Lithography glossary - Revision history

Karolis at 19:37, 10 April 2022

2022-04-10T19:37:50Z

← Older revision		Revision as of 19:37, 10 April 2022
Line 1:		Line 1:
	* '''Dark erosion''': non zero dissolution of resist in unexposed areas in developer		* '''Dark erosion''': non zero dissolution of [[Resists\|resist]] in unexposed areas in developer
	* '''EBL''': electron beam lithography		* '''EBL''': electron beam lithography
	* '''Flash point''': The lowest temperature at which vapor of a material will ignite, given an ignition source. This is not to be confused with the autoignition temperature.		* '''Flash point''': The lowest temperature at which vapor of a material will ignite, given an ignition source. This is not to be confused with the autoignition temperature.
Line 14:		Line 14:
	* '''MIF''': Metal ion free		* '''MIF''': Metal ion free
	* '''MIB''': Metal ion bearing, same as MIF		* '''MIB''': Metal ion bearing, same as MIF
	* '''Softbake''': The baking-out of a solvent from a polymer following spin coating. In e.g. the case of photoresist, this helps avoid e.g. mask contamination, popping or foaming of the resist by N2 created during exposure, improves resist adhesion, minimizes dark erosion, etc.		* '''Softbake''': The baking-out of a solvent from a polymer following [[Laurell spinners\|spin coating]]. In e.g. the case of photoresist, this helps avoid e.g. mask contamination, popping or foaming of the resist by N2 created during exposure, improves resist adhesion, minimizes dark erosion, etc.
	* '''Resin''': "Soft solid or highly viscous substance, usually containing prepolymers with reactive groups" (source)		* '''Resin''': "Soft solid or highly viscous substance, usually containing prepolymers with reactive groups" (source)
	* '''Vapor pressure''': The pressure exerted by a vapor in thermodynamic equilibrium with its condensed (liquid or solid) phase at a given temperature in a closed system. The higher the vapor pressure, the more volatile.		* '''Vapor pressure''': The pressure exerted by a vapor in thermodynamic equilibrium with its condensed (liquid or solid) phase at a given temperature in a closed system. The higher the vapor pressure, the more volatile.
	[[Category:Fabrication]]		[[Category:Fabrication]]

Karolis at 22:45, 7 April 2022

2022-04-07T22:45:59Z

← Older revision		Revision as of 22:45, 7 April 2022
Line 17:		Line 17:
	* '''Resin''': "Soft solid or highly viscous substance, usually containing prepolymers with reactive groups" (source)		* '''Resin''': "Soft solid or highly viscous substance, usually containing prepolymers with reactive groups" (source)
	* '''Vapor pressure''': The pressure exerted by a vapor in thermodynamic equilibrium with its condensed (liquid or solid) phase at a given temperature in a closed system. The higher the vapor pressure, the more volatile.		* '''Vapor pressure''': The pressure exerted by a vapor in thermodynamic equilibrium with its condensed (liquid or solid) phase at a given temperature in a closed system. The higher the vapor pressure, the more volatile.
			[[Category:Fabrication]]

Petur at 18:48, 30 November 2016

2016-11-30T18:48:09Z

← Older revision		Revision as of 18:48, 30 November 2016
Line 1:		Line 1:
	* '''Dark erosion''': non zero dissolution of resist in unexposed areas in developer		* '''Dark erosion''': non zero dissolution of resist in unexposed areas in developer
			* '''EBL''': electron beam lithography
	* '''Flash point''': The lowest temperature at which vapor of a material will ignite, given an ignition source. This is not to be confused with the autoignition temperature.		* '''Flash point''': The lowest temperature at which vapor of a material will ignite, given an ignition source. This is not to be confused with the autoignition temperature.
	* '''Mercury emission lines''':		* '''Mercury emission lines''':

Petur at 12:36, 22 August 2016

2016-08-22T12:36:25Z

← Older revision		Revision as of 12:36, 22 August 2016
Line 4:		Line 4:
	{\| class="wikitable"		{\| class="wikitable"
	\|-		\|-
	\| 365.4 nm ~~\|\| I-line~~ \|\| ultraviolet		\| I-line \|\| 365.4 nm \|\| ultraviolet
	\|-		\|-
	\| 404.7 nm ~~\|\| H-line~~ \|\| violet		\| H-line \|\| 404.7 nm \|\| violet
	\|-		\|-
	\| 435.8 nm ~~\|\| G-line~~ \|\| blue		\| G-line \|\| 435.8 nm \|\| blue
	\|}		\|}
	* '''MIC''': Metal ion containing		* '''MIC''': Metal ion containing

Petur at 12:30, 22 August 2016

2016-08-22T12:30:18Z

← Older revision		Revision as of 12:30, 22 August 2016
Line 1:		Line 1:
	* Mercury emission lines:		* '''Dark erosion''': non zero dissolution of resist in unexposed areas in developer
			* '''Flash point''': The lowest temperature at which vapor of a material will ignite, given an ignition source. This is not to be confused with the autoignition temperature.
			* '''Mercury emission lines''':
	{\| class="wikitable"		{\| class="wikitable"
	\|-		\|-
Line 8:		Line 10:
	\| 435.8 nm \|\| G-line \|\| blue		\| 435.8 nm \|\| G-line \|\| blue
	\|}		\|}
	*		* '''MIC''': Metal ion containing
			* '''MIF''': Metal ion free
			* '''MIB''': Metal ion bearing, same as MIF
			* '''Softbake''': The baking-out of a solvent from a polymer following spin coating. In e.g. the case of photoresist, this helps avoid e.g. mask contamination, popping or foaming of the resist by N2 created during exposure, improves resist adhesion, minimizes dark erosion, etc.
			* '''Resin''': "Soft solid or highly viscous substance, usually containing prepolymers with reactive groups" (source)
			* '''Vapor pressure''': The pressure exerted by a vapor in thermodynamic equilibrium with its condensed (liquid or solid) phase at a given temperature in a closed system. The higher the vapor pressure, the more volatile.

Petur: Created page with "* Mercury emission lines: {| class="wikitable" |- | 365.4 nm || I-line || ultraviolet |- | 404.7 nm || H-line || violet |- | 435.8 nm || G-line || blue |} *"

2016-08-22T12:23:55Z

Created page with "* Mercury emission lines: {| class="wikitable" |- | 365.4 nm || I-line || ultraviolet |- | 404.7 nm || H-line || violet |- | 435.8 nm || G-line || blue |} *"

New page

* Mercury emission lines:
{| class="wikitable"
|-
| 365.4 nm || I-line || ultraviolet
|-
| 404.7 nm || H-line || violet
|-
| 435.8 nm || G-line || blue
|}
*