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	<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?action=history&amp;feed=atom&amp;title=Chemical_glossary</id>
	<title>Chemical glossary - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?action=history&amp;feed=atom&amp;title=Chemical_glossary"/>
	<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;action=history"/>
	<updated>2026-06-09T21:34:42Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
	<generator>MediaWiki 1.43.8</generator>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=2141&amp;oldid=prev</id>
		<title>Karolis at 19:41, 10 April 2022</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=2141&amp;oldid=prev"/>
		<updated>2022-04-10T19:41:24Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
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				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 19:41, 10 April 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l1&quot;&gt;Line 1:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &#039;&#039;&#039;MIBK&#039;&#039;&#039;: Methyl isobutyl ketone, e.g. used as a PMMA developer.&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &#039;&#039;&#039;MIBK&#039;&#039;&#039;: Methyl isobutyl ketone, e.g. used as a &lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[[Resists|&lt;/ins&gt;PMMA&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;]] &lt;/ins&gt;developer.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MEK&amp;#039;&amp;#039;&amp;#039;: Methyl ethyl ketone, 2-Butanone&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MEK&amp;#039;&amp;#039;&amp;#039;: Methyl ethyl ketone, 2-Butanone&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MQ&amp;#039;&amp;#039;&amp;#039;: Shorthand for Milli-Q, which is ultrapure water, also referred to as Millipore/MP.&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MQ&amp;#039;&amp;#039;&amp;#039;: Shorthand for Milli-Q, which is ultrapure water, also referred to as Millipore/MP.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Karolis</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=2076&amp;oldid=prev</id>
		<title>Karolis at 22:45, 7 April 2022</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=2076&amp;oldid=prev"/>
		<updated>2022-04-07T22:45:40Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
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				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 22:45, 7 April 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l4&quot;&gt;Line 4:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 4:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;EL&amp;#039;&amp;#039;&amp;#039;: Ethyl lactate&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;EL&amp;#039;&amp;#039;&amp;#039;: Ethyl lactate&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;TMAH&amp;#039;&amp;#039;&amp;#039;: Tetramethylammonium hydroxide&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;TMAH&amp;#039;&amp;#039;&amp;#039;: Tetramethylammonium hydroxide&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;[[Category:Fabrication]]&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Karolis</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=793&amp;oldid=prev</id>
		<title>Petur at 12:45, 22 August 2016</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=793&amp;oldid=prev"/>
		<updated>2016-08-22T12:45:08Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
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				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 12:45, 22 August 2016&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l1&quot;&gt;Line 1:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MIBK&amp;#039;&amp;#039;&amp;#039;: Methyl isobutyl ketone, e.g. used as a PMMA developer.&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MIBK&amp;#039;&amp;#039;&amp;#039;: Methyl isobutyl ketone, e.g. used as a PMMA developer.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MEK&amp;#039;&amp;#039;&amp;#039;: Methyl ethyl ketone, 2-Butanone&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MEK&amp;#039;&amp;#039;&amp;#039;: Methyl ethyl ketone, 2-Butanone&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;* &#039;&#039;&#039;MQ&#039;&#039;&#039;: Shorthand for Milli-Q, which is ultrapure water, also referred to as Millipore/MP.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;EL&amp;#039;&amp;#039;&amp;#039;: Ethyl lactate&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;EL&amp;#039;&amp;#039;&amp;#039;: Ethyl lactate&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;TMAH&amp;#039;&amp;#039;&amp;#039;: Tetramethylammonium hydroxide&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;TMAH&amp;#039;&amp;#039;&amp;#039;: Tetramethylammonium hydroxide&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Petur</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=790&amp;oldid=prev</id>
		<title>Petur: Created page with &quot;* &#039;&#039;&#039;MIBK&#039;&#039;&#039;: Methyl isobutyl ketone, e.g. used as a PMMA developer. * &#039;&#039;&#039;MEK&#039;&#039;&#039;: Methyl ethyl ketone, 2-Butanone * &#039;&#039;&#039;EL&#039;&#039;&#039;: Ethyl lactate * &#039;&#039;&#039;TMAH&#039;&#039;&#039;: Tetramethylammonium h...&quot;</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Chemical_glossary&amp;diff=790&amp;oldid=prev"/>
		<updated>2016-08-22T12:32:25Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;* &amp;#039;&amp;#039;&amp;#039;MIBK&amp;#039;&amp;#039;&amp;#039;: Methyl isobutyl ketone, e.g. used as a PMMA developer. * &amp;#039;&amp;#039;&amp;#039;MEK&amp;#039;&amp;#039;&amp;#039;: Methyl ethyl ketone, 2-Butanone * &amp;#039;&amp;#039;&amp;#039;EL&amp;#039;&amp;#039;&amp;#039;: Ethyl lactate * &amp;#039;&amp;#039;&amp;#039;TMAH&amp;#039;&amp;#039;&amp;#039;: Tetramethylammonium h...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;* &amp;#039;&amp;#039;&amp;#039;MIBK&amp;#039;&amp;#039;&amp;#039;: Methyl isobutyl ketone, e.g. used as a PMMA developer.&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;MEK&amp;#039;&amp;#039;&amp;#039;: Methyl ethyl ketone, 2-Butanone&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;EL&amp;#039;&amp;#039;&amp;#039;: Ethyl lactate&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;TMAH&amp;#039;&amp;#039;&amp;#039;: Tetramethylammonium hydroxide&lt;/div&gt;</summary>
		<author><name>Petur</name></author>
	</entry>
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