https://wiki.nbi.ku.dk/w/cleanroom/index.php?action=history&feed=atom&title=Elionix_F-125 2026-06-16T22:17:59Z Revision history for this page on the wiki MediaWiki 1.43.8 https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Elionix_F-125&diff=2673&oldid=prev 2025-11-10T15:08:25Z

<p></p> <table style="background-color: #fff; color: #202122;" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="en-GB"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 15:08, 10 November 2025</td> </tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1">Line 1:</td> <td colspan="2" class="diff-lineno">Line 1:</td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{{Infobox tool</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{{Infobox tool</div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>|image = <del style="font-weight: bold; text-decoration: none;">Tool Elionix</del>.jpg</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|image = <ins style="font-weight: bold; text-decoration: none;">F125</ins>.jpg</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|toolfullname = Elionix F125</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|toolfullname = Elionix F125</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|website = http://www.elionix.co.jp/english/</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|website = http://www.elionix.co.jp/english/</div></td></tr> </table>

Zhe https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Elionix_F-125&diff=2669&oldid=prev 2025-11-10T14:59:15Z

<p>Created page with &quot;{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...&quot;</p> <p><b>New page</b></p><div>{{Infobox tool<br /> |image = Tool Elionix.jpg<br /> |toolfullname = Elionix F125<br /> |website = http://www.elionix.co.jp/english/<br /> |company = ELIONIX INC. <br /> |description = Electron beam lithography system<br /> |location = 01.K03<br /> |primary = Zhe<br /> |secondary = Harry<br /> }}<br /> <br /> Elionix F125 is a 125 kV acceleration electron beam lithography tool.<br /> == Tool Specification ==<br /> * Acceleration voltage 50,75,100,125 kV<br /> * Minimum beam diameter - 1.8 nm<br /> * Beam current - 100 pA to 100nA<br /> * Field Size - Min 100 um Max 3000 um <br /> * Minimum line width - 7nm <br /> * Overlay accuracy - 20nm</div>

Zhe