Harry: /* Cleanroom recommendations */

2026-04-09T08:45:22Z

Cleanroom recommendations

← Older revision		Revision as of 08:45, 9 April 2026
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	= Cleanroom recommendations=		= Cleanroom recommendations=

			''This section needs additional data''

	{\| class="wikitable"		{\| class="wikitable"
	\|+[[Elionix F-125\|125 kV]]		\|+[[Elionix F-125\|125 kV]]

Harry: /* How to choose the correct parameters yourself */

2026-04-09T08:40:33Z

How to choose the correct parameters yourself

← Older revision		Revision as of 08:40, 9 April 2026
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	<blockquote style="background-color: #F0F0F0; border: dashed thin grey;">		<blockquote style="background-color: #F0F0F0; border: dashed thin grey;">
	The '''pixel size''' should be equal to the '''beam spot size'''		The '''pixel size''' should be roughly equal to the '''beam spot size'''
	</blockquote>		</blockquote>

	* '''Area dose''': The recommended dose for the combination of substrate and resist stack that you have. If you don't know this value you can do a dose test for your substrate/resist combination or consult the [[Doses]] page		* '''Area dose''': The recommended dose for the combination of substrate and resist stack that you have. If you don't know this value you can do a dose test for your substrate/resist combination or consult the [[Doses]] page

Harry: /* Cleanroom recommendations */

2026-04-09T08:40:17Z

Cleanroom recommendations

Show changes

Harry: Created page with "= Cleanroom recommendations= {| class="wikitable" |+125 kV |- |Resist |Si |InAs^UC |InP^UC |GaAs^UC |SiGe |- |A2 |1000 |700 |? |? |? |- |A4 |1200-1300 |700 |900 |630 |? |- |A6 |1200 |800 |900-920 |760 |? |- |EL6 |? |? |? |? |? |- |EL9 |450-500 [https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_P..."

2026-04-09T08:12:24Z

Created page with "= Cleanroom recommendations= {| class="wikitable" |+125 kV |- |Resist |Si |InAsUC |InPUC |GaAsUC |SiGe |- |A2 |1000 |700 |? |? |? |- |A4 |1200-1300 <ref name="Kringhoej" /> |700 |900 <ref name="Hertel" /> |630 |? |- |A6 |1200 |800 |900-920 <ref name="Hertel" /> |760 |? |- |EL6 |? |? |? |? |? |- |EL9 |450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_P..."

New page

= Cleanroom recommendations=
{| class="wikitable"
|+[[Elionix F-125|125 kV]]
|-
|[[Resists|Resist]]
|Si
|InAsUC
|InPUC
|GaAsUC
|SiGe
|-
|A2
|1000
|700
|?
|?
|?
|-
|A4
|1200-1300 <ref name="Kringhoej" />
|700
|900 <ref name="Hertel" />
|630
|?
|-
|A6
|1200
|800
|900-920 <ref name="Hertel" />
|760
|?
|-
|EL6
|?
|?
|?
|?
|?
|-
|EL9
|450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_PhD.pdf Kringhøj PhD thesis]</ref>
|?
|280 <ref name="Hertel" />
|420
|?
|-
|CSAR4
|430
|?
|?
|?
|?
|-
|CSAR9
|500 <ref name="Kringhoej" />
|?
|?
|?
|?
|-
|CSAR13
|430 <ref name="Kringhoej" />
|?
|?
|350
|?
|-
|50k+A4
|?
|?
|500 <ref name="Hertel" />
|745
|?
|-
|}

{| class="wikitable"
|+[[Elionix 7000|100 kV]]
|-
|[[Resists|Resist]]
|Si
|InAsUC
|InPUC
|GaAsUC
|SiGe
|-
|A2
|900
|?
|620 <ref name="Drachmann" />
|?
|1500-1600 <ref name="Ansaloni" />
|-
|A4
|900
|640-680 <ref name="Whiticar">[https://nbi.ku.dk/english/theses/phd-theses/alexander-m-whiticar/Whiticar_thesis.pdf Whiticar PhD thesis]</ref>
|608-640 <ref name="Drachmann">[https://nbi.ku.dk/english/theses/phd-theses/asbjorn-cliff-drachmann/Drachmann_PhD_Thesis.pdf/Drachmann_PhD_Thesis.pdf Drachmann PhD thesis]</ref>
|630
|900 <ref name="Ansaloni">[https://nbi.ku.dk/english/theses/phd-theses/fabio-ansaloni/thesis_Ansaloni.pdf Ansaloni PhD thesis]</ref>
|-
|A6
|1000
|?
|?
|670
|?
|-
|EL6
|?
|?
|?
|?
|?
|-
|EL9
|?
|250
|380 <ref name="Hertel">[https://nbi.ku.dk/english/theses/phd-theses/hertel/dissertation_Hertel.pdf Hertel PhD thesis]</ref>
|200 <ref name="Drachmann" />
|?
|-
|CSAR4
|400
|?
|?
|?
|335 <ref name="Ansaloni" />
|-
|CSAR9
|?
|?
|?
|?
|335 <ref name="Ansaloni" />
|-
|CSAR13
|?
|?
|?
|?
|?
|-
|50k+A4
|?
|?
|?
|630
|?
|-
|}

= How to choose the correct parameters yourself =

A good place to start is the [https://sid.erda.dk/share_redirect/HUEfw6ttjf/index.html Unofficial dose calculator]

* Choose the EBL tool ('''100''' or '''125''' keV)
* '''Write field size (µm)''' and '''Dots''': The combination of these two will give you the pixel size for a default pitch of 1.
** It is recommended to use high number of dots with a pitch multiplier for fine exposures
* '''Aperture''' and '''Beam current''': The combination of these two will give you the beam spot size

<blockquote style="background-color: #F0F0F0; border: dashed thin grey;">
The '''pixel size''' should be equal to the '''beam spot size'''
</blockquote>

* '''Area dose''': The recommended dose for the combination of substrate and resist stack that you have. If you don't know this value you can do a dose test for your substrate/resist combination or consult the [[Doses]] page

Recommended parameters for EBL - Revision history

Harry: /* Cleanroom recommendations */

Harry: /* How to choose the correct parameters yourself */

Harry: /* Cleanroom recommendations */