E-Gun evaporator - Revision history

Karolis: added tool alternatives

2022-04-10T11:23:08Z

added tool alternatives

← Older revision		Revision as of 11:23, 10 April 2022
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			Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:
			* [[Cambridge ALD\|ALD systems]]
			* [[AJA systems]] for sputtering/e-gun evaporation
			* [[Edwards evaporator\|Edwards thermal evaporator]]
			* [[Leica sputter coater]]
			* [[MBE\|Molecular beam epitaxy system]]
	== Guide to 4-pocket e-gun box chamber ==		== Guide to 4-pocket e-gun box chamber ==
	=== Loading sample/pumping down loadlock: ===		=== Loading sample/pumping down loadlock: ===

Karolis: reformatted from hard-coded numbers to wiki markup

2022-04-06T19:53:53Z

reformatted from hard-coded numbers to wiki markup

Show changes

Nader at 08:42, 14 December 2016

2016-12-14T08:42:36Z

@@ Line 47: / Line 47: @@
 .	When the pressure of the chamber is ≤ 5.10-7 mbar, evaporation can be initiated.
 == Deposition ==
@@ Line 112: / Line 92: @@
           a. Pull up all four breakers from right to left.

Nader at 08:29, 7 December 2016

2016-12-07T08:29:40Z

← Older revision		Revision as of 08:29, 7 December 2016
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	3. Close the air vent valve.		3. Close the air vent valve.

	4. Release the clamp and pull the load lock up, holding the grey handle, not the sliding rod.		4. Release the clamp and pull the load lock up, holding the grey handle, '''not the sliding rod'''.

	5. Mount the load lock in the vice and DO NOT tighten it more than necessary to hold the load lock.		5. Mount the load lock in the vice and DO NOT tighten it more than necessary to hold the load lock.
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	6.1 Secure the load lock in its position on the chamber by fastening the clamp.		6.1 Secure the load lock in its position on the chamber by fastening the clamp.

	6.2 Secure the sample holder with the aluminum clamp keeping it in the top position.		6.2 Secure the sample holder with the '''aluminum clamp''' keeping it in the top position.

	7. Close RV.		7. Close RV.
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	12. Open GV slowly and secure it in open position.		12. Open GV slowly and secure it in open position.

	13. Remove the aluminum clamp and let the sample holder slide gently into the chamber.		13. Remove the '''aluminum clamp''' and let the sample holder slide gently into the chamber.

	14. When the pressure of the chamber is ≤ 5.10-7 mbar, evaporation can be initiated.		14. When the pressure of the chamber is ≤ 5.10-7 mbar, evaporation can be initiated.
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	1.3 RV is open.		1.3 RV is open.

	2. Pull up the sample holder and secure it with the aluminum clamp in top position.		2. Pull up the sample holder and secure it with the '''aluminum clamp''' in top position.

	3. Close GV.		3. Close GV.
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	15. Turn down HV and turn off.		15. Turn down HV and turn off.

	16. Wait until material cools before turning the index wheel to the next material. a. For another deposition jump to point 5.		16. Wait until material cools before turning the index wheel to the next material.

			a. For another deposition jump to point 5.

	17. Set key to “Safe” 16. Turn off power supply.		17. Set key to “Safe” 16. Turn off power supply.

	a. Pull up all four breakers from right to left.		a. Pull up all four breakers from right to left.

Nader at 08:07, 7 December 2016

2016-12-07T08:07:20Z

Show changes

Petur at 12:04, 5 December 2016

2016-12-05T12:04:41Z

← Older revision		Revision as of 12:04, 5 December 2016
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	{{Infobox		{{Infobox tool
	\|image = Tool e-gun.jpg		\|image = Tool e-gun.jpg
	\|toolfullname = E-Gun evaporator		\|toolfullname = E-Gun evaporator

Petur: /* Pumping down the chamber */

2016-12-02T13:40:58Z

Pumping down the chamber

← Older revision		Revision as of 13:40, 2 December 2016
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	# Close the vent valve on turbopump		# Close the vent valve on turbopump
	# Open roughing valve (RV)		# Open roughing valve (RV)
	# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".		# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off". When the turbo is at full speed, the display reads 825-833 Hz.
	~~## '''Note:'''~~ When the turbo is at full speed, the display reads 825-833 Hz.
	# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge		# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge

Petur: /* Pumping down the chamber */

2016-12-02T13:40:42Z

Pumping down the chamber

← Older revision		Revision as of 13:40, 2 December 2016
Line 72:		Line 72:
	# Open roughing valve (RV)		# Open roughing valve (RV)
	# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".		# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".
	## When the turbo is at full speed, the display reads 825-833 Hz.		## '''Note:''' When the turbo is at full speed, the display reads 825-833 Hz.
	# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge		# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge

Petur: /* Pumping down the chamber */

2016-12-02T13:40:28Z

Pumping down the chamber

← Older revision		Revision as of 13:40, 2 December 2016
Line 72:		Line 72:
	# Open roughing valve (RV)		# Open roughing valve (RV)
	# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".		# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".
	** When the turbo is at full speed, the display reads 825-833 Hz.		## When the turbo is at full speed, the display reads 825-833 Hz.
	# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge		# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge

Petur: /* Pumping down the chamber */

2016-12-02T13:40:19Z

Pumping down the chamber

← Older revision		Revision as of 13:40, 2 December 2016
Line 72:		Line 72:
	# Open roughing valve (RV)		# Open roughing valve (RV)
	# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".		# When the chamber pressure is below 8×10<sup>-2</sup> torr, turn on turbo pump by pressing "On/off".
	* When the turbo is at full speed, the display reads 825-833 Hz.		** When the turbo is at full speed, the display reads 825-833 Hz.
	# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge		# When the chamber pressure is below 5×10<sup>-4</sup> torr, turn on the ion gauge