AccuThermo RTA - Revision history

Zhe at 20:12, 7 November 2025

2025-11-07T20:12:27Z

← Older revision		Revision as of 20:12, 7 November 2025
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	\|location = 03.2.213		\|location = 03.2.213
	\|primary = Nader		\|primary = Nader
	\|secondary = ~~Shiv~~		\|secondary = Harry
	}}		}}

Nader: /* Startup Procedure */

2019-10-18T11:37:31Z

Startup Procedure

← Older revision		Revision as of 11:37, 18 October 2019
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	:#Choose and load your recipe.		:#Choose and load your recipe.
	:#Run the proces.		:#Run the proces.
	:#Check that the water flow is between '''500-700''' lph during your run( ~~Below~~ Scriber ).		:#Check that the water flow is between '''500-700''' lph during your run( Flowmeter is below Scriber ).

	=== Power Down Procedure ===		=== Power Down Procedure ===

Nader: /* Power Down Procedure */

2019-10-18T11:36:09Z

Power Down Procedure

← Older revision		Revision as of 11:36, 18 October 2019
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	:#'''Close''' the Air cooling valves.		:#'''Close''' the Air cooling valves.
	:# On the computer press ESC until the main menu appears.		:# On the computer press ESC until the main menu appears.
	:#'''Leave''' AC power at '''ON''' ~~positio~~ at the wall		:#'''Leave''' AC power at '''ON''' position at the wall

	For recipe creation and sample handling refer to the wiki.		For recipe creation and sample handling refer to the wiki.

Nader: /* Power Down Procedure */

2019-10-18T10:01:14Z

Power Down Procedure

← Older revision		Revision as of 10:01, 18 October 2019
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	:#'''Leave''' AC power at '''ON''' positio at the wall		:#'''Leave''' AC power at '''ON''' positio at the wall

	: For recipe creation and sample handling refer to the wiki.		For recipe creation and sample handling refer to the wiki.

	=== Creating a recipe ===		=== Creating a recipe ===

Nader: /* Power Down Procedure */

2019-10-18T10:00:47Z

Power Down Procedure

← Older revision		Revision as of 10:00, 18 October 2019
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	:# On the computer press ESC until the main menu appears.		:# On the computer press ESC until the main menu appears.
	:#'''Leave''' AC power at '''ON''' positio at the wall		:#'''Leave''' AC power at '''ON''' positio at the wall

	: For recipe creation and sample handling refer to the wiki.		: For recipe creation and sample handling refer to the wiki.

Nader: /* Power Down Procedure */

2019-10-18T10:00:35Z

Power Down Procedure

← Older revision		Revision as of 10:00, 18 October 2019
Line 48:		Line 48:
	:# On the computer press ESC until the main menu appears.		:# On the computer press ESC until the main menu appears.
	:#'''Leave''' AC power at '''ON''' positio at the wall		:#'''Leave''' AC power at '''ON''' positio at the wall
	:# For recipe creation and sample handling refer to the wiki.		: For recipe creation and sample handling refer to the wiki.

	=== Creating a recipe ===		=== Creating a recipe ===

Nader: /* Power Down Procedure */

2019-10-18T09:59:57Z

Power Down Procedure

← Older revision		Revision as of 09:59, 18 October 2019
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	:#Make sure the Lamp Power is set to '''OFF'''		:#Make sure the Lamp Power is set to '''OFF'''
	:#Open the oven door ~~around '''10cm'''~~ and unload the susceptor.		:#Open the oven door and unload the susceptor.
	:#'''Put''' the wafer back in the oven and close the door.		:#'''Put''' the wafer back in the oven and close the door.
	:#Turn the blue knob on the blue tube the line to '''Close''' position.		:#Turn the blue knob on the blue tube the line to '''Close''' position.
	:#Close the main valves for the process gasses that have been used.		:#Close the main valves for the process gasses that have been used.
	:#'''Close''' the Air cooling valves.		:#'''Close''' the Air cooling valves.
			:# On the computer press ESC until the main menu appears.
	For recipe creation and sample handling refer to the wiki.		:#'''Leave''' AC power at '''ON''' positio at the wall
			:# For recipe creation and sample handling refer to the wiki.
	~~The system should be left with AC power connected and turned on and the cooling water flowing. On the computer press ESC until the main menu appears~~.

	=== Creating a recipe ===		=== Creating a recipe ===

Nader: /* Startup Procedure */

2019-10-18T09:50:33Z

Startup Procedure

← Older revision		Revision as of 09:50, 18 October 2019
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	:#Load the susceptor inside the chamber and close the door.		:#Load the susceptor inside the chamber and close the door.
	:#Open up for Air cooling valves'''(5.5 bar)'''.		:#Open up for Air cooling valves'''(5.5 bar)'''.
	:#Open up the process gas/gasses on the cylinders that you need by opening the main valves on the cylinders. Pressure of the regulator on secondary manometer should be set to '''1.5 bar'''.		:#Open up the process gas/gasses on the cylinders that you need by opening the main valves on the cylinders. Pressure of the regulator on secondary manometer should be set to '''1.5 bar''' ( Check them also during the run ).
	:#Turn the blue valve on the blue tube to open for air cooling line. '''The pressure should be around 2.~~5bar~~ and the flow rate of above 280'''.		:#Turn the blue valve on the blue tube to open for air cooling line. '''The pressure should be around 2.5 bar and the flow rate of above 280'''.
	~~:#Load the sample into the system~~.		:#Turn the Lamp Power '''ON''' in front.
	:#Turn the Lamp Power '''ON''' in ~~font.~~
	~~:#Check that the water flow is between '''500-700''' lph during your run~~.
	:#Choose and load your recipe.		:#Choose and load your recipe.
	:#Run the proces.		:#Run the proces.
			:#Check that the water flow is between '''500-700''' lph during your run( Below Scriber ).

	=== Power Down Procedure ===		=== Power Down Procedure ===

Karolis: fixed heading levels, updated infobox

2019-02-12T16:14:17Z

fixed heading levels, updated infobox

← Older revision		Revision as of 16:14, 12 February 2019
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	\|image = Tool RTA.jpg		\|image = Tool RTA.jpg
	\|toolfullname = AccuThermo AW 610		\|toolfullname = AccuThermo AW 610
	\|website = https://allwin21.com/		\|website = https://allwin21.com/accuthermo-aw-610/
	\|company = Allwin21 Corp.		\|company = Allwin21 Corp.
	\|description = Rapid thermal annealer		\|description = Rapid thermal annealer
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	\|primary = Nader		\|primary = Nader
	\|secondary = Shiv		\|secondary = Shiv
	~~\|limits = None~~
	~~\|computer = TBD~~
	~~\|manual = TBD~~
	}}		}}

	= RTP AW610 =		== RTP AW610 ==

	Short description		Short description


	== Startup Procedure ==		=== Startup Procedure ===

	If this is your first time using the machine, consult the Czar for training. You can use the computer to create a recipe without powering on the machine, so there is no reason not to do it first. Refer to '''Creating a recipe'''		If this is your first time using the machine, consult the Czar for training. You can use the computer to create a recipe without powering on the machine, so there is no reason not to do it first. Refer to '''Creating a recipe'''
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	:#Run the proces.		:#Run the proces.

	== Power Down Procedure ==		=== Power Down Procedure ===

	After the system has cooled down and the sample was removed:		After the system has cooled down and the sample was removed:
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	The system should be left with AC power connected and turned on and the cooling water flowing. On the computer press ESC until the main menu appears.		The system should be left with AC power connected and turned on and the cooling water flowing. On the computer press ESC until the main menu appears.

	== Creating a recipe ==		=== Creating a recipe ===

	For managing the annealing process the RTP AW610 uses a custom software suite. Before creating a recipe consider if you will be using a susceptor''(refer to Sample loading)''.		For managing the annealing process the RTP AW610 uses a custom software suite. Before creating a recipe consider if you will be using a susceptor''(refer to Sample loading)''.
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	== Sample loading ==		=== Sample loading ===

	The first rule: Dont touch anything behind the front door without gloves!		The first rule: Dont touch anything behind the front door without gloves!

Nader: /* Startup Procedure */

2018-03-19T10:46:20Z

Startup Procedure

← Older revision		Revision as of 10:46, 19 March 2018
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	:#Open up for Air cooling valves'''(5.5 bar)'''.		:#Open up for Air cooling valves'''(5.5 bar)'''.
	:#Open up the process gas/gasses on the cylinders that you need by opening the main valves on the cylinders. Pressure of the regulator on secondary manometer should be set to '''1.5 bar'''.		:#Open up the process gas/gasses on the cylinders that you need by opening the main valves on the cylinders. Pressure of the regulator on secondary manometer should be set to '''1.5 bar'''.
	:#Turn the blue valve on the blue tube to open for air cooling line. '''The pressure should be around 2,5bar and the flow rate of above 280'''.		:#Turn the blue valve on the blue tube to open for air cooling line. '''The pressure should be around 2.5bar and the flow rate of above 280'''.
	:#Load the sample into the system.		:#Load the sample into the system.
	:#Turn the Lamp Power '''ON''' in font.		:#Turn the Lamp Power '''ON''' in font.