Karolis: added link to Olympus scopes

2022-05-09T12:47:58Z

added link to Olympus scopes

← Older revision		Revision as of 12:47, 9 May 2022
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	Objectives are 5x, 10x, 20x, 50x, 100x.		Objectives are 5x, 10x, 20x, 50x, 100x.
	Ultimate optical resolution (Rayleigh limit) of the 100x objective should be ~400 nm (at 550 nm wavelength).		Ultimate optical resolution (Rayleigh limit) of the 100x objective should be ~400 nm (at 550 nm wavelength).

			There are also two [[Olympus microscopes]] with a similar feature set.

	If you want to resolve smaller features, you can use:		If you want to resolve smaller features, you can use:

Karolis: created using Olympus as a template

2022-05-09T08:14:51Z

created using Olympus as a template

New page

{{Infobox tool
|image = Tool Nikon.jpg
|toolfullname = Nikon Eclipse LV150NA
|website = https://www.nikonmetrology.com/en-us/industrial-microscopes/upright-microscopes-eclipse-lv150na
|company = Nikon
|description = Optical microscope
|location = Cleanroom 1 (03.2.209A)
|primary = Nader
|secondary = Karolis
}}
There is a Nikon metrology microscope in CR1.
It is equipped with a DS-Ri2 digital camera and a motorized Märzhäuser Wetzlar Tango stage.
Objectives are 5x, 10x, 20x, 50x, 100x.
Ultimate optical resolution (Rayleigh limit) of the 100x objective should be ~400 nm (at 550 nm wavelength).

If you want to resolve smaller features, you can use:
* [[JEOL 7800F|JEOL JSM-7800F]] SEM
* [[Raith eLine]] SEM
* [[Philips TEM]]

If you want to resolve topographical features, you can use:
* [[Tencor profilometer]]
* [[Bruker Dimension Icon AFM]]

If you want to observe [[Resists|photoresist]], insert the green filter at the back of the microscope body.
Otherwise white light will expose your resist.

== Usage rules ==
No booking is required, but please be flexible with regard to needs of other users.

The microscope should be left with the light turned off in the ''NIS-Elements'' software.

Do not leave samples on the stage or elsewhere in the working area, they might get discarded.

Save images you want to keep to Z drive, local files might get discarded.

== How to: take an overview image ==

=== Scanning the area ===
# Navigate to (outermost) points of interest, e.g. top left and bottom right corners of your chip. Consider turning off continuous autoexposure (''Continuous AE'').
# For each point: ''right click feature > Add this Point to ND Acquisition''
# After all features have been added, scan the image:
#* ''Acquire > Scan Large Image...''
#* or ''right click overview image area > Large Image: Scan Large Image...''
# The ''Scan Large Image'' window will open. Click the button with three green dots.
# The microscope will now automatically take and tile the images of the area defined by the points.

=== Saving the image ===
# Select a filetype that suits your needs:
#* Lossy (recommended for overview images):
#** Recommended lowest compression JPEG.
#** Low compression (high quality) images are indistinguishable from lossless images by human eye.
#** Filesize can be some tens of megabytes.
#* Lossless:
#** Recommended PNG or TIFF.
#** The filesize can easily be several hundred megabytes.
#** LZW TIFF compression can reduce the size in half.
#** PNG would be a quarter of the size, but only 8 bits per color instead of 16.
# Save directly into Z drive.

== Troubleshooting ==
; The corners of the image are dark (vignetting)!
: There is a mechanical spring that holds the microscope components together. It needs to be tightened by service. Please notify CR staff.
== Remote access ==
* TeamViewer: Scope3-Nikon
* LogMeIn: Scope 3 (CR1) [CR1-NikonScope]

[[Category:Tools]]
[[Category:Characterization]]

Nikon microscope - Revision history

Karolis: added link to Olympus scopes

Karolis: created using Olympus as a template