Cambridge ALD - Revision history

Harry at 15:16, 13 August 2026

2026-08-13T15:16:53Z

← Older revision		Revision as of 15:16, 13 August 2026
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	}}		}}

	''Page last updated: ~~15 Jun~~ 2026''		''Page last updated: 13 Aug 2026''

	Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium'''.		Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium'''.

2026-08-13T15:15:29Z

← Older revision		Revision as of 15:15, 13 August 2026
Line 12:		Line 12:
	''Page last updated: 15 Jun 2026''		''Page last updated: 15 Jun 2026''

	Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium'''.		Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium'''.

			In the [[knowledge database for ALD]] you can find more information about the recipes.

	Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:		Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:
	* [[AJA systems]] for sputtering/e-gun evaporation		* [[AJA systems]] for sputtering/e-gun evaporation
	* [[E-Gun evaporator]]		* [[E-Gun evaporator]]
	* [[Edwards evaporator\|Edwards thermal evaporator]]
	* [[Leica sputter coater]]		* [[Leica sputter coater]]
	* [[MBE\|Molecular beam epitaxy system]]		* [[MBE\|Molecular beam epitaxy system]]

2026-07-08T11:43:17Z

← Older revision		Revision as of 11:43, 8 July 2026
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	''Page last updated: 15 Jun 2026''		''Page last updated: 15 Jun 2026''

	Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium~~''', and '''oxide~~'''.		Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium'''.

	Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:		Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:

2026-06-16T10:17:23Z

Vacuum status

@@ Line 159: / Line 159: @@
 ==Vacuum status==
 ===ALD2===
 {| class="wikitable"
 |-
@@ Line 173: / Line 189: @@
 |-
 |}
 == Witness samples ==

2026-06-16T10:11:31Z

ALD1

2026-06-16T10:08:35Z

Recommended heater temperatures

@@ Line 157: / Line 157: @@
 |-
 |}
 == Witness samples ==

2026-06-16T10:04:00Z

ALD2

← Older revision		Revision as of 10:04, 16 June 2026
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	# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''		# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''
	# Make sure the valves of '''all''' precursors inside the ALD tool are closed.		# Make sure the valves of '''all''' precursors inside the ALD tool are closed.
	# Run recipe '''~~chamber prep~~.txt''' to pump out any residual gas in the gas lines.		# Run recipe '''0_default_setup.txt''' to pump out any residual gas in the gas lines.
	# Press the '''VENT REACTOR''' button.		# Press the '''VENT REACTOR''' button.
	# Open the metal lid.		# Open the metal lid.
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	# Press the '''STOP VENTING''' button.		# Press the '''STOP VENTING''' button.
	# Press the '''PUMP REACTOR''' button.		# Press the '''PUMP REACTOR''' button.
	# Run recipe '''~~chamber_finalise~~.txt'''.		# Run recipe '''0_default_setup.txt'''.
	# Leave the system in the appropriate state.		# Leave the system in the appropriate state.
	</div>		</div>

2026-06-16T10:03:28Z

ALD1

← Older revision		Revision as of 10:03, 16 June 2026
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	# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''		# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''
	# Make sure the valves of '''all''' precursors inside the ALD tool are closed.		# Make sure the valves of '''all''' precursors inside the ALD tool are closed.
	# Run recipe '''~~chamber prep~~''' to pump out any residual gas in the gas lines.		# Run recipe '''0_default_setup''' to pump out any residual gas in the gas lines.
	# Press the round '''VENT''' button.		# Press the round '''VENT''' button.
	# Open the metal lid.		# Open the metal lid.
Line 82:		Line 82:
	# Take out your sample. Check the rubber o-ring.		# Take out your sample. Check the rubber o-ring.
	# Press the round '''PUMP''' button.		# Press the round '''PUMP''' button.
	# Run recipe '''~~chamber_finalise~~'''.		# Run recipe '''0_default_setup'''.
	# Leave the system in the appropriate state.		# Leave the system in the appropriate state.
	</div>		</div>

2026-06-16T09:54:06Z

Recommended heater temperatures

← Older revision		Revision as of 09:54, 16 June 2026
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	\| '''Precursor Manifold (#10)''' \|\| 150°C		\| '''Precursor Manifold (#10)''' \|\| 150°C
	\|-		\|-
	\| '''~~TMAHF~~ and ~~TMAZ~~ precursor heaters (#12 and #13)''' \|\| 75°C		\| '''TDMAH and TDMAZ precursor heaters (#12 and #13)''' \|\| 75°C
	\|-		\|-
	\| '''Reactor heaters (#8 and #9) standard''' \|\| 110°C		\| '''Reactor heaters (#8 and #9) standard''' \|\| 110°C

2026-06-16T09:30:06Z

Recommended heater temperatures

@@ Line 124: / Line 124: @@
 ==Recommended heater temperatures==
 These are the recommended temperatures from the [https://wiki.nbi.ku.dk/w/cleanroom/images/3/3e/Savannah_User_Manual.pdf manual]:
 {| class="wikitable"
 |-
@@ Line 133: / Line 134: @@
 |-
 | '''Precursor Manifold''' || 150°C
 |-
 | '''Reactor heaters (#8 and #9) standard''' || 110°C