<?xml version="1.0"?>
<feed xmlns="http://www.w3.org/2005/Atom" xml:lang="en-GB">
	<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?action=history&amp;feed=atom&amp;title=How_to_evaporate_metals_in_AJA</id>
	<title>How to evaporate metals in AJA - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?action=history&amp;feed=atom&amp;title=How_to_evaporate_metals_in_AJA"/>
	<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=How_to_evaporate_metals_in_AJA&amp;action=history"/>
	<updated>2026-07-27T06:59:34Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
	<generator>MediaWiki 1.43.9</generator>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=How_to_evaporate_metals_in_AJA&amp;diff=3074&amp;oldid=prev</id>
		<title>Harry: /* Gold */</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=How_to_evaporate_metals_in_AJA&amp;diff=3074&amp;oldid=prev"/>
		<updated>2026-07-20T14:04:40Z</updated>

		<summary type="html">&lt;p&gt;&lt;span class=&quot;autocomment&quot;&gt;Gold&lt;/span&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en-GB&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 14:04, 20 July 2026&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l16&quot;&gt;Line 16:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 16:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==Gold==&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==Gold==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;Directly copied from &lt;/del&gt;Lekser &lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;website. &lt;/del&gt;Will be adjusted according to our SOPs&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;===Tips===&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;* Use a deposition rate of 1 AA/sec to limit the material consumption.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;* Use large oscillation on the beam spread while you ramp up the current.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;** After the thermal soaking, limit the beam oscillation to a steady beam spot (no oscillation).&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;* After you ramp down the current to 0 mA, wait for 3 minutes until the incandescent material no longer glows.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;===&lt;/ins&gt;Lekser &lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;recommendations===&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&#039;&#039;&lt;/ins&gt;Will be adjusted according to our SOPs&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&#039;&#039;&#039;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;We recommend sweeping the e-beam and ramping power to fully melt the material before depositing films. Once melted, a focused e-beam can be used for the deposition process. With an evaporation temperature of ~1,400°C and a base pressure for evaporation of 10-6 Torr or lower, we anticipate the deposition rate to be 1-5 Angstroms per second.  &lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;We recommend sweeping the e-beam and ramping power to fully melt the material before depositing films. Once melted, a focused e-beam can be used for the deposition process. With an evaporation temperature of ~1,400°C and a base pressure for evaporation of 10-6 Torr or lower, we anticipate the deposition rate to be 1-5 Angstroms per second.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==Platinum==&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;==Platinum==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Harry</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=How_to_evaporate_metals_in_AJA&amp;diff=3044&amp;oldid=prev</id>
		<title>Harry: Created page with &quot;=The genius remote=  [https://e-beam.ferrotec.com/wp-content/uploads/sites/7/carrera_genius.pdf| The genius remote] is used to control the coils at the e-beam and manipulate the beam.  There are two options: * &#039;&#039;&#039;Left joystick:&#039;&#039;&#039; controls the amplitude (&#039;&#039;how much the beam oscillates&#039;&#039;) * &#039;&#039;&#039;Right joystick:&#039;&#039;&#039; controls the beam position (&#039;&#039;where the beam is located or where is the centre of the oscillation&#039;&#039;)  =Evaporation of metals= The following instructions are based...&quot;</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=How_to_evaporate_metals_in_AJA&amp;diff=3044&amp;oldid=prev"/>
		<updated>2026-06-30T14:54:22Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;=The genius remote=  [https://e-beam.ferrotec.com/wp-content/uploads/sites/7/carrera_genius.pdf| The genius remote] is used to control the coils at the e-beam and manipulate the beam.  There are two options: * &amp;#039;&amp;#039;&amp;#039;Left joystick:&amp;#039;&amp;#039;&amp;#039; controls the amplitude (&amp;#039;&amp;#039;how much the beam oscillates&amp;#039;&amp;#039;) * &amp;#039;&amp;#039;&amp;#039;Right joystick:&amp;#039;&amp;#039;&amp;#039; controls the beam position (&amp;#039;&amp;#039;where the beam is located or where is the centre of the oscillation&amp;#039;&amp;#039;)  =Evaporation of metals= The following instructions are based...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;=The genius remote=&lt;br /&gt;
&lt;br /&gt;
[https://e-beam.ferrotec.com/wp-content/uploads/sites/7/carrera_genius.pdf| The genius remote] is used to control the coils at the e-beam and manipulate the beam.&lt;br /&gt;
&lt;br /&gt;
There are two options:&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;Left joystick:&amp;#039;&amp;#039;&amp;#039; controls the amplitude (&amp;#039;&amp;#039;how much the beam oscillates&amp;#039;&amp;#039;)&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;Right joystick:&amp;#039;&amp;#039;&amp;#039; controls the beam position (&amp;#039;&amp;#039;where the beam is located or where is the centre of the oscillation&amp;#039;&amp;#039;)&lt;br /&gt;
&lt;br /&gt;
=Evaporation of metals=&lt;br /&gt;
The following instructions are based on the manufacturers ([https://www.lesker.com/newweb/deposition_materials/evaporation-process-notes.cfm | Lesker] and [https://thermionics.com/uhv-resources/ultra-high-vacuum-faq/ | Thermionics])&lt;br /&gt;
&lt;br /&gt;
==Aluminium==&lt;br /&gt;
Directly copied from Thermionics website. Will be adjusted according to our SOPs&lt;br /&gt;
&lt;br /&gt;
Aluminum (Al) is highly reactive when molten. Al will react with all liner materials. Al also getters Oxygen to form oxide layers if any oxygen is present during deposition. Aluminum Oxide (Al2O3) has a much higher melting point and vapor pressure when compared to Al (2,045C M.P., 1550C V.P. for Al2O3 compared to 660C M.P., 1,010 V.P. for Al). Further Al2O3 is an excellent insulator compared to Al which is a fairly good conductor. These properties make electron beam evaporation of Al more complicated than most metals. When evaporating Aluminum DO NOT SWEEP the beam! Sweeping the beam produces more heat closer to the liner / material interface. This will greatly speed up the reaction process. You can sweep to initially melt down the charge if needed (larger crucibles will require this- a 2.2cc typically will not). Place the beam as close to the center of the crucible as possible during evaporation. Slowly ramp power up and down. It should take 1-3 minutes to reach evaporation and after finishing the run, you should come back to a low power level (20-30 mA) and soak for 30-60 seconds to “cool down” the melt. This will reduce liner breakage from expansion.Do not overfill liner. Fill the liner 50%-70% (when melted). Aluminum will “climb” the walls of a liner and if it spills over and touches the water cooled crucible the liner will break. In larger sources you can use a liner inside a liner to eliminate this possibility. Overfilling a liner is the #1 cause of failure with AL.&lt;br /&gt;
&lt;br /&gt;
==Gold==&lt;br /&gt;
Directly copied from Lekser website. Will be adjusted according to our SOPs&lt;br /&gt;
&lt;br /&gt;
We recommend sweeping the e-beam and ramping power to fully melt the material before depositing films. Once melted, a focused e-beam can be used for the deposition process. With an evaporation temperature of ~1,400°C and a base pressure for evaporation of 10-6 Torr or lower, we anticipate the deposition rate to be 1-5 Angstroms per second. &lt;br /&gt;
&lt;br /&gt;
==Platinum==&lt;br /&gt;
This section is currently blank and will be filled in the future&lt;br /&gt;
&lt;br /&gt;
==Chromium==&lt;br /&gt;
This section is currently blank and will be filled in the future&lt;br /&gt;
&lt;br /&gt;
==Silicon Oxide==&lt;br /&gt;
This section is currently blank and will be filled in the future&lt;/div&gt;</summary>
		<author><name>Harry</name></author>
	</entry>
</feed>