Laurell spinners - Revision history

Harry at 11:00, 20 December 2024

2024-12-20T11:00:28Z

← Older revision		Revision as of 11:00, 20 December 2024
Line 14:		Line 14:
	There should be some spares in the drawers in Cleanroom 1.		There should be some spares in the drawers in Cleanroom 1.

	There is also a special fork to center 2" wafers; look for it on the ~~right side~~ of ~~the laminar air flow bench~~.		There is also a special fork to center 2" wafers; look for it inside the fumehood of CR1 spinner.

	== Usage rules ==		== Usage rules ==

Harry: /* Usage rules */

2024-12-20T10:59:28Z

Usage rules

← Older revision		Revision as of 10:59, 20 December 2024
Line 17:		Line 17:

	== Usage rules ==		== Usage rules ==
	The users are obliged to clean up after themselves! First use a dry wipe to collect most of the resist on the inside walls, then use ~~one or two~~ with acetone to clean the inside surfaces thoroughly.		The users are obliged to clean up after themselves! First use a dry wipe to collect most of the resist on the inside walls, then use more with acetone or 1,3 dioxolane to clean the inside surfaces thoroughly.

	LOR3B is ~~not~~ allowed in the spinner in Cleanroom 1.		LOR3B is only allowed in the spinner in Cleanroom 1.
	[[Category:Tools]]		[[Category:Tools]]
	[[Category:Deposition]]		[[Category:Deposition]]

Karolis: fixed link

2022-04-10T19:06:59Z

fixed link

← Older revision		Revision as of 19:06, 10 April 2022
Line 11:		Line 11:

	There are chucks to accommodate small pieces.		There are chucks to accommodate small pieces.
	Let the [[About\|cleanroom staff] know if the chuck or the o-ring is damaged.		Let the [[About\|cleanroom staff]] know if the chuck or the o-ring is damaged.
	There should be some spares in the drawers in Cleanroom 1.		There should be some spares in the drawers in Cleanroom 1.

Karolis: added short description and usage rules

2022-04-10T19:06:25Z

added short description and usage rules

← Older revision		Revision as of 19:06, 10 April 2022
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	\|company = Laurell Technologies Corp.		\|company = Laurell Technologies Corp.
	\|description = Spin coater		\|description = Spin coater
	\|location = ~~Cleanrooms~~ 1 & 2		\|location = Cleanroom 1 (03.2.209A)<br />Cleanroom 2 (03.2.203B)
	\|primary = Nader		\|primary = Nader
	}}		}}
			Used to spin photo- and e-beam [[Resists\|resist]] on substrates for either exposure in one of the lithography [[Tools\|tools]], or as a protective layer for e.g. [[Dicing saw\|dicing]].

			There are chucks to accommodate small pieces.
			Let the [[About\|cleanroom staff] know if the chuck or the o-ring is damaged.
			There should be some spares in the drawers in Cleanroom 1.

			There is also a special fork to center 2" wafers; look for it on the right side of the laminar air flow bench.

			== Usage rules ==
			The users are obliged to clean up after themselves! First use a dry wipe to collect most of the resist on the inside walls, then use one or two with acetone to clean the inside surfaces thoroughly.

			LOR3B is not allowed in the spinner in Cleanroom 1.
	[[Category:Tools]]		[[Category:Tools]]
	[[Category:Deposition]]		[[Category:Deposition]]

Karolis at 19:45, 6 April 2022

2022-04-06T19:45:35Z

← Older revision		Revision as of 19:45, 6 April 2022
Line 8:		Line 8:
	\|primary = Nader		\|primary = Nader
	}}		}}

			[[Category:Tools]]
			[[Category:Deposition]]

Karolis: updated infobox

2019-02-12T15:39:13Z

updated infobox

← Older revision		Revision as of 15:39, 12 February 2019
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	\|image = Tool Laurell spinner.jpg		\|image = Tool Laurell spinner.jpg
	\|toolfullname = Laurell WS-650MZ-23NPP/LITE		\|toolfullname = Laurell WS-650MZ-23NPP/LITE
	\|website = ~~http~~://www.laurell.com		\|website = https://www.laurell.com/spin-coater/?model=WS-650-23
	\|company = Laurell Technologies Corp.		\|company = Laurell Technologies Corp.
	\|description = Spin coater		\|description = Spin coater
	\|location = Cleanrooms 1 & 2		\|location = Cleanrooms 1 & 2
	\|primary = Nader		\|primary = Nader
	~~\|secondary = Shiv~~
	~~\|limits = None~~
	~~\|computer = None~~
	~~\|manual = TBD~~
	}}		}}

Petur at 14:33, 5 December 2016

2016-12-05T14:33:04Z

← Older revision		Revision as of 14:33, 5 December 2016
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	{{Infobox tool		{{Infobox tool
	\|image = Tool Laurell spinner.jpg		\|image = Tool Laurell spinner.jpg
	\|toolfullname = ~~TBD~~		\|toolfullname = Laurell WS-650MZ-23NPP/LITE
	\|website = ~~TBD~~		\|website = http://www.laurell.com
	\|company = ~~TBD~~		\|company = Laurell Technologies Corp.
	\|description = ~~TBD~~		\|description = Spin coater
	\|location = ~~TBD~~		\|location = Cleanrooms 1 & 2
	\|primary = ~~TBD~~		\|primary = Nader
	\|secondary = ~~TBD~~		\|secondary = Shiv
	\|limits = ~~TBD~~		\|limits = None
	\|computer = ~~TBD~~		\|computer = None
	\|manual = TBD		\|manual = TBD
	}}		}}

Petur: Created page with "{{Infobox tool |image = Tool Laurell spinner.jpg |toolfullname = TBD |website = TBD |company = TBD |description = TBD |location = TBD |primary = TBD |secondary = TBD |limits =..."

2016-12-05T13:20:22Z

Created page with "{{Infobox tool |image = Tool Laurell spinner.jpg |toolfullname = TBD |website = TBD |company = TBD |description = TBD |location = TBD |primary = TBD |secondary = TBD |limits =..."

New page

{{Infobox tool
|image = Tool Laurell spinner.jpg
|toolfullname = TBD
|website = TBD
|company = TBD
|description = TBD
|location = TBD
|primary = TBD
|secondary = TBD
|limits = TBD
|computer = TBD
|manual = TBD
}}