Cambridge ALD - Revision history

Harry at 15:08, 11 November 2025

2025-11-11T15:08:48Z

← Older revision		Revision as of 15:08, 11 November 2025
Line 9:		Line 9:
	\|secondary = Martin		\|secondary = Martin
	}}		}}
			''Page last updated: 11 Nov 2025''
	Two nearly identical Savannah S100-like systems are used for atomic layer deposition of '''aluminum''', '''hafnium''', ~~and~~ '''titanium''' '''oxide'''.		Two nearly identical Savannah S100-like systems are used for atomic layer deposition of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium''', and '''oxide'''.

	Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:		Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:

Harry: /* Available processes */

2025-11-11T15:06:43Z

Available processes

← Older revision		Revision as of 15:06, 11 November 2025
Line 47:		Line 47:
	\|-		\|-
	\| Zirconium oxide (ZrOx, ZrO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TDMAZ <div class="mw-collapsible-content">Tetrakis(dimethylamido)zirconium(IV) <br/>		\| Zirconium oxide (ZrOx, ZrO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TDMAZ <div class="mw-collapsible-content">Tetrakis(dimethylamido)zirconium(IV) <br/>
	[(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Zr<br/> [[File:~~H32N4Zr~~.png\|290px]]</div></div>		[(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Zr<br/> [[File:CH32N4Zr.png\|290px]]</div></div>
	\|style="background-color: #e0b4c6" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://www.osti.gov/servlets/purl/1763732]		\|style="background-color: #e0b4c6" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://www.osti.gov/servlets/purl/1763732]
	\|}		\|}

Harry: /* Available processes */

2025-11-11T14:07:44Z

Available processes

← Older revision		Revision as of 14:07, 11 November 2025
Line 47:		Line 47:
	\|-		\|-
	\| Zirconium oxide (ZrOx, ZrO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TDMAZ <div class="mw-collapsible-content">Tetrakis(dimethylamido)zirconium(IV) <br/>		\| Zirconium oxide (ZrOx, ZrO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TDMAZ <div class="mw-collapsible-content">Tetrakis(dimethylamido)zirconium(IV) <br/>
	[(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Zr<br/> [[File:~~TTIP~~.png\|290px]]</div></div>		[(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Zr<br/> [[File:H32N4Zr.png\|290px]]</div></div>
	\|style="background-color: #e0b4c6" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://www.osti.gov/servlets/purl/1763732]		\|style="background-color: #e0b4c6" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://www.osti.gov/servlets/purl/1763732]
	\|}		\|}

Harry: /* Available processes */

2025-11-11T14:04:48Z

Available processes

← Older revision		Revision as of 14:04, 11 November 2025
Line 44:		Line 44:
	\| Titanium oxide (TiOx, TiO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TTIP <div class="mw-collapsible-content">Titanium(IV) isopropoxide <br/>		\| Titanium oxide (TiOx, TiO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TTIP <div class="mw-collapsible-content">Titanium(IV) isopropoxide <br/>
	Ti[OCH(CH<sub>3</sub>)<sub>2</sub>]<sub>4</sub><br/> [[File:TTIP.png\|290px]]</div></div>		Ti[OCH(CH<sub>3</sub>)<sub>2</sub>]<sub>4</sub><br/> [[File:TTIP.png\|290px]]</div></div>
	\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #e0b4c6" \| No \|\| [https://~~doi~~.org/10.~~1134~~/1.~~1626763~~]		\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #e0b4c6" \| No \|\| [https://pubs.acs.org/doi/full/10.1021/acs.jpcc.5b10529]
			\|-
			\| Zirconium oxide (ZrOx, ZrO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TDMAZ <div class="mw-collapsible-content">Tetrakis(dimethylamido)zirconium(IV) <br/>
			[(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Zr<br/> [[File:TTIP.png\|290px]]</div></div>
			\|style="background-color: #e0b4c6" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://www.osti.gov/servlets/purl/1763732]
	\|}		\|}

Harry: /* Available processes */

2025-11-11T13:41:18Z

Available processes

← Older revision		Revision as of 13:41, 11 November 2025
Line 34:		Line 34:
	! Deposited material !! Precursor !! ALD1 !! ALD2 !! Ref.		! Deposited material !! Precursor !! ALD1 !! ALD2 !! Ref.
	\|-		\|-
	\| Hafnium oxide (HfOx, HfO<sub>2</sub>)\|\| <div class="toccolours mw-collapsible mw-collapsed width:400px" style="width:300px"> TDMAH <div class="mw-collapsible-content">tetrakis(dimethylamino)hafnium <br/> [(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Hf <br/> [[File:TDMAH.png\|246px]]</div></div> \|\| style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #~~e0b4c6~~" \| No \|\| [https://doi.org/10.1016/j.tsf.2005.05.050]		\| Hafnium oxide (HfOx, HfO<sub>2</sub>)
			\| <div class="toccolours mw-collapsible mw-collapsed width:400px" style="width:300px"> TDMAH <div class="mw-collapsible-content">tetrakis(dimethylamino)hafnium <br/> [(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Hf <br/> [[File:TDMAH.png\|246px]]</div></div>
			\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://doi.org/10.1016/j.tsf.2005.05.050]
	\|-		\|-
	\| Aluminum oxide (AlOx, Al<sub>2</sub>O<sub>3</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TMA <div class="mw-collapsible-content">trimethylaluminum <br/> (CH<sub>3</sub>)<sub>3</sub>Al <br/> [[File:TMA.png\|290px]]</div></div> \|\| style="background-color: #~~e0b4c6~~" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://doi.org/10.1134/1.1626763]		\| Aluminum oxide (AlOx, Al<sub>2</sub>O<sub>3</sub>)
			\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TMA <div class="mw-collapsible-content">trimethylaluminum <br/> (CH<sub>3</sub>)<sub>3</sub>Al <br/> [[File:TMA.png\|290px]]</div></div>
			\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://doi.org/10.1134/1.1626763]
	\|-		\|-
	\| Titanium oxide (TiOx, ~~HfO~~<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TTIP <div class="mw-collapsible-content">Titanium(IV) isopropoxide <br/> (CH<sub>3</sub>)<sub>3</sub>Al <br/> [[File:TTIP.png\|290px]]</div></div> \|\| style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #e0b4c6" \| No \|\| [https://doi.org/10.1134/1.1626763]		\| Titanium oxide (TiOx, TiO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TTIP <div class="mw-collapsible-content">Titanium(IV) isopropoxide <br/>
			Ti[OCH(CH<sub>3</sub>)<sub>2</sub>]<sub>4</sub><br/> [[File:TTIP.png\|290px]]</div></div>
			\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #e0b4c6" \| No \|\| [https://doi.org/10.1134/1.1626763]
	\|}		\|}

Harry: /* Whitness samples */

2025-05-20T11:39:39Z

Whitness samples

← Older revision		Revision as of 11:39, 20 May 2025
Line 88:		Line 88:
	* Verify that the flow is set at 5 sccm.		* Verify that the flow is set at 5 sccm.

	== ~~Whitness~~ samples ==		== Witness samples ==

			In CR1 and CR2, you can find various witness samples depending on the properties that you would like to explore:
			* Only thickness: Si (001) of dimension > 7x7 mm2
			* Thickness and breakdown voltage: Si (001) 15x15 mm2 back-side Au plated

			It is recommended to ash the witness chips for 2 mins before loading them in the ALD tool.

	== File logs ==		== File logs ==

Harry at 11:33, 20 May 2025

2025-05-20T11:33:50Z

← Older revision		Revision as of 11:33, 20 May 2025
Line 87:		Line 87:
	* Run recipe ''Default_heater_set''.		* Run recipe ''Default_heater_set''.
	* Verify that the flow is set at 5 sccm.		* Verify that the flow is set at 5 sccm.

			== Whitness samples ==

	== File logs ==		== File logs ==

Harry: /* Technical notes */

2025-05-20T11:31:52Z

Technical notes

← Older revision		Revision as of 11:31, 20 May 2025
Line 88:		Line 88:
	* Verify that the flow is set at 5 sccm.		* Verify that the flow is set at 5 sccm.

	== ~~Technical notes~~ ==		== File logs ==

	* Recipe file location		* Recipe file location

Harry: /* Standard operating procedure */

2025-05-20T11:21:33Z

Standard operating procedure

← Older revision		Revision as of 11:21, 20 May 2025
Line 56:		Line 56:

	== Standard operating procedure ==		== Standard operating procedure ==
	* Log ~~the base pressure on~~ the Excel notebook.		* Log your process in the Excel notebook.
	* ~~Open~~ valve on top of the ~~nitrogen~~ bottle.		* Check the nitrogen bottle:
	* ~~Check the nitrogen bottle pressure~~:		** Verify that the main valve on top of the bottle is open.
	** ~~Main~~ bottle pressure ~~should be~~ at least 5 bar		*: ''The N2 flow in idle state is '''5 sccm'''.''
	** ~~Line~~ pressure >1 bar (ALD1) 1-2 bar (ALD2).		** Verify that the main bottle pressure is at least 5 bar.
	*: ''If line pressure is outside of range, ~~carefully adjust the regulator valve with~~ the ~~flow set to 20 sccm~~.''		** The line pressure should be >1 bar (ALD1) 1-2 bar (ALD2).
			*: ''If line pressure is outside the range, please report it to the cleanroom staff.''
	* Make sure the valves of '''all''' precursors inside the ALD machine are closed.		* Make sure the valves of '''all''' precursors inside the ALD machine are closed.
	* Run recipe ''Default_cleaning'' to pump out any residual gas in the gas lines.		* Run recipe ''Default_cleaning'' to pump out any residual gas in the gas lines.
	*: With flow set to 0 the actual flow can be between 0-1 sccm.
	* Press the '''VENT''' or '''VENT REACTOR''' button.		* Press the '''VENT''' or '''VENT REACTOR''' button.
	* Open the metal lid.		* Open the metal lid.
Line 85:		Line 85:
	* Take out your sample. Check the rubber o-ring.		* Take out your sample. Check the rubber o-ring.
	* Press the big round '''PUMP''' or '''PUMP REACTOR''' button.		* Press the big round '''PUMP''' or '''PUMP REACTOR''' button.
	* Close the nitrogen bottle valve on top of the bottle.
	* Run recipe ''Default_heater_set''.		* Run recipe ''Default_heater_set''.
			* Verify that the flow is set at 5 sccm.

	== Technical notes ==		== Technical notes ==

Harry: /* Standard operating procedure */

2025-05-20T11:10:02Z

Standard operating procedure

← Older revision		Revision as of 11:10, 20 May 2025
Line 41:		Line 41:
	\|}		\|}

	== ~~Standard~~ operating ~~procedure~~ ==		== Videos on operating the tools ==
	Video on how to operate ALD 1:		Video on how to operate ALD 1:

Line 54:		Line 54:
	* [https://www.youtube.com/watch?v=GmNEbyMNC4A Click here to watch the video on YouTube]		* [https://www.youtube.com/watch?v=GmNEbyMNC4A Click here to watch the video on YouTube]


			== Standard operating procedure ==
	* Log the base pressure on the Excel notebook.		* Log the base pressure on the Excel notebook.
	* Open valve on top of the nitrogen bottle.		* Open valve on top of the nitrogen bottle.

← Older revision		Revision as of 14:04, 11 November 2025
Line 44:		Line 44:
	\| Titanium oxide (TiOx, TiO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TTIP <div class="mw-collapsible-content">Titanium(IV) isopropoxide <br/>		\| Titanium oxide (TiOx, TiO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TTIP <div class="mw-collapsible-content">Titanium(IV) isopropoxide <br/>
	Ti[OCH(CH<sub>3</sub>)<sub>2</sub>]<sub>4</sub><br/> [[File:TTIP.png\|290px]]</div></div>		Ti[OCH(CH<sub>3</sub>)<sub>2</sub>]<sub>4</sub><br/> [[File:TTIP.png\|290px]]</div></div>
	\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #e0b4c6" \| No \|\| [https://~~doi~~.org/10.~~1134~~/1.~~1626763~~]		\|style="background-color: #c6e0b4" \| Yes \|\| style="background-color: #e0b4c6" \| No \|\| [https://pubs.acs.org/doi/full/10.1021/acs.jpcc.5b10529]
			\|-
			\| Zirconium oxide (ZrOx, ZrO<sub>2</sub>) \|\| <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TDMAZ <div class="mw-collapsible-content">Tetrakis(dimethylamido)zirconium(IV) <br/>
			[(CH<sub>3</sub>)<sub>2</sub>N]<sub>4</sub>Zr<br/> [[File:TTIP.png\|290px]]</div></div>
			\|style="background-color: #e0b4c6" \| No \|\| style="background-color: #c6e0b4" \| Yes \|\| [https://www.osti.gov/servlets/purl/1763732]
	\|}		\|}