["Te",["Tencor profilometer","Tergeo plasma asher","Tergeo Plasma Asher"],["","",""],["https://wiki.nbi.ku.dk/cleanroom/Tencor_profilometer","https://wiki.nbi.ku.dk/cleanroom/Tergeo_plasma_asher","https://wiki.nbi.ku.dk/cleanroom/Tergeo_Plasma_Asher"]]