{"batchcomplete":"","continue":{"lecontinue":"2026-06-30 14:06:42+00|1374","continue":"-||"},"query":{"logevents":[{"logid":1384,"ns":0,"title":"Working with Piranha","pageid":414,"logpage":414,"revid":3159,"params":{},"type":"create","action":"create","user":"Harry","timestamp":"2026-09-10T16:02:02Z","comment":"Created page with \"==Mixing KOH pellets and etching== <div style=\"background-color: #c0c0c0; border: 1px solid #00000; padding: 10px; border-radius: 5px;\"> * Book the HF fumehood in CR1. : ''It is recommended to use a setup where you can run your process undisturbed'' * Gather all necessary glassware: ** two PTFE (Teflon) beakers * Gather all necessary chemicals: ** Concentrated sulfuric acid ** Hydrogen peroxide * Turn on MQ 30-minute timer. Flush the MQ for 30 seconds * Make sure you hav...\""},{"logid":1383,"ns":6,"title":"File:APV KOH V1.pdf","pageid":413,"logpage":413,"revid":3154,"params":{},"type":"create","action":"create","user":"Harry","timestamp":"2026-09-10T15:35:00Z","comment":""},{"logid":1382,"ns":6,"title":"File:APV KOH V1.pdf","pageid":413,"logpage":413,"revid":3154,"params":{"img_sha1":"er2mwc61dib4mgj5l6x893v4goclhsu","img_timestamp":"2026-09-10T15:34:59Z"},"type":"upload","action":"upload","user":"Harry","timestamp":"2026-09-10T15:34:59Z","comment":""},{"logid":1381,"ns":0,"title":"Working with KOH","pageid":412,"logpage":412,"revid":3129,"params":{},"type":"create","action":"create","user":"Harry","timestamp":"2026-09-09T14:43:37Z","comment":"Created page with \"KOH belongs to the family of anisotropic Si-etchants based on aqueous alkaline solutions. The anisotropy stems from the different etch rates in different crystal directions. The {111}-planes are almost inert whereas the etch rates of e.g. {100}- and {110}-planes are several orders of magnitude faster.  At NBI cleanroom, we use as standard a 28 wt% KOH solution. The etch rate and the selectivity towards a SiO2 mask depends on the temperature. We normally use a temperature...\""},{"logid":1380,"ns":0,"title":"Knowledge database for ALD","pageid":411,"logpage":411,"revid":3096,"params":{},"type":"create","action":"create","user":"Harry","timestamp":"2026-08-13T15:23:38Z","comment":"Created page with \"=ALD1= ==TMA (Al2O3)==  ==TDMAHf (HfO2)==  ==TTIP (TiO2)==   =ALD2= ==TMA (Al2O3)==  ==TDMAHf (HfO2)==  ==TDMAZr (ZrO2)==\""},{"logid":1379,"ns":0,"title":"AJA gallery","pageid":410,"logpage":410,"revid":3091,"params":{},"type":"create","action":"create","user":"Harry","timestamp":"2026-08-05T11:38:06Z","comment":"Created page with \"=AJA1=   =AJA2=\""},{"logid":1378,"ns":6,"title":"File:NBI cleanroom price list 2026.pdf","pageid":409,"logpage":409,"revid":3075,"params":{},"type":"create","action":"create","user":"Chenglee","timestamp":"2026-07-21T11:13:54Z","comment":""},{"logid":1377,"ns":6,"title":"File:NBI cleanroom price list 2026.pdf","pageid":409,"logpage":409,"revid":3075,"params":{"img_sha1":"pe043pqrbbzd6aqaz6pje9zl1iedjc4","img_timestamp":"2026-07-21T11:13:54Z"},"type":"upload","action":"upload","user":"Chenglee","timestamp":"2026-07-21T11:13:54Z","comment":""},{"logid":1376,"ns":0,"title":"How to evaporate metals in AJA","pageid":408,"logpage":408,"revid":3044,"params":{},"type":"create","action":"create","user":"Harry","timestamp":"2026-06-30T14:54:22Z","comment":"Created page with \"=The genius remote=  [https://e-beam.ferrotec.com/wp-content/uploads/sites/7/carrera_genius.pdf| The genius remote] is used to control the coils at the e-beam and manipulate the beam.  There are two options: * '''Left joystick:''' controls the amplitude (''how much the beam oscillates'') * '''Right joystick:''' controls the beam position (''where the beam is located or where is the centre of the oscillation'')  =Evaporation of metals= The following instructions are based...\""},{"logid":1375,"ns":6,"title":"File:Evaporation profile.pdf","pageid":407,"logpage":407,"revid":3039,"params":{"img_sha1":"92g18ss9opjn5hi6dlfm7y7c3gd5cp0","img_timestamp":"2026-06-30T14:21:18Z"},"type":"upload","action":"overwrite","user":"Harry","timestamp":"2026-06-30T14:21:18Z","comment":"replaced as png"}]}}