Elionix 7000 - Revision history

Harry at 09:31, 11 July 2025

2025-07-11T09:31:20Z

← Older revision		Revision as of 09:31, 11 July 2025
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	\|description = Electron beam lithography system		\|description = Electron beam lithography system
	\|location = 03.01.K03		\|location = 03.01.K03
	\|primary = ~~Smitha~~		\|primary = Harry
	\|secondary = Zhe		\|secondary = Zhe
	}}		}}

Zhe: /* How to transfer Exposure Files */

2023-03-09T10:38:57Z

How to transfer Exposure Files

← Older revision		Revision as of 10:38, 9 March 2023
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	1) Upload your files in N drive under the folder - " Elionix 100 Exp Files " ( Make sure to create your own folder )		1) Upload your files in N drive under the folder - " Elionix 100 Exp Files " ( Make sure to create your own folder )

	2) Access your files in Elionix Exposure PC and copy them to local users folder .		2) Access your files in Elionix Exposure PC and copy them to local users folder .

Zhe: /* How to transfer Exposure Files */

2023-03-09T10:38:23Z

How to transfer Exposure Files

← Older revision		Revision as of 10:38, 9 March 2023
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	== How to transfer Exposure Files ==		== How to transfer Exposure Files ==

	1) Upload your files in N drive under the folder - " Elionix 100 Exp Files "		1) Upload your files in N drive under the folder - " Elionix 100 Exp Files " ( Make sure to create your own folder )
	( Make sure to create your own folder )
	2) Access your files in Elionix Exposure PC and copy them to local users folder .		2) Access your files in Elionix Exposure PC and copy them to local users folder .

Zhe: /* Transfer PC */

2023-03-09T10:37:49Z

Transfer PC

← Older revision		Revision as of 10:37, 9 March 2023
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	Currently hosted on the [https://wiki.nbi.ku.dk/qdevwiki/ElionixCheatSheet internal QDev wiki.]		Currently hosted on the [https://wiki.nbi.ku.dk/qdevwiki/ElionixCheatSheet internal QDev wiki.]

	== ~~Transfer PC~~ ==		== How to transfer Exposure Files ==
	~~Formerly known as~~ the ~~Design PC, this is the computer on a rack with wheels next to the two stationary racks with~~ Elionix ~~hardware.~~
	~~The desktop has all the shortcuts~~ to ~~network folders (Z: drive and user~~ folder ~~on the~~ Exposure PC) and ~~CAD software~~ to ~~check your patterns~~.		1) Upload your files in N drive under the folder - " Elionix 100 Exp Files "
	~~Any~~ files ~~outsides~~ the ~~designated user folders (shortcut on desktop) can be deleted without warning~~.		( Make sure to create your own folder )
			2) Access your files in Elionix Exposure PC and copy them to local users folder .

			Note:
			* Only upload exposure files to the folder .
			* Please do not access other general file from tool PC
			* You will find the shortcuts in Desktop





	=== Remote access ===		=== Remote access ===

Zhe: /* Tool Specification */

2023-03-09T10:27:58Z

Tool Specification

← Older revision		Revision as of 10:27, 9 March 2023
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	* Minimum line width - 8nm, 75 um field		* Minimum line width - 8nm, 75 um field
	* Overlay accuracy - 30nm		* Overlay accuracy - 30nm

	~~This is a user-operated system where users themselves are responsible for sample loading, alignment, data transfer, and exposure.~~

	Other lithography tools at the [[Main Page\|NBI cleanroom]]:		Other lithography tools at the [[Main Page\|NBI cleanroom]]:

Zhe: /* Tool Specification */

2023-03-09T10:25:51Z

Tool Specification

← Older revision		Revision as of 10:25, 9 March 2023
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	* [[Heidelberg µPG 501]] LED writer		* [[Heidelberg µPG 501]] LED writer
	* [[Süss mask aligner]]		* [[Süss mask aligner]]


	== Important notes on the fire alarm ==		== Important notes on the fire alarm ==

Zhe: /* Remote access */

2023-03-09T10:24:12Z

Remote access

← Older revision		Revision as of 10:24, 9 March 2023
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	Remote access to the tool is only granted to cleanroom staff.		Remote access to the tool is only granted to cleanroom staff.

	~~It is possible to reach the Elionix control PC through a local TeamViewer connection.~~

	[[Category:Tools]]		[[Category:Tools]]
	[[Category:Lithography]]		[[Category:Lithography]]

Zhe at 11:49, 2 January 2023

2023-01-02T11:49:34Z

← Older revision		Revision as of 11:49, 2 January 2023
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	Elionix 7000 is a 100 kV acceleration electron beam lithography tool.		Elionix 7000 is a 100 kV acceleration electron beam lithography tool.
			== Tool Specification ==
			* Acceleration voltage -25,50,75,100 kV
			* Minimum beam diameter - 1.8 nm
			* Beam current - 100 pA to 40nA
			* Field Size - Min 75 um X 75 um Max 600 um
			* Minimum line width - 8nm, 75 um field
			* Overlay accuracy - 30nm

	This is a user-operated system where users themselves are responsible for sample loading, alignment, data transfer, and exposure.		This is a user-operated system where users themselves are responsible for sample loading, alignment, data transfer, and exposure.
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	* Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.		* Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.
	* You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc.		* You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc.
	*: Please be mindful of other users who might want to use the system for longer in-between your bookings.		* Please be mindful of other users who might want to use the system for longer in-between your bookings.
	* You may book only 3 hours on the system at a time (see the after hours exception).		* You may book only 3 hours on the system at a time (see the after hours exception).
	* This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.		* This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.

Zhe at 11:41, 2 January 2023

2023-01-02T11:41:39Z

← Older revision		Revision as of 11:41, 2 January 2023
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	\|description = Electron beam lithography system		\|description = Electron beam lithography system
	\|location = 03.01.K03		\|location = 03.01.K03
	\|primary = ~~Karolis~~		\|primary = Smitha
	\|secondary = Zhe		\|secondary = Zhe
	}}		}}

Karolis: added tool alternatives

2022-04-10T18:31:49Z

added tool alternatives

← Older revision		Revision as of 18:31, 10 April 2022
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	This is a user-operated system where users themselves are responsible for sample loading, alignment, data transfer, and exposure.		This is a user-operated system where users themselves are responsible for sample loading, alignment, data transfer, and exposure.

			Other lithography tools at the [[Main Page\|NBI cleanroom]]:
			* [[Elionix F-125]], 125 kV EBL at QuanTech
			* [[Raith eLine]], 30 kV EBL
			* [[Heidelberg µPG 501]] LED writer
			* [[Süss mask aligner]]


	== Important notes on the fire alarm ==		== Important notes on the fire alarm ==