Cambridge ALD - Revision history

Harry at 11:43, 8 July 2026

2026-07-08T11:43:17Z

← Older revision		Revision as of 11:43, 8 July 2026
Line 12:		Line 12:
	''Page last updated: 15 Jun 2026''		''Page last updated: 15 Jun 2026''

	Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium~~''', and '''oxide~~'''.		Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium'''.

	Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:		Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:

2026-06-16T10:17:23Z

Vacuum status

@@ Line 159: / Line 159: @@
 ==Vacuum status==
 ===ALD2===
 {| class="wikitable"
 |-
@@ Line 173: / Line 189: @@
 |-
 |}
 == Witness samples ==

2026-06-16T10:11:31Z

ALD1

2026-06-16T10:08:35Z

Recommended heater temperatures

@@ Line 157: / Line 157: @@
 |-
 |}
 == Witness samples ==

2026-06-16T10:04:00Z

ALD2

← Older revision		Revision as of 10:04, 16 June 2026
Line 92:		Line 92:
	# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''		# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''
	# Make sure the valves of '''all''' precursors inside the ALD tool are closed.		# Make sure the valves of '''all''' precursors inside the ALD tool are closed.
	# Run recipe '''~~chamber prep~~.txt''' to pump out any residual gas in the gas lines.		# Run recipe '''0_default_setup.txt''' to pump out any residual gas in the gas lines.
	# Press the '''VENT REACTOR''' button.		# Press the '''VENT REACTOR''' button.
	# Open the metal lid.		# Open the metal lid.
Line 111:		Line 111:
	# Press the '''STOP VENTING''' button.		# Press the '''STOP VENTING''' button.
	# Press the '''PUMP REACTOR''' button.		# Press the '''PUMP REACTOR''' button.
	# Run recipe '''~~chamber_finalise~~.txt'''.		# Run recipe '''0_default_setup.txt'''.
	# Leave the system in the appropriate state.		# Leave the system in the appropriate state.
	</div>		</div>

2026-06-16T10:03:28Z

ALD1

← Older revision		Revision as of 10:03, 16 June 2026
Line 65:		Line 65:
	# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''		# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''
	# Make sure the valves of '''all''' precursors inside the ALD tool are closed.		# Make sure the valves of '''all''' precursors inside the ALD tool are closed.
	# Run recipe '''~~chamber prep~~''' to pump out any residual gas in the gas lines.		# Run recipe '''0_default_setup''' to pump out any residual gas in the gas lines.
	# Press the round '''VENT''' button.		# Press the round '''VENT''' button.
	# Open the metal lid.		# Open the metal lid.
Line 82:		Line 82:
	# Take out your sample. Check the rubber o-ring.		# Take out your sample. Check the rubber o-ring.
	# Press the round '''PUMP''' button.		# Press the round '''PUMP''' button.
	# Run recipe '''~~chamber_finalise~~'''.		# Run recipe '''0_default_setup'''.
	# Leave the system in the appropriate state.		# Leave the system in the appropriate state.
	</div>		</div>

2026-06-16T09:54:06Z

Recommended heater temperatures

← Older revision		Revision as of 09:54, 16 June 2026
Line 150:		Line 150:
	\| '''Precursor Manifold (#10)''' \|\| 150°C		\| '''Precursor Manifold (#10)''' \|\| 150°C
	\|-		\|-
	\| '''~~TMAHF~~ and ~~TMAZ~~ precursor heaters (#12 and #13)''' \|\| 75°C		\| '''TDMAH and TDMAZ precursor heaters (#12 and #13)''' \|\| 75°C
	\|-		\|-
	\| '''Reactor heaters (#8 and #9) standard''' \|\| 110°C		\| '''Reactor heaters (#8 and #9) standard''' \|\| 110°C

2026-06-16T09:30:06Z

Recommended heater temperatures

@@ Line 124: / Line 124: @@
 ==Recommended heater temperatures==
 These are the recommended temperatures from the [https://wiki.nbi.ku.dk/w/cleanroom/images/3/3e/Savannah_User_Manual.pdf manual]:
 {| class="wikitable"
 |-
@@ Line 133: / Line 134: @@
 |-
 | '''Precursor Manifold''' || 150°C
 |-
 | '''Reactor heaters (#8 and #9) standard''' || 110°C

2026-06-15T15:07:04Z

← Older revision		Revision as of 15:07, 15 June 2026
Line 168:		Line 168:
	: It is recommended to plot only several pulses, for example 30 seconds or 1 minute total plot time. Setting this value to 1 hour during a run can reduce delay precision, because with a 1 hour plot time many data points need to be refreshed, which consumes a lot of processing resources. It is possible to set the plot time to 1 hour to get an overview of pulse heights, but plot times > 5 minutes are not recommended during a run. <ref>Savannah Maintenance Manual</ref>		: It is recommended to plot only several pulses, for example 30 seconds or 1 minute total plot time. Setting this value to 1 hour during a run can reduce delay precision, because with a 1 hour plot time many data points need to be refreshed, which consumes a lot of processing resources. It is possible to set the plot time to 1 hour to get an overview of pulse heights, but plot times > 5 minutes are not recommended during a run. <ref>Savannah Maintenance Manual</ref>

	~~== Remote access ==~~
	* TeamViewer: ALD1, ALD2
	* LogMeIn: ALD1 (CR1), ALD2 (CR2)
	[[Category:Tools]]		[[Category:Tools]]
	[[Category:Deposition]]		[[Category:Deposition]]

2026-06-15T15:06:32Z

Troubleshooting

← Older revision		Revision as of 15:06, 15 June 2026
Line 167:		Line 167:
	; What is the best plot time to graph the process pressure?		; What is the best plot time to graph the process pressure?
	: It is recommended to plot only several pulses, for example 30 seconds or 1 minute total plot time. Setting this value to 1 hour during a run can reduce delay precision, because with a 1 hour plot time many data points need to be refreshed, which consumes a lot of processing resources. It is possible to set the plot time to 1 hour to get an overview of pulse heights, but plot times > 5 minutes are not recommended during a run. <ref>Savannah Maintenance Manual</ref>		: It is recommended to plot only several pulses, for example 30 seconds or 1 minute total plot time. Setting this value to 1 hour during a run can reduce delay precision, because with a 1 hour plot time many data points need to be refreshed, which consumes a lot of processing resources. It is possible to set the plot time to 1 hour to get an overview of pulse heights, but plot times > 5 minutes are not recommended during a run. <ref>Savannah Maintenance Manual</ref>
	~~; What are the recommended heater temperatures?~~
	~~: These are the recommended temperatures from the manual:~~
	~~:* Heaters for the trap (#6):150°C~~
	~~:* Stop valve (#7): 150°C~~
	~~:* ALD valve oven (#10): 150°C~~
	~~:* Precursor Manifold: 150°C~~
	~~:* Reactor heaters (#8 and #9): 100-200°C~~
	~~:**ALD1 (#8 and #9): 110°C~~

	== Remote access ==		== Remote access ==