AJA systems - Revision history

Harry: /* Currently loaded materials */

2026-08-19T08:11:17Z

Currently loaded materials

← Older revision		Revision as of 08:11, 19 August 2026
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	\| 1 \|\| Al \|\| Intermetallic \|\|		\| 1 \|\| Al \|\| Intermetallic \|\|
	\|-		\|-
	\| 2 \|\| ~~Ti1~~ \|\| ~~Fabmate~~ \|\|		\| 2 \|\| Ti \|\| FabMate \|\|
	\|-		\|-
	\| 3 \|\| SiOx \|\| ~~Tungsten~~ \|\|		\| 3 \|\| SiOx \|\| FabMate \|\|
	\|-		\|-
	\| 4 \|\| Au2 \|\| Tungsten \|\|		\| 4 \|\| Au2 \|\| Tungsten \|\|
	\|-		\|-
	\| 5 \|\| Ge \|\| ~~Fabmate~~ \|\|		\| 5 \|\| Ge \|\| FabMate \|\|
	\|-		\|-
	\| 6 \|\| Pt \|\| FabMate \|\| 200 nm*		\| 6 \|\| Pt \|\| FabMate \|\| 200 nm*
	\|-		\|-
	\| DC1 \|\| W \|\| -- \|\|		\| DC1 \|\| Nb \|\| -- \|\|
	\|-		\|-
	\| DC2 \|\| Nb<sub>2</sub>Ti \|\| -- \|\|		\| DC2 \|\| Nb<sub>2</sub>Ti \|\| -- \|\|

Harry at 08:10, 19 August 2026

2026-08-19T08:10:11Z

← Older revision		Revision as of 08:10, 19 August 2026
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	</div>		</div>


	== Overview ==		== Overview ==

Harry at 08:09, 19 August 2026

2026-08-19T08:09:51Z

← Older revision		Revision as of 08:09, 19 August 2026
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	<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">		<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">

	* Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.		* Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page.

			* Maintenance logs are collected in the Excel czar log page.

	* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.		* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.
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	</div>		</div>

	~~Other deposition tools at the [[Main Page\|NBI cleanroom]]:~~
	* Metal PVD:
	** [[E-Gun evaporator]]
	** [[Edwards evaporator\|Edwards thermal evaporator]]
	** [[Leica sputter coater]]
	* Oxide ALD:
	** [[Cambridge ALD]]
	* III-V growth:
	** [[MBE]]

	== Overview ==		== Overview ==

Harry at 11:37, 5 August 2026

2026-08-05T11:37:30Z

← Older revision		Revision as of 11:37, 5 August 2026
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	* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.		* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.

	* A [[AJA gallery]] page shows all the components inside the tool for a deeper understanding		* An [[AJA gallery]] page shows all the components inside the tool for a deeper understanding

	</div>		</div>

Harry at 11:36, 5 August 2026

2026-08-05T11:36:59Z

← Older revision		Revision as of 11:36, 5 August 2026
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	They both have 2" magnetron sputtering and electron beam evaporation capabilities, as well as some form of substrate milling/sputtering.		They both have 2" magnetron sputtering and electron beam evaporation capabilities, as well as some form of substrate milling/sputtering.
	Most users utilize the tools for thin film metal deposition and substrate surface cleaning.		Most users utilize the tools for thin film metal deposition and substrate surface cleaning.

			<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">

	* Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.		* Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.

	* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.		* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.

			* A [[AJA gallery]] page shows all the components inside the tool for a deeper understanding

			</div>

	Other deposition tools at the [[Main Page\|NBI cleanroom]]:		Other deposition tools at the [[Main Page\|NBI cleanroom]]:

Harry at 14:41, 30 June 2026

2026-06-30T14:41:15Z

← Older revision		Revision as of 14:41, 30 June 2026
Line 14:		Line 14:
	They both have 2" magnetron sputtering and electron beam evaporation capabilities, as well as some form of substrate milling/sputtering.		They both have 2" magnetron sputtering and electron beam evaporation capabilities, as well as some form of substrate milling/sputtering.
	Most users utilize the tools for thin film metal deposition and substrate surface cleaning.		Most users utilize the tools for thin film metal deposition and substrate surface cleaning.

			* Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.

			* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.

	Other deposition tools at the [[Main Page\|NBI cleanroom]]:		Other deposition tools at the [[Main Page\|NBI cleanroom]]:

Harry: /* Overview */

2026-06-30T14:36:59Z

Overview

← Older revision		Revision as of 14:36, 30 June 2026
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	Systems 1 and 2 are expected to at least reach a vacuum of about 2x10<sup>-8</sup> Torr and 6x10<sup>-8</sup> Torr (respectively) after pumping for 24 hours on the main chamber from atmosphere.		Systems 1 and 2 are expected to at least reach a vacuum of about 2x10<sup>-8</sup> Torr and 6x10<sup>-8</sup> Torr (respectively) after pumping for 24 hours on the main chamber from atmosphere.
	The chamber vacuum is monitored periodically by shutting the cryo-valve and recording the rise of pressure rise for 10 mins. The ''rate-of-rise'' history is provided here [link].		The chamber vacuum is monitored periodically by shutting the cryo-valve and recording the rise of pressure rise for 10 mins. The ''rate-of-rise'' history is provided here [link].

	~~Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.~~

	== Currently loaded materials ==		== Currently loaded materials ==

Harry: /* Evaporating metal */

2026-06-30T14:31:47Z

Evaporating metal

← Older revision		Revision as of 14:31, 30 June 2026
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	A general good idea is to follow the plot below for the beam current ramping.		A general good idea is to follow the plot below for the beam current ramping.

	[[File:Evaporation_profile.pdf\| ~~page=1~~\| ~~thumb~~\| Beam current vs Time for a typical e-beam evaporation.]]		[[File:Evaporation_profile.pdf\| thumb\|700px\| none\|Beam current vs Time for a typical e-beam evaporation.]]

	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">

Harry: /* Evaporating metal */

2026-06-30T14:22:31Z

Evaporating metal

← Older revision		Revision as of 14:22, 30 June 2026
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	A general good idea is to follow the plot below for the beam current ramping.		A general good idea is to follow the plot below for the beam current ramping.

			[[File:Evaporation_profile.pdf\| page=1\| thumb\| Beam current vs Time for a typical e-beam evaporation.]]

	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">

Harry: /* Evaporating metal */

2026-06-30T14:04:01Z

Evaporating metal

← Older revision		Revision as of 14:04, 30 June 2026
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	==Evaporating metal==		==Evaporating metal==
			The manufacturer has specific [[How to evaporate metals in AJA\|recommendations for ramping up/down the beam current]] based on the physical properties of each material.

			A general good idea is to follow the plot below for the beam current ramping.

	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
	# Rotate the stage to face the crucible liners (90<sup>o</sup> degrees down - follow the instructions on the lever).		# Rotate the stage to face the crucible liners (90<sup>o</sup> degrees down - follow the instructions on the lever).