Plassys Evaporator - Revision history

Harry at 13:24, 11 November 2025

2025-11-11T13:24:33Z

← Older revision		Revision as of 13:24, 11 November 2025
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	\|secondary = Martin		\|secondary = Martin
	}}		}}
			''Page last updated: 11 Nov 2025''
	= Overview =		= Overview =
	Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.		Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.

2025-09-10T08:49:53Z

2025-09-09T13:56:24Z

← Older revision		Revision as of 13:56, 9 September 2025
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			{{Infobox tool
			\|image = Tools FS bonder.jpg
			\|toolfullname = MEB550S
			\|website = https://plassys.com/
			\|company = Plassys
			\|description = Evaporation system
			\|location = 1st floor lab (03.2.213)
			\|primary = Harry
			\|secondary = Martin
			}}

	= Overview =		= Overview =
	Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.		Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.

2025-09-09T13:46:13Z

Sample unloading

← Older revision		Revision as of 13:46, 9 September 2025
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	#: '''Verify that the load lock is pumping down'''		#: '''Verify that the load lock is pumping down'''
	# Go to <code>File</code> and '''Log off'''		# Go to <code>File</code> and '''Log off'''
	# Verify that '''the surfaces are tidy, there are ~~now~~ excess wipes on the table and you left no samples behind'''.		# Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.

2025-09-09T13:45:43Z

Standard Operating Procedure

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 # Use the dedicated screwdriver to loosen the three main screws
 # Rotate the holder to release it from the main stage.
-# Place the holder on a cleanroom wipe on the stable
+# Place the holder on a cleanroom wipe on the table
 # Close the LL lid
 # Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.
@@ Line 99: / Line 99: @@
 # Accept the ''Process complete'' pop-up message
 # Turn off the Carrera power supply, Kaufman controller, and close the valces of the gas bottles

2025-09-09T13:38:35Z

Sample unloading

← Older revision		Revision as of 13:38, 9 September 2025
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	==Sample unloading==		==Sample unloading==
			# Accept the ''Process complete'' pop-up message
			# Turn off the Carrera power supply, Kaufman controller, and close the valces of the gas bottles

2025-09-09T13:35:42Z

Monitor your process

← Older revision		Revision as of 13:35, 9 September 2025
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	==Monitor your process==		==Monitor your process==
			* '''Do not leave the system unattended'''

			* During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages

			* Keep the viewport shutter always closed

			* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)

	==Sample unloading==		==Sample unloading==

2025-09-09T13:31:35Z

Excecute your recipe

2025-09-09T13:31:17Z

Standard Operating Procedure

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 ==Pre-checks and log in==
 ===Pre-checks===
 # Log the loadlock and main chamber pressures in the Excel log sheet at the external computer.
 #* P<sub>LL</sub> ~ 1e-7 bar
@@ Line 45: / Line 47: @@
 * Click on the <code>logged off</code> indication of the GUI and use your group's credentials to log in
 ==Sample loading==
 ==Load your recipe==
 ==Excecute your recipe==
 ==Monitor your process==
 ==Sample unloading==

2025-09-09T12:36:18Z

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-== Overview ==
+= Overview =
 Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.
@@ Line 10: / Line 10: @@
 Film Quality: ''Surface roughness - 1.6 nm for 100nm thick film ( scan area 2 um /AFM Analysis (June 2023)''
-== Currently loaded materials ==
+= Currently loaded materials =
 {| class="wikitable"
@@ Line 27: / Line 27: @@
 |}
-== Substrates allowed ==
+= Substrates allowed =
-Silicon and Sapphire only
+= Standard Operating Procedure=