Plassys Evaporator - Revision history

Harry: /* Sample unloading */

2026-09-08T11:53:34Z

Sample unloading

← Older revision		Revision as of 11:53, 8 September 2026
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	<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">		<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
	* Accept the ''Process complete'' pop-up message		* Accept the ''Process complete'' pop-up message
	* Turn off the Carrera power supply, Kaufman controller~~, and close the valves of the gas bottles~~		* Turn off the Carrera power supply, Kaufman controller.
	On the <code>- LL state -</code> side of the user interface click <code>VENT</code>		* On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
	* Wait for the load lock to vent.		* Wait for the load lock to vent.
	*:''The venting is complete when you stop hearing the hissing sound of the N2 line''		*:''The venting is complete when you stop hearing the hissing sound of the N2 line''
	* Wear gloves. Sleeves and hairnet are also recommended.		* Wear gloves. Sleeves and hairnet are also recommended.
	Use the stepping stool to have better access to the loadlock		* Use the stepping stool to have better access to the loadlock
	*:'' Be careful with the ventilation unit above the tool''		*:'' Be careful with the ventilation unit above the tool''
	* Open the loadlock lid		* Open the loadlock lid

Harry: /* Checkourt list */

2026-09-08T11:51:38Z

Checkourt list

← Older revision		Revision as of 11:51, 8 September 2026
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	* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.		* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.

	==~~Checkourt~~ list==		===Checkout list===
	<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">		<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
	* Verify that '''the loadlock is pumping down.'''		* Verify that '''the loadlock is pumping down.'''

Harry: /* Checkourt list */

2026-09-08T11:51:13Z

Checkourt list

← Older revision		Revision as of 11:51, 8 September 2026
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	==Checkourt list==		==Checkourt list==
			<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
	* Verify that '''the loadlock is pumping down.'''		* Verify that '''the loadlock is pumping down.'''
	* Verify that '''the Carrera power supply, Kaufman controller are turned off.'''		* Verify that '''the Carrera power supply, Kaufman controller are turned off.'''

Harry: /* Sample unloading */

2026-09-08T11:50:24Z

Sample unloading

← Older revision		Revision as of 11:50, 8 September 2026
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	==Sample unloading==		==Sample unloading==
	# Accept the ''Process complete'' pop-up message		<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
	# Turn off the Carrera power supply, Kaufman controller, and close the ~~valces~~ of the gas bottles		* Accept the ''Process complete'' pop-up message
	# On the <code>- LL state -</code> side of the user interface click <code>VENT</code>		* Turn off the Carrera power supply, Kaufman controller, and close the valves of the gas bottles
	# Wait for the load lock to vent.		On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
	#:''The venting is complete when you stop hearing the hissing sound of the N2 line''		* Wait for the load lock to vent.
	# Wear gloves. Sleeves and ~~hair net~~ are also recommended.		*:''The venting is complete when you stop hearing the hissing sound of the N2 line''
	# Use the stepping stool to have better access to the loadlock		* Wear gloves. Sleeves and hairnet are also recommended.
	#:'' Be careful with the ventilation unit above the tool''		Use the stepping stool to have better access to the loadlock
	# Open the loadlock lid		*:'' Be careful with the ventilation unit above the tool''
	# Use the dedicated screwdriver to loosen the three main screws		* Open the loadlock lid
	# Rotate the holder to release it from the main stage.		* Use the dedicated screwdriver to loosen the three main screws
	# Place the holder on a cleanroom wipe on the table		* Rotate the holder to release it from the main stage.
	# Close the LL lid		* Place the holder on a cleanroom wipe on the table
	# Remove your chip from the holder.		* Close the LL lid
	# Wipe the holder with ethanol		* Remove your chip from the holder.
	# Place the holder back into the loadlock.		* Wipe the holder with ethanol
	#: If you used a holder from your own group, then place your holder back into the ~~descicator~~ and load the holder that was initially in the chamber.		* Place the holder back into the loadlock.
	# Align the holder pin with the pin in the chamber.		*: If you used a holder from your own group, then place your holder back into the desiccator and load the holder that was initially in the chamber.
	# Tighten the screws with the dedicated screwdriver and place it back in its holder.		* Align the holder pin with the pin in the chamber.
	# On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>		* Tighten the screws with the dedicated screwdriver and place it back in its holder.
	#: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.		* On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>
	#: '''~~Verify that~~ the load lock is pumping down'''		*: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.
	# Go to <code>File</code> and '''Log off'''		*: Verify that '''the load lock is pumping down'''
	# Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.		* Go to <code>File</code> and '''Log off'''
			* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.

			==Checkourt list==
			* Verify that '''the loadlock is pumping down.'''
			* Verify that '''the Carrera power supply, Kaufman controller are turned off.'''
			* Verify that '''you are logged off'''.
			* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.
			</div>
			</div>

Harry: /* Run a process */

2026-09-08T11:22:49Z

Run a process

← Older revision		Revision as of 11:22, 8 September 2026
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	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
	===Load recipe===		===Load recipe===
			<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">
	While the loadlock is pumping down, you can prepare your recipe		While the loadlock is pumping down, you can prepare your recipe
	* Click on the '''Edit process''' icon		* Click on the '''Edit process''' icon
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	*: ''On the saved recipe name you automatically get the date added''		*: ''On the saved recipe name you automatically get the date added''
	* Close the window		* Close the window
			</div>
	===Excecute recipe===		===Excecute recipe===
			<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">
	* Click on the '''Run process''' icon		* Click on the '''Run process''' icon
	* Load your recipe		* Load your recipe
	* Verify all your steps		* Verify all your steps
	* Click <code>Execute</code>		* Click <code>Execute</code>

	==== Are you doing evaporation?====		==== Are you doing evaporation?====
	: ''Turn on the Carrera power supply''		: ''Turn on the Carrera power supply''
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	: ''Turn on the Kaufman control unit''		: ''Turn on the Kaufman control unit''
	: ''Open the valve of the argon bottle''		: ''Open the valve of the argon bottle''

	==== '''Are you doing oxidation?====		==== '''Are you doing oxidation?====
	: ''Verify that the oxygen bottle valve is open''		: ''Verify that the oxygen bottle valve is open''
			</div>
	===Monitor the process===		===Monitor the process===
			<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
	* '''Do not leave the system unattended'''		* '''Do not leave the system unattended'''

	* During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages		* During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages

	* Keep the viewport shutter always closed		* Keep the viewport shutter always closed

	* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)		* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)
			</div>
	</div>		</div>

Harry: /* Load recipe */

2026-09-08T11:19:04Z

Load recipe

← Older revision		Revision as of 11:19, 8 September 2026
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	===Load recipe===		===Load recipe===
	While the loadlock is pumping down, you can prepare your recipe		While the loadlock is pumping down, you can prepare your recipe
	# Click on the '''Edit process''' icon		* Click on the '''Edit process''' icon
	# <code>File > Open recipe> ...</code> Choose from your group folde		* <code>File > Open recipe> ...</code> Choose from your group folde
	# Edit the main parameters such as time, thickness, and tilt		* Edit the main parameters such as time, thickness, and tilt
	# Save the recipe		* Save the recipe
	#: ''On the saved recipe name you automatically get the date added''		*: ''On the saved recipe name you automatically get the date added''
	# Close the window		* Close the window

	===Excecute recipe===		===Excecute recipe===

Harry: /* Are you doing milling? */

2026-09-08T11:18:19Z

Are you doing milling?

← Older revision		Revision as of 11:18, 8 September 2026
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	: ''Turn on the Carrera power supply''		: ''Turn on the Carrera power supply''
	==== '''Are you doing milling?====		==== '''Are you doing milling?====
	: ''Turn on the Kaufman control unit ~~and open~~ the valve of the argon bottle''		: ''Turn on the Kaufman control unit''
			: ''Open the valve of the argon bottle''

	==== '''Are you doing oxidation?====		==== '''Are you doing oxidation?====
	: ''Verify that the oxygen bottle valve is open''		: ''Verify that the oxygen bottle valve is open''

Harry: /* Excecute recipe */

2026-09-08T11:17:54Z

Excecute recipe

← Older revision		Revision as of 11:17, 8 September 2026
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	===Excecute recipe===		===Excecute recipe===
	* ~~'''Are you doing evaporation?'''~~		* Click on the '''Run process''' icon
	*: ''Turn on the ~~Carrera power supply~~''		* Load your recipe
	* '~~''Are you doing milling?~~'''		* Verify all your steps
	*~~: ''Turn on the Kaufman control unit and open the valve of the argon bottle''~~		* Click <code>Execute</code>
	* ~~'''Are you doing oxidation?'''~~
	*~~: ''Verify that the oxygen bottle valve is open''~~

	~~# Click~~ on the '''~~Run process~~''' ~~icon~~		==== Are you doing evaporation?====
	~~# Load your recipe~~		: ''Turn on the Carrera power supply''
	# Verify ~~all your steps~~		==== '''Are you doing milling?====
	~~#Click <code>Execute</code>~~		: ''Turn on the Kaufman control unit and open the valve of the argon bottle''
			==== '''Are you doing oxidation?====
			: ''Verify that the oxygen bottle valve is open''

	===Monitor the process===		===Monitor the process===

Harry: /* Loading your sample */

2026-09-08T11:15:39Z

Loading your sample

Harry: /* Standard Operating Procedure */

2026-09-08T11:14:39Z

Standard Operating Procedure

← Older revision		Revision as of 11:14, 8 September 2026
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	</div>		</div>

	==Load ~~your~~ recipe==		==Run a process==
			<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
			===Load recipe===
	While the loadlock is pumping down, you can prepare your recipe		While the loadlock is pumping down, you can prepare your recipe
	# Click on the '''Edit process''' icon		# Click on the '''Edit process''' icon
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	# Close the window		# Close the window

	==Excecute ~~your~~ recipe==		===Excecute recipe===
	* '''Are you doing evaporation?'''		* '''Are you doing evaporation?'''
	*: ''Turn on the Carrera power supply''		*: ''Turn on the Carrera power supply''
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	#Click <code>Execute</code>		#Click <code>Execute</code>

	==Monitor ~~your~~ process==		===Monitor the process===
	* '''Do not leave the system unattended'''		* '''Do not leave the system unattended'''

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	* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)		* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)

			</div>

	==Sample unloading==		==Sample unloading==

← Older revision		Revision as of 11:15, 8 September 2026
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	==Loading your sample==		==Loading your sample==
	<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">		<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
	# On the <code>- LL state -</code> side of the user interface click <code>VENT</code>		* On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
	# Wait for the load lock to vent.		* Wait for the load lock to vent.
	#:''The venting is complete when you stop hearing the hissing sound of the N2 line''		*:''The venting is complete when you stop hearing the hissing sound of the N2 line''
	# Wear gloves. Sleeves and hair net are also recommended.		* Wear gloves. Sleeves and hair net are also recommended.
	# Use the stepping stool to have better access to the loadlock		* Use the stepping stool to have better access to the loadlock
	#:'' Be careful with the ventilation unit above the tool''		*:'' Be careful with the ventilation unit above the tool''
	# Open the loadlock lid		* Open the loadlock lid
	# Use the dedicated screwdriver to loosen the three main screws		* Use the dedicated screwdriver to loosen the three main screws
	# Rotate the holder to release it from the main stage.		* Rotate the holder to release it from the main stage.
	# Place the holder on a cleanroom wipe on the table		* Place the holder on a cleanroom wipe on the table
	# Close the LL lid		* Close the LL lid
	# Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.		* Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.
	#: '''Keep the unused holders in the N2 desiccator'''		*: '''Keep the unused holders in the N2 desiccator'''
	# Align the holder pin with the pin in the chamber. This will help you with any angled evaporations.		* Align the holder pin with the pin in the chamber. This will help you with any angled evaporations.
	# Tighten the screws with the dedicated screwdriver and place it back in its holder.		* Tighten the screws with the dedicated screwdriver and place it back in its holder.
	# On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>		* On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>
	#: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.		*: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.
	</div>		</div>