AJA service - Revision history

Harry: /* Service/repair/purchasing */

2026-06-18T14:51:54Z

Service/repair/purchasing

← Older revision		Revision as of 14:51, 18 June 2026
Line 131:		Line 131:
	[[Image: Milling_STDPROC.png\|thumb\|center\|600px\|Approximate standard values on power supply when running the milling]]<BR>		[[Image: Milling_STDPROC.png\|thumb\|center\|600px\|Approximate standard values on power supply when running the milling]]<BR>

	==Service/repair/purchasing==		=Service/repair/purchasing=
	More notes and service/repair/purchasing contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki].		More notes and service/repair/purchasing contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki].

Harry: /* Older ion milling notes */

2026-06-18T14:51:43Z

Older ion milling notes

← Older revision		Revision as of 14:51, 18 June 2026
Line 126:		Line 126:
	:: user: apex		:: user: apex

	== Older ion milling notes ==		= Old notes =
			== Older ion milling notes==
	When operating normally, the chamber should light a clear whiteish hue, and the kaufman power source should read numbers similar to these:		When operating normally, the chamber should light a clear whiteish hue, and the kaufman power source should read numbers similar to these:
	[[Image: Milling_STDPROC.png\|thumb\|center\|600px\|Approximate standard values on power supply when running the milling]]<BR>		[[Image: Milling_STDPROC.png\|thumb\|center\|600px\|Approximate standard values on power supply when running the milling]]<BR>

Harry: /* Service/repair/purchasing */

2026-06-18T14:51:11Z

Service/repair/purchasing

← Older revision		Revision as of 14:51, 18 June 2026
Line 125:		Line 125:
	: Fill in with parameters the [[AJA service#Phase II J software configurations \|Phase II J software configurations]].		: Fill in with parameters the [[AJA service#Phase II J software configurations \|Phase II J software configurations]].
	:: user: apex		:: user: apex

			== Older ion milling notes ==
			When operating normally, the chamber should light a clear whiteish hue, and the kaufman power source should read numbers similar to these:
			[[Image: Milling_STDPROC.png\|thumb\|center\|600px\|Approximate standard values on power supply when running the milling]]<BR>

	==Service/repair/purchasing==		==Service/repair/purchasing==
	More notes and service/repair/purchasing contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki].		More notes and service/repair/purchasing contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki].

Harry: /* Troubleshooting */

2026-06-18T14:41:47Z

Troubleshooting

@@ Line 76: / Line 76: @@
 =Troubleshooting=
-* If you are unable to ignite the plasma (either DC, RF or ion plasma) start by checking for shorts between pins on the powersupply input on the sputtering arm / ion source.
+; Unable to ignite the plasma (either DC, RF or ion plasma)?
 ==Service/repair/purchasing==
 More notes and service/repair/purchasing contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki].

Harry: /* Troubleshooting */

2026-06-18T14:36:00Z

Troubleshooting

← Older revision		Revision as of 14:36, 18 June 2026
Line 77:		Line 77:
	=Troubleshooting=		=Troubleshooting=
	* If you are unable to ignite the plasma (either DC, RF or ion plasma) start by checking for shorts between pins on the powersupply input on the sputtering arm / ion source.		* If you are unable to ignite the plasma (either DC, RF or ion plasma) start by checking for shorts between pins on the powersupply input on the sputtering arm / ion source.



			==Service/repair/purchasing==
			More notes and service/repair/purchasing contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki].

Harry: /* Maintenance */

2026-06-18T14:34:50Z

Maintenance

← Older revision		Revision as of 14:34, 18 June 2026
Line 1:		Line 1:
	[[AJA systems]] maintenance is described here		[[AJA systems]] maintenance is described here

	== Maintenance ==		= Maintenance =

	=== Standard maintenance ===		== Standard maintenance ==

	# Log cryo temp, base pressure.		# Log cryo temp, base pressure.
Line 42:		Line 42:
	# Write a message to the users!		# Write a message to the users!

	=== Cryo pump regeneration ===		== Cryo pump regeneration ==

	# Close cryo VAT valve ( Adaptive pressure controller ) .		# Close cryo VAT valve ( Adaptive pressure controller ) .
Line 63:		Line 63:
	# Open cryo VAT valve		# Open cryo VAT valve

	==~~= Special notes =~~==		== Phase II J software configurations ==
	The standard Phase II J software configurations on the systems are:		The standard Phase II J software configurations on the systems are:

Line 75:		Line 75:
	[[Image:Aja2setup.jpg\|600px\|standard config AJA2]]		[[Image:Aja2setup.jpg\|600px\|standard config AJA2]]

			=Troubleshooting=
	* If you are unable to ignite the plasma (either DC, RF or ion plasma) start by checking for shorts between pins on the powersupply input on the sputtering arm / ion source.		* If you are unable to ignite the plasma (either DC, RF or ion plasma) start by checking for shorts between pins on the powersupply input on the sputtering arm / ion source.

Harry: Created page with "AJA systems maintenance is described here == Maintenance == === Standard maintenance === # Log cryo temp, base pressure. # Close cryo gate valve. # Turn off ion gauge. # Open loadlock gate valve. # Turn off loadlock turbo. #: While venting: #* Unscrew right port with the linear crucible drive using two 9/16" wrenches. #* Unscrew lid if you intend to open it. #* Above 1e0 Torr loadlock pressure slowly open the vent nitrogen needle valve in front of the chamber. # A..."

2026-06-18T14:33:59Z

Created page with "AJA systems maintenance is described here == Maintenance == === Standard maintenance === # Log cryo temp, base pressure. # Close cryo gate valve. # Turn off ion gauge. # Open loadlock gate valve. # Turn off loadlock turbo. #: While venting: #* Unscrew right port with the linear crucible drive using two 9/16" wrenches. #* Unscrew lid if you intend to open it. #* Above 1e0 Torr loadlock pressure slowly open the vent nitrogen needle valve in front of the chamber. # A..."

New page

[[AJA systems]] maintenance is described here

== Maintenance ==

=== Standard maintenance ===

# Log cryo temp, base pressure.
# Close cryo gate valve.
# Turn off ion gauge.
# Open loadlock gate valve.
# Turn off loadlock turbo.
#: While venting:
#* Unscrew right port with the linear crucible drive using two 9/16" wrenches.
#* Unscrew lid if you intend to open it.
#* Above 1e0 Torr loadlock pressure slowly open the vent nitrogen needle valve in front of the chamber.
# At atmosphere: start stopwatch.
# Pull out right port, open e-beam shutter.
# For each crucible:
#* Wipe target metal surface with wipe
#* Weigh with digital scale
#** W crucible weighs ~120 g
#** Intermetallic crucible ~20 g
#** FabMate crucible ~12 g
#** Gold pellets <80 g, 40-45 g for half
#** Al pellets 6-7 g
#** Top up target material if needed, log amount.
# If Sensor Life < 70% change the QCM. You can do this by sticking your hand through the loadlock. Be careful not to touch the mirror.
#* AJA1: gold plated 6 MHz. There are two. Sensor 2 is towards the end of the assembly. It is a bit tricky to get out, even with the sensor shutter open.
#* AJA2: silver plated 6 MHz (doesn't fail immediately during Pt evaporation)
# Push the linear drive back inside, screw the nuts back on the bolts
# Check if you can see the crucible in the mirror. If not:
## Attach chain to only one lid hook. Pull with ceiling motor for 20 mins
## Once the lid is open then lower the lid and lift with all three hooks
## Check if the quarter silicon wafer has started to delaminate. If so, peel off and reuse if possible. If it is not reflective enough, replace with clean quarter wafer.
## Adjust the clamp holding the mirror so that you can see the crucible through the port with LED light.
## Close lid, do not tighten screws/nuts
# Start pumping, log time at atmosphere, tighten the nuts on the crucible linear drive
# Close vent needle valve (not too tight!)
# If loadlock pressure goes below 1e-1 Torr, there are no obvious leaks
# After 30-60 mins check pressure. If <1e-4 Torr, turn on ion gauge
# Open cryo gate valve at own discretion. Turbo helps pumping down to ~1e-6 Torr. At lower pressures loadlock gate valve should be closed and only cryo should be open to the main chamber.
# Write a message to the users!

=== Cryo pump regeneration ===

# Close cryo VAT valve ( Adaptive pressure controller ) .
# Open the loadloack valve.
# Open Turbo is pumping the main chamber
# Turn off cryo (on the wall behind the tool). Just press and release switch .
# Open nitrogen vent valve on the back left of the cryo.
# Let warm to max T (~285 K), takes ~1 hour
# Close nitrogen vent valve
# Close roughing pump to turbo (screw valve under the loadlock turbo)
# Open roughing to cryo (screw valve next to cryo)
# Wait 20 mins to rough pump cryo
# Open roughing to turbo
# Turn on cryo ( wall switch) . Please check compressor as well .
# Wait ~60 mins to get between 200-150 K
# Close roughing to cryo
# Wait until min T. Must be below 20 K (2-3 hours at 2 K/min)
#: If does not go down below 20 K, replace cryo with spare unit. Return cryo for repair/refurb to Edwards Vacuum. Contacts on the [https://wiki.nbi.ku.dk/qdevwiki/AJA_Systems internal QDev wiki]
# Close loadlock
# Open cryo VAT valve

=== Special notes ===
The standard Phase II J software configurations on the systems are:



'''AJA1'''
[[Image:Aja1setup.jpg|600px|standard config AJA1]]

'''AJA2'''
[[Image:Aja2setup.jpg|600px|standard config AJA2]]

* If you are unable to ignite the plasma (either DC, RF or ion plasma) start by checking for shorts between pins on the powersupply input on the sputtering arm / ion source.