substrates: ''Optimal Contrast'': 0
The reason is that III-V substrates backscatter much more strongly.
See the section about the [[Beamer#What's the difference in PEC between Optimum Contrast and Uniform Clearing?|difference between two main PEC modes]].

=== Transform ===
''Shift your entire design so that it lies within the positive quadrant of the coordinate system''

Manual: ''Modules > Layout Operation > Transform''

'''Comment:''' This step may be omitted if your design has already positive coordinates.

=== Export ===
''Write out the results in the format that you need.''

Elionix-specific manual: ''Help > Formatter Notes > Elionix''

In the ''Save File'' dialog:
* For Elionix file formats, select ''Elionix con FILE''
*: You don't have to create a new folder yourself. Beamer will do that for you in the next step.

In the ''General'' tab of the ''Elionix CON Export'' dialog:
* Select ''Replace Existing Files''. It is useful if you tweak your flow and end up exporting a few times.
* Select ''Generate folder''. The "file name" that you input will be the name of the new folder.
* Select the appropriate ''Format Type'':
** for Elionix 7000 (100 kV) use ''CO7''
** for Elionix F-125 (125 kV) use ''SCON''
* Change all the ''Exposure settings'' according to your needs.
* Change ''Base Dose Time''. You can calculate this using either:
** WeCaS on the Design PCs
** [https://sid.erda.dk/share_redirect/HUEfw6ttjf/index.html Unofficial dose calculator]
*: note that the limits are:
*:* for Elionix 7000 (100 kV) minimum 0.10 us and 0.05 us stepsize
*:* for Elionix F-125 (125 kV) minimum 0.06 us and 0.02 us stepsize
* Select ''Dose Time Interpolation''

In the ''Advanced'' tab of the ''Elionix CON Export'' dialog:
* Typically ''Field Placement'': ''Floating''
* ''Fracturing Mode'': ''LRFT''
* ''Feature Sorting'': ''FollowGeometry''

== File formats ==
Beamer supports common CAD file formats. Most users at QDev use GDSII (.gds) or DXF files for their designs. 

Our current software supports exporting to file formats for:
* Elionix 7000 (100 kV)
* Elionix F-125 (125 kV)
* new generation Elionix systems (CAR file format)
* general file format GDS that's accepted by eLine
* other general file formats