AJA systems - Revision history

Harry at 14:41, 30 June 2026

2026-06-30T14:41:15Z

← Older revision		Revision as of 14:41, 30 June 2026
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	They both have 2" magnetron sputtering and electron beam evaporation capabilities, as well as some form of substrate milling/sputtering.		They both have 2" magnetron sputtering and electron beam evaporation capabilities, as well as some form of substrate milling/sputtering.
	Most users utilize the tools for thin film metal deposition and substrate surface cleaning.		Most users utilize the tools for thin film metal deposition and substrate surface cleaning.

			* Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.

			* Information on [[How to evaporate metals in AJA \|how to evaporate metals in AJA]] based on their physical properties.

	Other deposition tools at the [[Main Page\|NBI cleanroom]]:		Other deposition tools at the [[Main Page\|NBI cleanroom]]:

Harry: /* Overview */

2026-06-30T14:36:59Z

Overview

← Older revision		Revision as of 14:36, 30 June 2026
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	Systems 1 and 2 are expected to at least reach a vacuum of about 2x10<sup>-8</sup> Torr and 6x10<sup>-8</sup> Torr (respectively) after pumping for 24 hours on the main chamber from atmosphere.		Systems 1 and 2 are expected to at least reach a vacuum of about 2x10<sup>-8</sup> Torr and 6x10<sup>-8</sup> Torr (respectively) after pumping for 24 hours on the main chamber from atmosphere.
	The chamber vacuum is monitored periodically by shutting the cryo-valve and recording the rise of pressure rise for 10 mins. The ''rate-of-rise'' history is provided here [link].		The chamber vacuum is monitored periodically by shutting the cryo-valve and recording the rise of pressure rise for 10 mins. The ''rate-of-rise'' history is provided here [link].

	~~Service notes and troubleshooting issues are all gathered in the dedicated [[AJA service]] page. Maintenance logs are collected in the Excel czar log page.~~

	== Currently loaded materials ==		== Currently loaded materials ==

Harry: /* Evaporating metal */

2026-06-30T14:31:47Z

Evaporating metal

← Older revision		Revision as of 14:31, 30 June 2026
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	A general good idea is to follow the plot below for the beam current ramping.		A general good idea is to follow the plot below for the beam current ramping.

	[[File:Evaporation_profile.pdf\| ~~page=1~~\| ~~thumb~~\| Beam current vs Time for a typical e-beam evaporation.]]		[[File:Evaporation_profile.pdf\| thumb\|700px\| none\|Beam current vs Time for a typical e-beam evaporation.]]

	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">

Harry: /* Evaporating metal */

2026-06-30T14:22:31Z

Evaporating metal

← Older revision		Revision as of 14:22, 30 June 2026
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	A general good idea is to follow the plot below for the beam current ramping.		A general good idea is to follow the plot below for the beam current ramping.

			[[File:Evaporation_profile.pdf\| page=1\| thumb\| Beam current vs Time for a typical e-beam evaporation.]]

	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">

Harry: /* Evaporating metal */

2026-06-30T14:04:01Z

Evaporating metal

← Older revision		Revision as of 14:04, 30 June 2026
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	==Evaporating metal==		==Evaporating metal==
			The manufacturer has specific [[How to evaporate metals in AJA\|recommendations for ramping up/down the beam current]] based on the physical properties of each material.

			A general good idea is to follow the plot below for the beam current ramping.

	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
	# Rotate the stage to face the crucible liners (90<sup>o</sup> degrees down - follow the instructions on the lever).		# Rotate the stage to face the crucible liners (90<sup>o</sup> degrees down - follow the instructions on the lever).

Harry: /* Oxidation in loadlock */

2026-06-29T10:11:16Z

Oxidation in loadlock

← Older revision		Revision as of 10:11, 29 June 2026
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	# After the pressure goes down to 3e-6 Torr, you can close off '''Valve 4''' (turbo purge) from the software & also close '''Valve 3''' (soak valve). This will ensure the gas ballast returns to high vacuum before isolating.		# After the pressure goes down to 3e-6 Torr, you can close off '''Valve 4''' (turbo purge) from the software & also close '''Valve 3''' (soak valve). This will ensure the gas ballast returns to high vacuum before isolating.
	# The load lock oxidation process is now complete. Repeat from Step 1 as necessary.		# The load lock oxidation process is now complete. Repeat from Step 1 as necessary.
	<div>		</div>
	<div>		</div>

	<!--		<!--

Harry: /* Oxidation in loadlock */

2026-06-29T10:10:56Z

Oxidation in loadlock

← Older revision		Revision as of 10:10, 29 June 2026
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	== Oxidation in loadlock ==		== Oxidation in loadlock ==
			AJA1 is equipped with all the necessary gas lines and pressure gauges to oxidise the surface of a sample in the loadlock.

			However, currently, the oxygen bottle is not connected. Please contact the cleanroom staff responsible for AJA to request a training on this tool feature.


			<div class="mw-collapsible mw-collapsed" style="border:1px solid #ce4e4a; border-left:6px solid #ce4e4a; background:#ce4e4a; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">
			<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>
			<div class="mw-collapsible-content">


	The process is set up for ~10 Torr. In practice it should be between 9.8-10.0 Torr (see log sheet).		The process is set up for ~10 Torr. In practice it should be between 9.8-10.0 Torr (see log sheet).
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	# After the pressure goes down to 3e-6 Torr, you can close off '''Valve 4''' (turbo purge) from the software & also close '''Valve 3''' (soak valve). This will ensure the gas ballast returns to high vacuum before isolating.		# After the pressure goes down to 3e-6 Torr, you can close off '''Valve 4''' (turbo purge) from the software & also close '''Valve 3''' (soak valve). This will ensure the gas ballast returns to high vacuum before isolating.
	# The load lock oxidation process is now complete. Repeat from Step 1 as necessary.		# The load lock oxidation process is now complete. Repeat from Step 1 as necessary.
			<div>
			<div>

	<!--		<!--

Harry: /* AJA1 & AJA2: Sputtering metals */

2026-06-23T11:55:07Z

AJA1 & AJA2: Sputtering metals

← Older revision		Revision as of 11:55, 23 June 2026
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	# Fill out the Excel log file.		# Fill out the Excel log file.
	# Proceed with any other steps or unload.		# Proceed with any other steps or unload.
	====Do you want to run in manual mode?====		===Do you want to run in manual mode?===
	<div class="mw-collapsible mw-collapsed" style="border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">		<div class="mw-collapsible mw-collapsed" style="border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">
	<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>		<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>

Harry: /* AJA2: RF milling (auto - RF1) */

2026-06-23T11:54:49Z

AJA2: RF milling (auto - RF1)

← Older revision		Revision as of 11:54, 23 June 2026
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	</div>		</div>

	===AJA2: RF milling (auto - RF1)===		==AJA2: RF milling (auto - RF1)==
	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
	# Load your sample via the load lock following the procedure detailed above.		# Load your sample via the load lock following the procedure detailed above.
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	# Proceed with other steps such as evaporation, unloading, etc.		# Proceed with other steps such as evaporation, unloading, etc.

	====Do you want to run in manual mode?====		===Do you want to run in manual mode?===
	<div class="mw-collapsible mw-collapsed" style="border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">		<div class="mw-collapsible mw-collapsed" style="border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">
	<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>		<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>

Harry: /* Sputtering metals (AJA1 and AJA2) */

2026-06-23T11:54:31Z

Sputtering metals (AJA1 and AJA2)

@@ Line 311: / Line 311: @@
 </div>
-==Sputtering metals (AJA1 and AJA2)==
+==AJA1 & AJA2: Sputtering metals==
-* Load your sample via the load lock following the procedure detailed above
+<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
-* Turn off the ion gauge (pressure gauge).
+# Load your sample via the load lock following the procedure detailed above.
-* On the laptop, make sure the PhaseIIJ programs is running.
+# Rotate the stage to face the crucible liners (90<sup>o</sup> degrees down - follow the instructions on the lever).
-** If not start it up. The password:apex
+#: '''Never rotate the lever towards the top from the loading position'''
-* Set the adaptive pressure controller to 'Remote'
+#: '''Note:''' ''The sputter sources are angled a bit. 10-20 degrees might give you a more head on sputtering.''
-** It's a 3 sec long press.
+# Turn off the ion gauge (pressure gauge).
-* info: Finer control over the Ar pressure in the chamber is achieved by selecting 'Pressure' button and entering a value.
+# On the laptop, make sure the PhaseIIJ program is running.
-* info: In the program, turn on the Ar flow and set the 'STPT' (set point) to an appropriate value.
+#: If not, start it up. (password: apex)
-** Look at the Excel log files to select a relevant set of values for the flow. The flow roughly sets the base Ar pressure in the chamber.
+# Set the adaptive pressure controller to 'Remote' (3 sec long press).
-* info: Finer control over the Ar pressure in the chamber is achieved by selecting 'Pressure' button and entering a value.
+# Turn on the relevant power source unit.
-** Again, the Excel log files should guide you in selecting an appropriate value.
+# In the program, click on the <code>run process</code> button.
-** The program floors the entered value to a single digit precision. 0.61 will become 0.6. 0.6 sometimes becomes 0.5. I just live with this minor annoyance.
+# Scroll down to the desired recipe
-* info: A PID controlled gate valve between the cryo pump and the chamber will adjust so that the Ar pressure in the chamber matches the set point. You'll hear the valve adjusting when you set the controller to remote. On the adaptive pressure controller display look at the 'SP' and the 'P1'. These should match the value that you want and keyed into the phaseIIJ program.
+# <code>Run</code>
-* Rotate the sample to face downwards.
+# Once the milling starts, note down the <code>Voltage</code> from the power unit into the excel
-** The sputter sources are angled a bit and 10-20 degree might give you a more head on sputtering.
+# Once the recipe terminates, you will get a pop-up window.
-* Power up the relevant sputtering source power unit.
+# Press <code>Okay</code>
-====Auto====
+'''Important warning before you start: For safe operation of the RF ALWAYS enter a ramp rate such that the RF circuitry never ramps faster than 1W/second. Enter ramp rate BEFORE changing wattage!'''
 == Oxidation in loadlock ==