Tools - Revision history

Chenglee at 09:45, 13 April 2026

2026-04-13T09:45:29Z

← Older revision		Revision as of 09:45, 13 April 2026
Line 30:		Line 30:
	* [[JEOL 7800F\|JEOL JSM-7800F]]		* [[JEOL 7800F\|JEOL JSM-7800F]]
	* [[Raith eLine]]		* [[Raith eLine]]
	* [[~~Philips~~ TEM]]		* [[Talos F200i S/TEM]]
	* [[Tencor profilometer]]		* [[Tencor profilometer]]
	* [[Alpha-SE ellipsometer]]		* [[Alpha-SE ellipsometer]]
Line 123:		Line 123:
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM]]		\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM \|TEM]]
	\| style="background-color: #ff9f9f" \| No		\| style="background-color: #ff9f9f" \| No
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes

Chenglee at 09:44, 13 April 2026

2026-04-13T09:44:33Z

← Older revision		Revision as of 09:44, 13 April 2026
Line 123:		Line 123:
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[~~Philips TEM\|~~TEM]]		\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM]]
	\| style="background-color: #ff9f9f" \| No		\| style="background-color: #ff9f9f" \| No
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes

Chenglee at 09:34, 13 April 2026

2026-04-13T09:34:08Z

← Older revision		Revision as of 09:34, 13 April 2026
Line 30:		Line 30:
	* [[JEOL 7800F\|JEOL JSM-7800F]]		* [[JEOL 7800F\|JEOL JSM-7800F]]
	* [[Raith eLine]]		* [[Raith eLine]]
	~~<!--~~ * [[Philips TEM]] ~~-->~~		* [[Philips TEM]]
	* [[Tencor profilometer]]		* [[Tencor profilometer]]
	* [[Alpha-SE ellipsometer]]		* [[Alpha-SE ellipsometer]]

Harry at 16:22, 30 October 2025

2025-10-30T16:22:05Z

← Older revision		Revision as of 16:22, 30 October 2025
Line 55:		Line 55:
	\|}		\|}

	~~==Current tool status==~~


	~~{\| cellspacing=0px style="text-align: left;"~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Heidelberg µPG 501\|Heidelberg LED writer]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Raith eLine\|Raith eLine 30 kV EBL/SEM]]~~
	~~\| style="background-color: #ff9f9f" \| Tool down. Stage controller is being received next week [reassembling the tool on week 45]~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV EBL]]~~
	~~\| style="background-color: #FFD700" \| Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Elionix_F-125\|Elionix F-125 125kV EBL]]~~
	~~\| style="background-color: #ff9f9f" \| Annual service & gun fillament exchange. [down time: Weeks 45 and 46]~~
	\|-
	~~\| style="padding-bottom:6px;" \|~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA1 (e-gun)]]~~
	~~\| style="background-color: #ff9f9f" \| The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA1 (milling and sputtering)]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA2]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Plassys Evaporator]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[E-Gun evaporator]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Cambridge ALD\|ALD1]]~~
	~~\| style="background-color: #FFD700" \| Waiting for a new venting MAC valve from buch & holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Cambridge ALD\|ALD2]]~~
	~~\| style="background-color: #c6e0b4" \| All good! [Scheduled servicing of the scroll pump: Week 47]~~
	\|-
	~~\| style="padding-bottom:6px;" \|~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[FS bonder]]~~
	\| style="background-color: #c6e0b4" \| All good! ''' Please return the hex Wera screwdrivers'''. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[K&S bonder]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Loomis scriber]]~~
	~~\| style="background-color: #FFD700" \| Dual PC is not working, the tool is okay to use with a single operating PC~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Dicing saw]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Bruker Dimension Icon AFM\|AFM]]~~
	~~\| style="background-color: #ff9f9f" \| System down. Troubleshooting in progress.~~
	\|}

	~~''List updated: Thursday 30 Oct 2025''~~

	== Tool access requirement guidelines ==		== Tool access requirement guidelines ==

Chenglee: /* Current tool status */

2025-10-30T15:48:02Z

Current tool status

← Older revision		Revision as of 15:48, 30 October 2025
Line 110:		Line 110:
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Bruker Dimension Icon AFM\|AFM]]		\| style="text-align:right; padding-right:6px;" \| [[Bruker Dimension Icon AFM\|AFM]]
	\| style="background-color: #~~c6e0b4~~" \| System down. Troubleshooting in progress.		\| style="background-color: #ff9f9f" \| System down. Troubleshooting in progress.
	\|}		\|}

Chenglee: /* Current tool status */

2025-10-30T15:47:29Z

Current tool status

← Older revision		Revision as of 15:47, 30 October 2025
Line 109:		Line 109:
	\| style="background-color: #c6e0b4" \| All good!		\| style="background-color: #c6e0b4" \| All good!
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[AFM]]		\| style="text-align:right; padding-right:6px;" \| [[Bruker Dimension Icon AFM\|AFM]]
	\| style="background-color: #c6e0b4" \| System down. Troubleshooting in progress.		\| style="background-color: #c6e0b4" \| System down. Troubleshooting in progress.
	\|}		\|}

Chenglee: /* Current tool status */

2025-10-30T15:44:27Z

Current tool status

← Older revision		Revision as of 15:44, 30 October 2025
Line 108:		Line 108:
	\| style="text-align:right; padding-right:6px;" \| [[Dicing saw]]		\| style="text-align:right; padding-right:6px;" \| [[Dicing saw]]
	\| style="background-color: #c6e0b4" \| All good!		\| style="background-color: #c6e0b4" \| All good!
			\|-
			\| style="text-align:right; padding-right:6px;" \| [[AFM]]
			\| style="background-color: #c6e0b4" \| System down. Troubleshooting in progress.
	\|}		\|}

	''List updated: Thursday 30 Oct 2025''		''List updated: Thursday 30 Oct 2025''


	== Tool access requirement guidelines ==		== Tool access requirement guidelines ==

Harry at 14:32, 30 October 2025

2025-10-30T14:32:57Z

@@ Line 54: / Line 54: @@
 * [[Critical point dryer]]
 |}
 == Tool access requirement guidelines ==
@@ Line 208: / Line 266: @@
 | style="background-color: #c6e0b4" | Yes
 |}
 [[Category:Tools]]

Harry: /* Tool access requirement guidelines */

2025-09-09T09:05:21Z

Tool access requirement guidelines

← Older revision		Revision as of 09:05, 9 September 2025
Line 78:		Line 78:
	\| style="text-align:right; padding-right:6px;" \| [[Heidelberg µPG 501\|LED writer]]		\| style="text-align:right; padding-right:6px;" \| [[Heidelberg µPG 501\|LED writer]]
	\| style="background-color: #ff9f9f" \| No		\| style="background-color: #ff9f9f" \| No
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Süss mask aligner\|Mask aligner]]~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
Line 96:		Line 90:
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[~~E-Gun evaporator~~\|~~E-gun~~]]		\| style="text-align:right; padding-right:6px;" \| [[Plassys Evaporator\|Plassys]]
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
Line 102:		Line 96:
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[~~Edwards~~ evaporator\|~~Edwards~~]]		\| style="text-align:right; padding-right:6px;" \| [[E-Gun evaporator\|E-gun]]
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
Line 121:		Line 115:
	\|-		\|-
	\| style="padding-bottom:6px;" \|		\| style="padding-bottom:6px;" \|
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[JEOL 6320F]]~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F]]		\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F]]
Line 177:		Line 165:
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
			\|-
			\| style="text-align:right; padding-right:6px;" \| [[Dicing saw]]
			\| style="background-color: #ff9f9f" \| No
			\| style="background-color: #ff9f9f" \| No
			\| style="background-color: #ff9f9f" \| No
			\| style="background-color: #ff9f9f" \| No
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Loomis scriber]]		\| style="text-align:right; padding-right:6px;" \| [[Loomis scriber]]
Line 196:		Line 190:
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Plasma-Preen ~~asher\|Microwave asher]]~~		\| style="text-align:right; padding-right:6px;" \| [[Plasma-Preen asher]]
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	~~\| style="background-color: #c6e0b4" \| Yes~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Diener plasma asher\|Diener~~ asher]]
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes
	\| style="background-color: #c6e0b4" \| Yes		\| style="background-color: #c6e0b4" \| Yes

Harry: /* Tool list */

2025-09-09T08:56:56Z

Tool list

← Older revision		Revision as of 08:56, 9 September 2025
Line 14:		Line 14:
	\| style="width: 20%;" \|		\| style="width: 20%;" \|
	* [[Heidelberg µPG 501\|Heidelberg LED writer]]		* [[Heidelberg µPG 501\|Heidelberg LED writer]]
	* [[Süss mask aligner]]		<!-- * [[Süss mask aligner]] -->
	* [[Raith eLine\|Raith eLine 30 kV EBL/SEM]]		* [[Raith eLine\|Raith eLine 30 kV EBL/SEM]]
	* [[Elionix_7000\|Elionix 7000 100 kV EBL]]		* [[Elionix_7000\|Elionix 7000 100 kV EBL]]
Line 22:		Line 22:
	* [[Plassys Evaporator]]		* [[Plassys Evaporator]]
	* [[E-Gun evaporator]]		* [[E-Gun evaporator]]
	* [[Edwards evaporator\|Edwards thermal evaporator]]		<!-- * [[Edwards evaporator\|Edwards thermal evaporator]] -->
	* [[Laurell spinners]]		* [[Laurell spinners]]
	* [[Cambridge ALD]]		* [[Cambridge ALD]]
Line 30:		Line 30:
	* [[JEOL 7800F\|JEOL JSM-7800F]]		* [[JEOL 7800F\|JEOL JSM-7800F]]
	* [[Raith eLine]]		* [[Raith eLine]]
	* [[Philips TEM]]		<!-- * [[Philips TEM]] -->
	* [[Tencor profilometer]]		* [[Tencor profilometer]]
	* [[Alpha-SE ellipsometer]]		* [[Alpha-SE ellipsometer]]

← Older revision		Revision as of 16:22, 30 October 2025
Line 55:		Line 55:
	\|}		\|}

	~~==Current tool status==~~


	~~{\| cellspacing=0px style="text-align: left;"~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Heidelberg µPG 501\|Heidelberg LED writer]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Raith eLine\|Raith eLine 30 kV EBL/SEM]]~~
	~~\| style="background-color: #ff9f9f" \| Tool down. Stage controller is being received next week [reassembling the tool on week 45]~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV EBL]]~~
	~~\| style="background-color: #FFD700" \| Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Elionix_F-125\|Elionix F-125 125kV EBL]]~~
	~~\| style="background-color: #ff9f9f" \| Annual service & gun fillament exchange. [down time: Weeks 45 and 46]~~
	\|-
	~~\| style="padding-bottom:6px;" \|~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA1 (e-gun)]]~~
	~~\| style="background-color: #ff9f9f" \| The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA1 (milling and sputtering)]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA2]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Plassys Evaporator]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[E-Gun evaporator]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Cambridge ALD\|ALD1]]~~
	~~\| style="background-color: #FFD700" \| Waiting for a new venting MAC valve from buch & holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Cambridge ALD\|ALD2]]~~
	~~\| style="background-color: #c6e0b4" \| All good! [Scheduled servicing of the scroll pump: Week 47]~~
	\|-
	~~\| style="padding-bottom:6px;" \|~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[FS bonder]]~~
	\| style="background-color: #c6e0b4" \| All good! ''' Please return the hex Wera screwdrivers'''. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[K&S bonder]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Loomis scriber]]~~
	~~\| style="background-color: #FFD700" \| Dual PC is not working, the tool is okay to use with a single operating PC~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Dicing saw]]~~
	~~\| style="background-color: #c6e0b4" \| All good!~~
	\|-
	~~\| style="text-align:right; padding-right:6px;" \| [[Bruker Dimension Icon AFM\|AFM]]~~
	~~\| style="background-color: #ff9f9f" \| System down. Troubleshooting in progress.~~
	\|}

	~~''List updated: Thursday 30 Oct 2025''~~

	== Tool access requirement guidelines ==		== Tool access requirement guidelines ==