cleanroom - Recent changes [en-gb]

Main Page

Harry — Mon, 15 Jun 2026 11:48:32 GMT

Current tool status

← Older revision		Revision as of 11:48, 15 June 2026
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	\|}		\|}

	''List updated: ~~Tue 14 Apr~~ 2026''		''List updated: Fri 12 Jun 2026''

	<!--		<!--

Atomic layer deposition

Harry — Mon, 15 Jun 2026 10:09:10 GMT

Created page with "An Atomic Layer Deposition (ALD) process is a vapor-phase, thin-film deposition method driven by the chemical saturation of surfaces, allowing for conformal coatings of surfaces with very high aspect ratios. The reason for this uniform coating lies in the '''saturative chemisorption''' of sequential cycles of precursor vapors. =Principles= A repetitive sequence of four steps, so called '''cycle''', achieves the coating of the surface. ==Cycle sequence== # The surface of..."

New page

An Atomic Layer Deposition (ALD) process is a vapor-phase, thin-film deposition method driven by the chemical saturation of surfaces, allowing for conformal coatings of surfaces with very high aspect ratios. The reason for this uniform coating lies in the '''saturative chemisorption''' of sequential cycles of precursor vapors.

=Principles=
A repetitive sequence of four steps, so called '''cycle''', achieves the coating of the surface.
==Cycle sequence==
# The surface of the material is terminated with hydroxyl groups (formed during contact with air).
# '''The first precursor is introduced:''' The precursor molecules react with the surface hydroxyles forming a single saturated monolayer.
# '''Evacuation:''' The byproducts of the reaction (methane - CH<sub>3</sub>) and the unreacted precursor molecules are pumped out of the chamber
#'''Water (H<sub>2</sub>0) is introduced:''' Water (H<sub>2</sub>0) is pulsed into the reactor. This will remove the CH<sub>3</sub> groups and create oxide bridges, and passivate the surface with hydroxyles.
# '''Evacuation:''' The byproducts of the reaction (methane - CH<sub>3</sub>) and the unreacted precursor molecules are pumped out of the chamber.

As a result, a single oxide layer has been formed and surface hydroxyl groups are used again to perform another cycle.

==Notes==
* During the coating procedure, N<sub>2</sub> is used as a carrier gas in a user-determined flow, and a scroll pump attached to the exhaust continuously pumps the byproducts from the reactor.
* The ratio of the ''oxide thickness'' over the ''growth cycles'' gives the '''growth per cycle (GPC)'''

Cambridge ALD

Harry — Mon, 15 Jun 2026 09:16:08 GMT

← Older revision		Revision as of 09:16, 15 June 2026
(3 intermediate revisions by the same user not shown)
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	\|secondary = Martin		\|secondary = Martin
	}}		}}
	''Page last updated: ~~11 Nov 2025~~''
	Two nearly identical Savannah S100-like systems are used for atomic layer deposition of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium''', and '''oxide'''.		''Page last updated: 15 Jun 2026''

			Two nearly identical Savannah S100-like systems are used for [[atomic layer deposition]] of '''aluminum''', '''hafnium''', '''titanium''', '''zirconium''', and '''oxide'''.

	Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:		Other material deposition alternatives at the [[Main Page\|NBI cleanroom]]:
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	* [[Leica sputter coater]]		* [[Leica sputter coater]]
	* [[MBE\|Molecular beam epitaxy system]]		* [[MBE\|Molecular beam epitaxy system]]


	~~== Growth per cycle (GPC) monitoring ==~~

	~~<gallery mode="packed" widths=500 heights=200>~~
	~~Image:ALD1.png\|ALD1 HfOx~~
	~~Image:ALD1AlOx.png\|ALD1 AlOx~~
	~~Image:ALD2.png\|ALD2 HfOx~~
	~~</gallery>~~

	== Available processes ==		== Available processes ==
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	== Standard ~~operating procedure~~ ==		== Standard Operating Procedure ==
	* Log your process in the Excel notebook.		===ALD1===
	* Check the nitrogen bottle:		<div style="background-color: #c0c0c0; border: 1px solid #00000; padding: 10px; border-radius: 5px;">
	** Verify that the ~~main valve~~ on top of the ~~bottle is open~~.		====Loading====
	*: ''~~The N2 flow in idle state is~~ '''~~5 sccm~~'''.''		# Log your process in the Excel notebook.
	** Verify that the ~~main bottle pressure is at least 5 bar~~.		# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''
	** The line pressure should be >~~1 bar (ALD1) 1~~-~~2 bar (ALD2)~~.		# Make sure the valves of '''all''' precursors inside the ALD tool are closed.
	*: ''If line pressure is ~~outside the range~~, ~~please report it to~~ the cleanroom staff.''		# Run recipe '''chamber prep''' to pump out any residual gas in the gas lines.
	* Make sure the valves of '''all''' precursors inside the ALD ~~machine~~ are closed.		# Press the round '''VENT''' button.
	* Run recipe ''~~Default_cleaning~~'' to pump out any residual gas in the gas lines.		# Open the metal lid.
	* Press the ~~'''VENT''' or~~ '''VENT REACTOR''' button.		# Put your sample inside, roughly in the center, away from the gas inlet and outlet.
	* Open the metal lid.		#: Check whether the rubber O-ring is properly seated.
	* Put your sample inside, roughly in the center, away from the gas inlet and outlet.		# Close the metal lid. Check that the lid is aligned to sit directly on top of the reactor chamber.
	*: Check whether the rubber O-ring is properly seated.		# Press the round '''PUMP''' button.
	* Close the metal lid. Check that the lid is aligned to sit directly on top of the reactor chamber.		# Place the metal cage on top of the tool.
	* Press the '''~~PUMP~~''' or '''PUMP REACTOR''' button.		# Open the H<sub>2</sub>0 valve.
	*: Pressure with flow set to 0: ~5e-2 Torr or lower.		# Open relevant precursor valve.
	* Place the metal cage on top of the tool.		# Run your recipe.
	* Open relevant precursor ~~valves~~.		====Unloading====
	* Run your recipe.		# Close precursor valves.
	~~<blockquote style="background-color:~~ #~~F0F0F0; border: dashed thin grey;">~~		# Press the round '''VENT''' button.
	* Pressure with 20 sccm N<sub>2</sub> flow present: low e-1 Torr.		# Place the metal cage on the side of the tool.
	* ALD1 pulse lengths: H<sub>2</sub>O ~~~0.5 s, HfOx TDMAH 0.2 s, AlOx TMA 0.02 s~~.		# Take out your sample. Check the rubber o-ring.
	* ALD2 pulse lengths: H<sub>2</sub>O ~0.02 s, HfOx TDMAH 0.2-0.5 s.		# Press the round '''PUMP''' button.
	~~</blockquote>~~		# Run recipe '''chamber_finalise'''.
	* Close precursor ~~valves~~.		# Leave the system in the appropriate state.
	* Press the ~~big round '''VENT''' or~~ '''VENT REACTOR''' button.		</div>
	* Place the metal cage on the ~~side of the tool~~.
	* Take out your sample. Check the rubber o-ring.		===ALD2===
	* Press the ~~big round~~ '''~~PUMP~~''' or '''PUMP REACTOR''' button.		<div style="background-color: #c0c0c0; border: 1px solid #00000; padding: 10px; border-radius: 5px;">
	* Run recipe ''~~Default_heater_set~~''.		====Loading====
	* Verify that the ~~flow is set at 5 sccm~~.		# Log your process in the Excel notebook.
			# Check the nitrogen bottle: ''The indicators should be close to the designated values. If line pressure is ~0bar, contact the cleanroom staff.''
			# Make sure the valves of '''all''' precursors inside the ALD tool are closed.
			# Run recipe '''chamber prep.txt''' to pump out any residual gas in the gas lines.
			# Press the '''VENT REACTOR''' button.
			# Open the metal lid.
			# Put your sample inside, roughly in the center, away from the gas inlet and outlet.
			#: Check whether the rubber O-ring is properly seated.
			# Close the metal lid. Check that the lid is aligned to sit directly on top of the reactor chamber.
			# Press the '''STOP VENTING''' button.
			# Press the '''PUMP REACTOR''' button.
			# Place the metal cage on top of the tool.
			# Open relevant precursor valve.
			# H<sub>2</sub>O is always open.
			# Run your recipe.
			====Unloading====
			# Close precursor valve.
			# Press the '''VENT REACTOR''' button.
			# Place the metal cage on the wall.
			# Take out your sample. Check the rubber o-ring.
			# Press the '''STOP VENTING''' button.
			# Press the '''PUMP REACTOR''' button.
			# Run recipe '''chamber_finalise.txt'''.
			# Leave the system in the appropriate state.
			</div>

			== Growth per cycle (GPC) monitoring ==

			<gallery mode="packed" widths=500 heights=200>
			Image:ALD1.png\|ALD1 HfOx
			Image:ALD1AlOx.png\|ALD1 AlOx
			Image:ALD2.png\|ALD2 HfOx
			</gallery>


	== Witness samples ==		== Witness samples ==

Safety

Harry — Mon, 15 Jun 2026 08:52:27 GMT

Safety topics

← Older revision		Revision as of 08:52, 15 June 2026
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	*[[General rules for working in the cleanroom]]		*[[General rules for working in the cleanroom]]
	*[[Working with chemicals]]		*[[Working with chemicals]]
	*[[Working with HF\|Working with hydrofluoric acid]]		<!--*[[Working with HF\|Working with hydrofluoric acid]]-->
	*[[HF safety\|HF safety]]		*[[HF safety\|HF safety]]
	*[[Working with nanowires and nanotubes]]		*[[Working with nanowires and nanotubes]]

Working with HF

Harry — Mon, 15 Jun 2026 08:48:45 GMT

← Older revision		Revision as of 08:48, 15 June 2026
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	Hydrofluoric acid (HF) has a number of chemical, physical, and toxicological properties, which make handling of this material especially hazardous. Although chemists consider HF to be a “weak” acid, its potential to produce serious health effects greatly exceeds that of “strong” acids commonly used in the laboratory. HF shares the corrosive properties common among mineral acids but is unique in its ability to cause deep tissue damage and hypocalcemia (low calcium levels in the blood). Anhydrous (containing no water) HF is a clear, colorless, fuming, and corrosive liquid. HF is also available in the gaseous state. All forms, including solutions or vapor, can cause severe burns to tissue which are extremely painful and very slow to heal.		Hydrofluoric acid (HF) has a number of chemical, physical, and toxicological properties, which make handling of this material especially hazardous. Although chemists consider HF to be a “weak” acid, its potential to produce serious health effects greatly exceeds that of “strong” acids commonly used in the laboratory. HF shares the corrosive properties common among mineral acids but is unique in its ability to cause deep tissue damage and hypocalcemia (low calcium levels in the blood). Anhydrous (containing no water) HF is a clear, colorless, fuming, and corrosive liquid. HF is also available in the gaseous state. All forms, including solutions or vapor, can cause severe burns to tissue which are extremely painful and very slow to heal.

	Watch our video on how to safely handle HF:		<!--Watch our video on how to safely handle HF:

	[[File:HF_handling.mp4\|600px]]		[[File:HF_handling.mp4\|600px]]-->

	<!--The following picture shown an example of an HF burn caused by exposure to 70% hydrofluoric acid.		<!--The following picture shown an example of an HF burn caused by exposure to 70% hydrofluoric acid.

Cambridge ALD

Harry — Mon, 15 Jun 2026 07:58:43 GMT

Witness samples

← Older revision		Revision as of 07:58, 15 June 2026
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	In CR1 and CR2, you can find various witness samples depending on the properties that you would like to explore:		In CR1 and CR2, you can find various witness samples depending on the properties that you would like to explore:
	* Only thickness: Si (001) ~~of dimension > 7x7 mm2~~		* Only thickness: Si (001) 1 inch wafers
	* Thickness and breakdown voltage: Si (001) 15x15 mm2 back-side Au plated		* Thickness and breakdown voltage: Si (001) 15x15 mm2 back-side Au plated

Main Page

Chenglee — Fri, 12 Jun 2026 13:20:43 GMT

Current tool status

← Older revision		Revision as of 13:20, 12 June 2026
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F prime]]		\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F prime]]
	\| style="background-color: #~~FFBF00~~" \| ~~Imaging issue. Expected recovery date: mid-June 2026.~~		\| style="background-color: #c6e0b4" \| All good!
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM\|TEM]]		\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM\|TEM]]

HF safety

Harry — Fri, 12 Jun 2026 08:11:16 GMT

Workstation Setup

← Older revision		Revision as of 08:11, 12 June 2026
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	\|}		\|}

	[[File:HF_bench_setup.png\|~~center~~\|thumb\|800px\|Recommended Setup Inside the Fume Hood]]		[[File:HF_bench_setup.png\|none\|thumb\|800px\|Recommended Setup Inside the Fume Hood]]

	== Standard Operating Procedure ==		== Standard Operating Procedure ==
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	\| '''If you see a liquid drop on''' \|\| '''Action Plan'''		\| '''If you see a liquid drop on''' \|\| '''Action Plan'''
	\|-		\|-
	\| Stainless steel airfoil \|\| * Assume it is HF.		\| Stainless steel airfoil \|\|
			* Assume it is HF.
	* Wipe once with a CR wipe.		* Wipe once with a CR wipe.
	* Wipe again with a water-soaked CR wipe and let it evaporate.		* Wipe again with a water-soaked CR wipe and let it evaporate.
	\|-		\|-
	\| Barrier gloves \|\| * Assume it is HF.		\| Barrier gloves \|\|
			* Assume it is HF.
	* Rinse gloves.		* Rinse gloves.
	* Remove them by turning inside out (no wiping needed).		* Remove them by turning inside out (no wiping needed).
	* Use a clean set of barrier gloves.		* Use a clean set of barrier gloves.
	\|-		\|-
	\| Apron \|\| * Remove the apron and leave it '''inside the fume hood'''.		\| Apron \|\|
			* Remove the apron and leave it '''inside the fume hood'''.
	* Evacuate the area.		* Evacuate the area.
	* CR staff flushes and disposes of the apron.		* CR staff flushes and disposes of the apron.
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	\| '''Spill Location''' \|\| '''User Actions'''		\| '''Spill Location''' \|\| '''User Actions'''
	\|-		\|-
	\| Outside the HF tray but inside the bench \|\| * '''Do not take any action'''—leave the setup immediately.		\| Outside the HF tray but inside the bench \|\|
			* '''Do not take any action'''—leave the setup immediately.
	* Buddy helps remove contaminated PPE (keep PPE within the fume hood).		* Buddy helps remove contaminated PPE (keep PPE within the fume hood).
	* Buddy calls for help (if user is HF-free).		* Buddy calls for help (if user is HF-free).
	\|-		\|-
	\| Outside the HF tray and outside the bench \|\| * '''Do not take any action'''—'''evacuate CR1 immediately'''.		\| Outside the HF tray and outside the bench \|\|
			* '''Do not take any action'''—'''evacuate CR1 immediately'''.
	* Remove contaminated PPE '''outside CR1 door''' (in the hallway).		* Remove contaminated PPE '''outside CR1 door''' (in the hallway).
	* Buddy calls for help (if user is HF-free).		* Buddy calls for help (if user is HF-free).
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	'''The user and their buddy should follow the action plan bellow'''		'''The user and their buddy should follow the action plan bellow'''
			[[File:Emergency_shower.jpg\|right\|thumb\|400px\|Emergency Showers in the Hallway of the Second Floor]]
	{\|		{\|
	\|-		\|-
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	\|}		\|}

	~~[[File:Emergency_shower.jpg\|center\|thumb\|800px\|Emergency Showers in the Hallway of the Second Floor]]~~

	~~---~~
	== Exposure Response ==		== Exposure Response ==
	{\|		{\|

Main Page

Chenglee — Thu, 11 Jun 2026 11:33:47 GMT

Current tool status

← Older revision		Revision as of 11:33, 11 June 2026
(One intermediate revision by the same user not shown)
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F prime]]		\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F prime]]
	\| style="background-color: #~~c6e0b4~~" \| ~~All good!~~		\| style="background-color: #FFBF00" \| Imaging issue. Expected recovery date: mid-June 2026.
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM\|TEM]]		\| style="text-align:right; padding-right:6px;" \| [[Talos F200i S/TEM\|TEM]]

Main Page

Zhe — Tue, 09 Jun 2026 11:09:44 GMT

← Older revision		Revision as of 11:09, 9 June 2026
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Raith eLine\|Raith eLine 30 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Raith eLine\|Raith eLine 30 kV]]
	\| style="background-color: #~~c6e0b4~~" \| ~~All good!~~		\| style="background-color: #ff9f9f" \| Service: Gun vacuum is too low
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV]]

HF safety

Martin — Thu, 04 Jun 2026 09:25:40 GMT

Working with HF

← Older revision		Revision as of 09:25, 4 June 2026
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	'''Warning''' HF can cause severe burns, tissue damage, and systemic toxicity.		'''Warning''' HF can cause severe burns, tissue damage, and systemic toxicity.
	'''Always follow these guidelines.'''		'''Always follow these guidelines.'''

	~~Watch our video on how to safely handle HF:~~

	~~[[File:HF_handling.mp4\|600px]]~~

	== Chemical and Toxicological Properties ==		== Chemical and Toxicological Properties ==

Main Page

Chenglee — Wed, 03 Jun 2026 16:12:30 GMT

Current tool status

← Older revision		Revision as of 16:12, 3 June 2026
(4 intermediate revisions by the same user not shown)
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV]]
	\| style="background-color: #ff9f9f" \| ~~Maintenance~~: ~~Gun exchange~~. ~~expected~~ date: ~~Fri 1 May~~ 2026		\| style="background-color: #ff9f9f" \| Service: Blanking aperture. Expected recovery date: end-of-June 2026.
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Elionix_F-125\|Elionix F-125 125 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Elionix_F-125\|Elionix F-125 125 kV]]

File:Emergency shower.jpg

Harry — Fri, 22 May 2026 13:18:00 GMT

Harry uploaded File:Emergency shower.jpg

New page

File:HF bench setup.png

Harry — Fri, 22 May 2026 13:16:03 GMT

Harry uploaded File:HF bench setup.png

New page

HF safety

Harry — Fri, 22 May 2026 13:12:37 GMT

← Older revision		Revision as of 13:12, 22 May 2026
(One intermediate revision by the same user not shown)
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	\|-		\|-
	\| <div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">		\| <div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
	Although HF exposures can result in injury, ~~'''~~quick response will minimize the damage~~'''~~. All exposures should be treated immediately even if burns ~~are~~ not felt for hours. HF first aid (calcium gluconate gel) and spill response kits are located in the cleanroom, and users are obliged to familiarize themselves with ~~their~~ location and proper use.		Although HF exposures can result in injury, quick response will minimize the damage. All exposures should be treated immediately even though burns may not be felt for hours. HF first aid (calcium gluconate gel) and spill response kits are located in the cleanroom and users are obliged to familiarize themselves with the location and proper use of them.

	~~'''~~Affected personnel must receive medical attention for all exposures.~~''' Any~~ exposure to HF must be medically evaluated. Take a copy of these procedures and the MSDS to the emergency room.		Affected personnel must receive medical attention for all exposures, i.e. any exposure to HF must be medically evaluated. Take a copy of these procedures and the MSDS with you to the emergency room.
	</div>		</div>
	\|}		\|}

	=== Skin Contact ===		=== Skin Contact ===
	# Immediately wash all affected areas with water.		* Immediately wash all affected areas with water.
	# Remove any clothing or jewelry that could trap or retain HF (remove goggles last).		* Remove any clothing or jewelry that could trap or retain HF (remove goggles last).
	# Flush skin for 15 minutes or until medical attention is available.		* Flush skin for 15 minutes or until medical attention is available.
	# Get medical attention.		* Get medical attention.
	# Apply calcium gluconate gel to the affected area (use rubber gloves) every 15 minutes and repeat flushing in between.		* Apply calcium gluconate gel to the affected area (use rubber gloves) every 15 minutes and repeat flushing in between.

	=== Eye Contact ===		=== Eye Contact ===
	# Immediately flush eyes for at least 15 minutes with water while holding eyelids open.		* Immediately flush eyes for at least 15 minutes with water while holding eyelids open.
	# Remove contact lenses if applicable.		* Remove contact lenses if applicable.
	# Get medical attention.		* Get medical attention.
	# Flushing can be limited to 5 minutes if medical personnel are immediately available to administer sterile calcium gluconate (1%) solution (via continuous drip into eyes).		* Flushing can be limited to 5 minutes if medical personnel are immediately available to administer sterile calcium gluconate (1%) solution (via continuous drip into eyes).

	=== Inhalation ===		=== Inhalation ===
	# Move to fresh air as soon as possible.		* Move to fresh air as soon as possible.
	# Get medical attention.		* Get medical attention.
	# Medical personnel can administer pure oxygen and calcium gluconate (via nebulizer).		* Medical personnel can administer pure oxygen and calcium gluconate (via nebulizer).

	{\|		The [https://en.wikipedia.org/wiki/Threshold_limit_value threshold limit value] (TLV) for HF is 2 PPM.
	\|-
	~~\| <div style="background-color~~: ~~#fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">~~
	~~'''Note: The~~ threshold limit value (TLV) for HF is 2 PPM~~.'''~~
	~~</div>~~
	\|}

	~~---~~
	~~== First Aid ==~~
	{\|
	\|-
	~~\| <div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">~~
	~~'''Four Principles of First Aid:'''~~
	~~# Stop the accident.~~
	~~# Preserve life.~~
	~~# Summon assistance.~~
	~~# Provide first aid.~~

	~~If you call emergency services (112), '''send a colleague to the main entrance of the HCØ building to guide paramedics to the accident site'''.~~

	~~'''Emergency Ward:''' Bispebjerg Skadestue, 23 Bispebjergbakke, 2400 Copenhagen NV~~.

	~~'''Reporting:''' All accidents must be reported to one of the permanent NBI staff members.~~		{{Emergencies}}
	~~</div>~~
	\|}

	~~---~~		[[Category:Safety]]
	~~== Location of Emergency Equipment ==~~
	{\|
	~~\| '''Equipment''' \|\| '''Location'''~~
	\|-
	~~\| Emergency Showers \|\| Hallway niches on all floors at HCØ except the basement. Shower head in ceiling, tap handle in wooden panel above cabinets.~~
	\|-
	~~\| Cleanroom Showers \|\| Both cleanrooms.~~
	\|-
	~~\| Eyewash Bottles \|\| Cleanroom and all labs where chemicals are used.~~
	\|-
	~~\| Plumbed-in Eyewash Shower \|\| Common cleanroom corridor.~~
	\|-
	~~\| First Aid Kits \|\| Hallway niches closest to the elevator on the 2nd and 4th floors.~~
	\|-
	~~\| Defibrillators \|\| HCØ hallway ground floor.~~
	\|}

HF safety

Harry — Fri, 22 May 2026 13:08:42 GMT

Created page with "= Working with HF = Hydrofluoric acid (HF) is a highly hazardous chemical with unique properties that require strict safety protocols. This guide outlines the procedures for safe handling, spill response, and emergency actions when working with HF in the cleanroom. '''Warning''' HF can cause severe burns, tissue damage, and systemic toxicity. '''Always follow these guidelines.''' Watch our video on how to safely handle HF: 600px == Chemical..."

New page

= Working with HF =

Hydrofluoric acid (HF) is a highly hazardous chemical with unique properties that require strict safety protocols. This guide outlines the procedures for safe handling, spill response, and emergency actions when working with HF in the cleanroom.

'''Warning''' HF can cause severe burns, tissue damage, and systemic toxicity.
'''Always follow these guidelines.'''

Watch our video on how to safely handle HF:

[[File:HF_handling.mp4|600px]]

== Chemical and Toxicological Properties ==
=== Chemical Properties ===
{|
|-
| <div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
* Clear and colorless with a density like that of water.
* HF dissolves glass, attacks metals, and forms explosive hydrogen gas.
* '''Use and Storage: polyethylene, polypropylene, or Teflon'''
</div>
|}
=== Toxicological Properties ===
{|
|-
| <div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
* Fluoride ions cause soft tissue and bone damage by binding to calcium. Fluoride ions are both acutely and chronically toxic. Acute effects of HF exposure include extreme respiratory irritation, immediate and severe eye damage and [https://en.wikipedia.org/wiki/Pulmonary_edema pulmonary edema].
* '''Exposure Routes:''' '''Skin contact''' with HF is probably the most common route of exposure for laboratory personnel, although HF can also cause damage through '''eye contact''', '''inhalation''', or '''ingestion'''.
* '''Symptoms:''' May be delayed (up to 24 hours for dilute solutions).
* '''Fatality Risk:''' Concentrated HF burns can be fatal even with small exposure (2% body surface area).
* '''If you are exposed to hydrofluoric acid, seek medical attention immediately, even if you do not feel pain.'''

</div>
|}

== Operational Restrictions ==
{|
|-
| <div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
<span style="color:#ff0000"> '''No HF work outside working hours'''</span>
* '''Allowed hours:''' Monday to Friday, '''8:00–18:00''' (no weekends, no holidays).
* A '''cleanroom staff member must be available in the building''' during HF use.
* '''HF buddy requirement:''' An HF buddy must be present with the user at all times.
* '''Maximum concentration:''' Training covers working with concentrations up to '''10% HF'''.
</div>
|}

== Emergency Equipment ==
{| class="wikitable"
| '''Equipment''' || '''Location'''
|-
| Calcium Gluconate Gel || Next to the fumehood '''&''' 2nd floor corridor emergency shower
|-
| Emergency Shower || 2nd floor corridor
|-
| Large/Medium Spill Kits || Outside CR1
|-
| Sodium Bicarbonate Powder || In CR1
|}

==Additional Notes==
* '''User Comfort:''' Users may stop work at any time if they feel uncomfortable.
* '''CR Staff Support:''' CR staff are available to assist or take over in case of uncertainty or emergencies.
* '''Training:''' All users must be trained in HF handling and emergency procedures before working with HF.

== General Setup and Preparation ==
=== Before Starting ===
<div style="background-color: #c0c0c0; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
# Announce the start of HF work: ''“I am going to work with HF.”''
# Flip the door sign to indicate HF work is in progress.
# Find a buddy: '''Never work alone.'''
# Check:
## Waste container and HF supply.
## Availability of calcium gluconate gel and spill kit.
# Gown up:
<div style="background-color: #808080; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
# Regular cleanroom attire (hairnet, goggles, gown, clogs, nitrile gloves).
# Barrier gloves.
# Face shield: Optional.
# Sleeves: Optional.
</div>
''Note: Always check gloves for tears prior to use.''
</div>

=== Tools and Materials ===
* '''Tweezers:''' Users should use their own.
* '''Beakers:'''
** Polypropylene (PP) beakers: Available at the laminar flow bench.
** PTFE (Teflon) beakers: Purchased and used from your own group (not public).

=== Workstation Setup ===
{|
|-
| <div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
* Always carry out work in the dedicated HF tray
* Use 1 beaker for HF and 2 beakers for MQ water
* Do not use wipes inside the tray
* Label the beakers by writing directly on the tray with a permanent marker (use IPA to erase it later)
* Place cleanroom wipes between the HF tray and the bench airfoil, to prevent any spill outside of the tray from dripping outside the bench.
</div>
|}

[[File:HF_bench_setup.png|center|thumb|800px|Recommended Setup Inside the Fume Hood]]

== Standard Operating Procedure ==

<div style="background-color: #c0c0c0; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
# Pour MQ water in the dedicated beakers
# Announce in the room that you start handling HF (“Now I take HF from the cabinet”)
# Pour HF in the beaker
# Check that your gloves are dry (no liquid droplets)
## You should always assume that in case you see a droplet in your glove, it is HF and you should follow the procedure described later on [[S[p
# Return the HF bottle in the cabinet
# Run your process
# Once done, place the HF waste bottle inside the sink of the fumehood. You can use the funnel to dispose the liquids
# Pour the HF in the waste
# Pour the first MQ in the HF beaker and then dispose it in the waste
# Pour the second MQ in the HF beaker and then dispose it in the waste
# Check that your gloves are dry (no liquid droplets)
# Throw the beakers in the trash
# Return the HF waste bottle in the cabinet
# Announce the HF work is done (“I am done with HF”)
# Clean up the workspace
# Remove your barrier gloves inside the fumehood and dispose them in the chemical waste bin
# Remove the additional safety attire
</div>

== Waste Disposal ==
To ensure safety, users are requested to regularly check their safety equipment for potential sources of contamination.
{|
|-
| <div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
* '''HF Waste:''' Dispose in the '''designated HF waste container''' below the fume hood.
: '''Never exceed the fill line.''' New waste containers are found below the sink under the drying rack.
* '''Contaminated Materials:''' Gloves, wipes, or aprons exposed to HF must be treated as chemical waste.
</div>
|}

== Spill Protocols ==
=== Identifying Suspicious Droplets ===
{| class="wikitable"
| '''If you see a liquid drop on''' || '''Action Plan'''
|-
| Stainless steel airfoil || * Assume it is HF.
* Wipe once with a CR wipe.
* Wipe again with a water-soaked CR wipe and let it evaporate.
|-
| Barrier gloves || * Assume it is HF.
* Rinse gloves.
* Remove them by turning inside out (no wiping needed).
* Use a clean set of barrier gloves.
|-
| Apron || * Remove the apron and leave it '''inside the fume hood'''.
* Evacuate the area.
* CR staff flushes and disposes of the apron.
|}

=== Spill Inside the HF Tray ===
<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
'''The HF work stops until the spill is removed.'''
* Buddy checks in with the user and contacts a CR staff member.
* User may proceed with removing the spill '''only if comfortable'''; otherwise, contact CR staff to take over.
* Dispose of the contents of all beakers.
* The spilled HF inside the tray can be disposed of either with a pipette or by tilting the tray and pouring directly into the HF waste container.
* '''Do not use wipes.'''
* Carefully rinse the tray with water to dilute any HF residues.
* Dispose of the water in the HF waste container.
* Carefully rinse the tray with plenty of water inside the sink.
* Dry the tray with a cleanroom wipe.
* User disposes of their barrier gloves.
''It is recommended for the user to take a break and continue their work fresh later or another day''
</div>

=== Spill Outside the HF Tray ===
{|class="wikitable"
| '''Spill Location''' || '''User Actions'''
|-
| Outside the HF tray but inside the bench || * '''Do not take any action'''—leave the setup immediately.
* Buddy helps remove contaminated PPE (keep PPE within the fume hood).
* Buddy calls for help (if user is HF-free).
|-
| Outside the HF tray and outside the bench || * '''Do not take any action'''—'''evacuate CR1 immediately'''.
* Remove contaminated PPE '''outside CR1 door''' (in the hallway).
* Buddy calls for help (if user is HF-free).
|}

=== Splash on the User’s Body ===
'''In case of a splash on the user’s body, the user should immediately evacuate and use the shower in the corridor of the 2nd floor.'''

'''The user and their buddy should follow the action plan bellow'''
{|
|-
| <div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
'''HF User:'''
# Exit CR1.
# Remove contaminated clothes in the corridor.
# Exit the cleanroom area through the emergency door right across from CR1.
# Start using the shower in the corridor.
# Apply running water on the area of contact for at least 20 minutes.
# Apply calcium gluconate gel to the affected area after 20 minutes of rinsing.

'''HF Buddy:'''
# Keep a distance from the user.
# Assist user with escape route.
# Call for help.
# Support HF user while help is on the way.
</div>
|}

[[File:Emergency_shower.jpg|center|thumb|800px|Emergency Showers in the Hallway of the Second Floor]]

---
== Exposure Response ==
{|
|-
| <div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
Although HF exposures can result in injury, '''quick response will minimize the damage'''. All exposures should be treated immediately even if burns are not felt for hours. HF first aid (calcium gluconate gel) and spill response kits are located in the cleanroom, and users are obliged to familiarize themselves with their location and proper use.

'''Affected personnel must receive medical attention for all exposures.''' Any exposure to HF must be medically evaluated. Take a copy of these procedures and the MSDS to the emergency room.
</div>
|}

=== Skin Contact ===
# Immediately wash all affected areas with water.
# Remove any clothing or jewelry that could trap or retain HF (remove goggles last).
# Flush skin for 15 minutes or until medical attention is available.
# Get medical attention.
# Apply calcium gluconate gel to the affected area (use rubber gloves) every 15 minutes and repeat flushing in between.

=== Eye Contact ===
# Immediately flush eyes for at least 15 minutes with water while holding eyelids open.
# Remove contact lenses if applicable.
# Get medical attention.
# Flushing can be limited to 5 minutes if medical personnel are immediately available to administer sterile calcium gluconate (1%) solution (via continuous drip into eyes).

=== Inhalation ===
# Move to fresh air as soon as possible.
# Get medical attention.
# Medical personnel can administer pure oxygen and calcium gluconate (via nebulizer).

{|
|-
| <div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
'''Note: The threshold limit value (TLV) for HF is 2 PPM.'''
</div>
|}

---
== First Aid ==
{|
|-
| <div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
'''Four Principles of First Aid:'''
# Stop the accident.
# Preserve life.
# Summon assistance.
# Provide first aid.

If you call emergency services (112), '''send a colleague to the main entrance of the HCØ building to guide paramedics to the accident site'''.

'''Emergency Ward:''' Bispebjerg Skadestue, 23 Bispebjergbakke, 2400 Copenhagen NV.

'''Reporting:''' All accidents must be reported to one of the permanent NBI staff members.
</div>
|}

---
== Location of Emergency Equipment ==
{|
| '''Equipment''' || '''Location'''
|-
| Emergency Showers || Hallway niches on all floors at HCØ except the basement. Shower head in ceiling, tap handle in wooden panel above cabinets.
|-
| Cleanroom Showers || Both cleanrooms.
|-
| Eyewash Bottles || Cleanroom and all labs where chemicals are used.
|-
| Plumbed-in Eyewash Shower || Common cleanroom corridor.
|-
| First Aid Kits || Hallway niches closest to the elevator on the 2nd and 4th floors.
|-
| Defibrillators || HCØ hallway ground floor.
|}

Safety

Harry — Fri, 22 May 2026 12:21:19 GMT

Safety topics

← Older revision		Revision as of 12:21, 22 May 2026
Line 3:		Line 3:
	*[[Working with chemicals]]		*[[Working with chemicals]]
	*[[Working with HF\|Working with hydrofluoric acid]]		*[[Working with HF\|Working with hydrofluoric acid]]
			*[[HF safety\|HF safety]]
	*[[Working with nanowires and nanotubes]]		*[[Working with nanowires and nanotubes]]
	*[[Working in the cleanroom while pregnant]]		*[[Working in the cleanroom while pregnant]]