Doses - Revision history

Karolis: added links to tools and resists

2022-04-10T18:23:46Z

added links to tools and resists

← Older revision		Revision as of 18:23, 10 April 2022
Line 1:		Line 1:
	{\| class="wikitable"		{\| class="wikitable"
	\|+125 kV		\|+[[Elionix F-125\|125 kV]]
	\|-		\|-
	\|		\|[[Resists\|Resist]]
	\|Si		\|Si
	\|InAs<sup>UC</sup>		\|InAs<sup>UC</sup>
Line 75:		Line 75:

	{\| class="wikitable"		{\| class="wikitable"
	\|+100 kV		\|+[[Elionix 7000\|100 kV]]
	\|-		\|-
	\|		\|[[Resists\|Resist]]
	\|Si		\|Si
	\|InAs<sup>UC</sup>		\|InAs<sup>UC</sup>
Line 189:		Line 189:
	\|+100 kV		\|+100 kV
	\|-		\|-
	\|		\|[[Resists\|Resist]]
	\|Si (μC/cm<sup>2</sup>) '''/''' φ		\|Si (μC/cm<sup>2</sup>) '''/''' φ
	\|InAs (μC/cm<sup>2</sup>) '''/''' φ		\|InAs (μC/cm<sup>2</sup>) '''/''' φ
Line 265:		Line 265:
	\|+125 kV		\|+125 kV
	\|-		\|-
	\|		\|[[Resists\|Resist]]
	\|Si (μC/cm<sup>2</sup>) '''/''' φ		\|Si (μC/cm<sup>2</sup>) '''/''' φ
	\|InAs (μC/cm<sup>2</sup>) '''/''' φ		\|InAs (μC/cm<sup>2</sup>) '''/''' φ

Karolis at 22:47, 7 April 2022

2022-04-07T22:47:26Z

← Older revision		Revision as of 22:47, 7 April 2022
Line 336:		Line 336:
	\|-		\|-
	\|}		\|}

			[[Category:Fabrication]]

Karolis at 12:02, 7 February 2022

2022-02-07T12:02:58Z

← Older revision		Revision as of 12:02, 7 February 2022
Line 25:		Line 25:
	\|A6		\|A6
	\|1200		\|1200
	\|?		\|800
	\|900-920 <ref name="Hertel" />		\|900-920 <ref name="Hertel" />
	\|760		\|760
Line 114:		Line 114:
	\|EL9		\|EL9
	\|?		\|?
	\|?		\|250
	\|380 <ref name="Hertel">[https://nbi.ku.dk/english/theses/phd-theses/hertel/dissertation_Hertel.pdf Hertel PhD thesis]</ref>		\|380 <ref name="Hertel">[https://nbi.ku.dk/english/theses/phd-theses/hertel/dissertation_Hertel.pdf Hertel PhD thesis]</ref>
	\|200 <ref name="Drachmann" />		\|200 <ref name="Drachmann" />

Karolis at 11:51, 7 February 2022

2022-02-07T11:51:16Z

← Older revision		Revision as of 11:51, 7 February 2022
Line 153:		Line 153:
	* InAs: Uniform clearing		* InAs: Uniform clearing
	* Si: Optimal contrast		* Si: Optimal contrast

			== References ==
			<references />


	== Note ==		== Note ==

Karolis: updated dose table with values from PhD theses

2022-02-02T13:37:13Z

updated dose table with values from PhD theses

← Older revision		Revision as of 13:37, 2 February 2022
Line 17:		Line 17:
	\|-		\|-
	\|A4		\|A4
	\|~~1000~~		\|1200-1300 <ref name="Kringhoej" />
	\|700		\|700
	\|?		\|900 <ref name="Hertel" />
	\|630		\|630
	\|?		\|?
Line 26:		Line 26:
	\|1200		\|1200
	\|?		\|?
	\|?		\|900-920 <ref name="Hertel" />
	\|760		\|760
	\|?		\|?
	\|-		\|-
	\|~~El6~~		\|EL6
	\|?		\|?
	\|?		\|?
Line 37:		Line 37:
	\|?		\|?
	\|-		\|-
	\|~~El9~~		\|EL9
	\|?		\|450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_PhD.pdf Kringhøj PhD thesis]</ref>
	\|?
	\|?		\|?
			\|280 <ref name="Hertel" />
	\|420		\|420
	\|?		\|?
Line 52:		Line 52:
	\|-		\|-
	\|CSAR9		\|CSAR9
	\|?		\|500 <ref name="Kringhoej" />
	\|?		\|?
	\|?		\|?
Line 59:		Line 59:
	\|-		\|-
	\|CSAR13		\|CSAR13
	\|~~450~~		\|430 <ref name="Kringhoej" />
	\|?		\|?
	\|?		\|?
Line 68:		Line 68:
	\|?		\|?
	\|?		\|?
	\|?		\|500 <ref name="Hertel" />
	\|745		\|745
	\|?		\|?
Line 87:		Line 87:
	\|900		\|900
	\|?		\|?
	\|~~300~~		\|620 <ref name="Drachmann" />
	\|?
	\|?		\|?
			\|1500-1600 <ref name="Ansaloni" />
	\|-		\|-
	\|A4		\|A4
	\|900		\|900
	\|?		\|640-680 <ref name="Whiticar">[https://nbi.ku.dk/english/theses/phd-theses/alexander-m-whiticar/Whiticar_thesis.pdf Whiticar PhD thesis]</ref>
	\|~~500~~		\|608-640 <ref name="Drachmann">[https://nbi.ku.dk/english/theses/phd-theses/asbjorn-cliff-drachmann/Drachmann_PhD_Thesis.pdf/Drachmann_PhD_Thesis.pdf Drachmann PhD thesis]</ref>
	\|630		\|630
	\|?		\|900 <ref name="Ansaloni">[https://nbi.ku.dk/english/theses/phd-theses/fabio-ansaloni/thesis_Ansaloni.pdf Ansaloni PhD thesis]</ref>
	\|-		\|-
	\|A6		\|A6
Line 105:		Line 105:
	\|?		\|?
	\|-		\|-
	\|~~El6~~		\|EL6
	\|?		\|?
	\|?		\|?
Line 112:		Line 112:
	\|?		\|?
	\|-		\|-
	\|~~El9~~		\|EL9
	\|?
	\|?
	\|?		\|?
	\|?		\|?
			\|380 <ref name="Hertel">[https://nbi.ku.dk/english/theses/phd-theses/hertel/dissertation_Hertel.pdf Hertel PhD thesis]</ref>
			\|200 <ref name="Drachmann" />
	\|?		\|?
	\|-		\|-
Line 124:		Line 124:
	\|?		\|?
	\|?		\|?
	\|?		\|335 <ref name="Ansaloni" />
	\|-		\|-
	\|CSAR9		\|CSAR9
Line 131:		Line 131:
	\|?		\|?
	\|?		\|?
	\|?		\|335 <ref name="Ansaloni" />
	\|-		\|-
	\|CSAR13		\|CSAR13

Shiv: /* Experimental */

2018-08-07T20:32:43Z

Experimental

@@ Line 168: / Line 168: @@
 ** Fit experimental isofocal dose factors and predicted dose factor by varying psi
 kV:
@@ Line 178: / Line 181: @@
 GaAs:752 uC/cm2 and phi = 39%

Shiv: /* Experimental */

2018-08-04T12:38:25Z

Experimental

← Older revision		Revision as of 12:38, 4 August 2018
Line 171:		Line 171:
	125 kV:		125 kV:

	InP: ~~607~~ uC/cm2 and phi = 35%		InP: 572 uC/cm2 and phi = 41%

	InAs: 589 uC/cm2 and phi = 33%		InAs: 589 uC/cm2 and phi = 33%
Line 200:		Line 200:
	\|906/ 45%		\|906/ 45%
	\|589/ 33%		\|589/ 33%
	\|~~607~~/ 35%		\|572/ 41%
	\|752/ 39%		\|752/ 39%
	\|?		\|?

Shiv: /* Experimental */

2018-08-01T15:55:55Z

Experimental

← Older revision		Revision as of 15:55, 1 August 2018
Line 173:		Line 173:
	InP: 607 uC/cm2 and phi = 35%		InP: 607 uC/cm2 and phi = 35%

	InAs: 589 uC/cm2 and phi = 41%		InAs: 589 uC/cm2 and phi = 33%

	Si: 906 uC/cm2 and phi = 45%		Si: 906 uC/cm2 and phi = 45%
Line 199:		Line 199:
	\|A4		\|A4
	\|906/ 45%		\|906/ 45%
	\|589/ 41%		\|589/ 33%
	\|607/ 35%		\|607/ 35%
	\|752/ 39%		\|752/ 39%

Shiv: /* Experimental */

2018-07-31T22:49:12Z

Experimental

← Older revision		Revision as of 22:49, 31 July 2018
Line 173:		Line 173:
	InP: 607 uC/cm2 and phi = 35%		InP: 607 uC/cm2 and phi = 35%

	InAs: ~~568~~ uC/cm2 and phi = 41%		InAs: 589 uC/cm2 and phi = 41%

	Si: 906 uC/cm2 and phi = 45%		Si: 906 uC/cm2 and phi = 45%
Line 199:		Line 199:
	\|A4		\|A4
	\|906/ 45%		\|906/ 45%
	\|~~568~~/ 41%		\|589/ 41%
	\|607/ 35%		\|607/ 35%
	\|752/ 39%		\|752/ 39%

Shiv: /* Experimental */

2018-07-31T22:08:35Z

Experimental

← Older revision		Revision as of 22:08, 31 July 2018
Line 173:		Line 173:
	InP: 607 uC/cm2 and phi = 35%		InP: 607 uC/cm2 and phi = 35%

	InAs: ~~473~~ uC/cm2 and phi = 41%		InAs: 568 uC/cm2 and phi = 41%

	Si: 906 uC/cm2 and phi = 45%		Si: 906 uC/cm2 and phi = 45%
Line 199:		Line 199:
	\|A4		\|A4
	\|906/ 45%		\|906/ 45%
	\|~~473~~/ 41%		\|568/ 41%
	\|607/ 35%		\|607/ 35%
	\|752/ 39%		\|752/ 39%