cleanroom - Recent changes [en-gb]

Philips TEM

Chenglee — Fri, 10 Apr 2026 16:54:10 GMT

← Older revision		Revision as of 16:54, 10 April 2026
(3 intermediate revisions by the same user not shown)
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	\|image = Talos F200i.jpg		\|image = Talos F200i.jpg
	\|toolfullname = Talos F200i S/TEM		\|toolfullname = Talos F200i S/TEM
	\|website = https://www.thermofisher.com~~/dk~~		\|website = https://www.thermofisher.com
	\|company = ~~Philips Electron Optics BV~~		\|company = Thermo Fisher Scientific
	\|description = Electron microscope		\|description = Electron microscope
	\|primary = Martin		\|primary = Martin
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	[[Category:Tools]]		[[Category:Tools]]
	[[Category:Characterization]]		[[Category:Characterization]]

			Thermo Fisher Scientific Talos F200i S/TEM is a versatile 200-kV field-emission (scanning) transmission electron microscope designed for high-throughput, high resolution materials characterization in multi-user research environments.

			Combining TEM and STEM imaging modes, it enables sub-nanometer structural and chemical analysis, including advanced techniques such as EDS mapping, diffraction and 4D-STEM.

			The facility additionally provides focused (Ga) ion beam (FIB) capabilities for site-specific sample preparation, enabling precise lamella fabrication and cross-sectioning to support advanced S/TEM workflows.

			'''💡Questions?'''

			For more information, kindly contact NBI-Cleanroom staff.

Training

Shiv — Fri, 10 Apr 2026 16:25:35 GMT

Bruker Dimension Icon Atomic Force Microscope (AFM)

← Older revision		Revision as of 16:25, 10 April 2026
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	=== Elionix 7000 (100 kV) ===		=== Elionix 7000 (100 kV) ===
	~~Contact Harry (cleanroom@nbi.ku.dk) to request training~~
	Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.		Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.

			Contact Harry (cleanroom@nbi.ku.dk) to request training.
	<div class="mw-collapsible mw-collapsed" style="border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">		<div class="mw-collapsible mw-collapsed" style="border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">
	<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>		<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>
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	=== Bruker Dimension Icon Atomic Force Microscope (AFM) ===		=== Bruker Dimension Icon Atomic Force Microscope (AFM) ===
	~~Have a sample ready and a clear characterization goal before~~ requesting AFM training.		Contact Nikki (cleanroom[at]nbi[dot]ku.dk) requesting AFM training.
	<div class="mw-collapsible mw-collapsed" style="border:1px solid #c9ddf8; border-left:6px solid #3366cc; background:#f5f9ff; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">		<div class="mw-collapsible mw-collapsed" style="border:1px solid #c9ddf8; border-left:6px solid #3366cc; background:#f5f9ff; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">
	<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>		<div class="mw-collapsible-toggle" style="text-align:right; margin:-0.62em 0 0.25em; line-height:1;">'''Expand'''</div>

File:Talos F200i.jpg

Chenglee — Fri, 10 Apr 2026 16:22:36 GMT

Chenglee uploaded File:Talos F200i.jpg

New page

Training

Shiv — Fri, 10 Apr 2026 16:22:20 GMT

Elionix 7000 (100 kV)

← Older revision		Revision as of 16:22, 10 April 2026
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	=== Elionix 7000 (100 kV) ===		=== Elionix 7000 (100 kV) ===
			Contact Harry (cleanroom@nbi.ku.dk) to request training
	Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.		Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.
	<div class="mw-collapsible mw-collapsed" style="border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">		<div class="mw-collapsible mw-collapsed" style="border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;">

Philips TEM

Chenglee — Fri, 10 Apr 2026 16:21:50 GMT

← Older revision		Revision as of 16:21, 10 April 2026
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	{{Infobox tool		{{Infobox tool
	\|image = ~~Tool_Philips_TEM~~.jpg		\|image = Talos F200i.jpg
	\|toolfullname = ~~Philips CM20~~ TEM		\|toolfullname = Talos F200i S/TEM
	\|website = https://www.~~fei~~.com/		\|website = https://www.thermofisher.com/dk
	\|company = Philips Electron Optics BV		\|company = Philips Electron Optics BV
	\|description = ~~Transmission electron~~ microscope		\|description = Electron microscope
	\|primary = ~~Thomas~~		\|primary = Martin
			\|secondary = Nikki
	}}		}}

	[[Category:Tools]]		[[Category:Tools]]
	[[Category:Characterization]]		[[Category:Characterization]]

File:Tool Philips TEM.jpg

Chenglee — Fri, 10 Apr 2026 16:17:25 GMT

Chenglee uploaded a new version of File:Tool Philips TEM.jpg

New page

Training

Shiv — Fri, 10 Apr 2026 16:08:34 GMT

Show changes

Recommended parameters for EBL

Harry — Thu, 09 Apr 2026 08:45:22 GMT

Cleanroom recommendations

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	= Cleanroom recommendations=		= Cleanroom recommendations=

			''This section needs additional data''

	{\| class="wikitable"		{\| class="wikitable"
	\|+[[Elionix F-125\|125 kV]]		\|+[[Elionix F-125\|125 kV]]

Fabrication

Harry — Thu, 09 Apr 2026 08:42:06 GMT

EBL and GenISys software

← Older revision		Revision as of 08:42, 9 April 2026
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	[[Booking Calendar]]		[[Booking Calendar]]

	=~~EBL and GenISys software~~=		=Electron Beam Lithography=

	[[Recommended parameters for EBL]]		[[Recommended parameters for EBL]]

Recommended parameters for EBL

Harry — Thu, 09 Apr 2026 08:40:33 GMT

How to choose the correct parameters yourself

Show changes

Recommended parameters for EBL

Harry — Thu, 09 Apr 2026 08:12:24 GMT

Created page with "= Cleanroom recommendations= {| class="wikitable" |+125 kV |- |Resist |Si |InAsUC |InPUC |GaAsUC |SiGe |- |A2 |1000 |700 |? |? |? |- |A4 |1200-1300 <ref name="Kringhoej" /> |700 |900 <ref name="Hertel" /> |630 |? |- |A6 |1200 |800 |900-920 <ref name="Hertel" /> |760 |? |- |EL6 |? |? |? |? |? |- |EL9 |450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_P..."

New page

= Cleanroom recommendations=
{| class="wikitable"
|+[[Elionix F-125|125 kV]]
|-
|[[Resists|Resist]]
|Si
|InAsUC
|InPUC
|GaAsUC
|SiGe
|-
|A2
|1000
|700
|?
|?
|?
|-
|A4
|1200-1300 <ref name="Kringhoej" />
|700
|900 <ref name="Hertel" />
|630
|?
|-
|A6
|1200
|800
|900-920 <ref name="Hertel" />
|760
|?
|-
|EL6
|?
|?
|?
|?
|?
|-
|EL9
|450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_PhD.pdf Kringhøj PhD thesis]</ref>
|?
|280 <ref name="Hertel" />
|420
|?
|-
|CSAR4
|430
|?
|?
|?
|?
|-
|CSAR9
|500 <ref name="Kringhoej" />
|?
|?
|?
|?
|-
|CSAR13
|430 <ref name="Kringhoej" />
|?
|?
|350
|?
|-
|50k+A4
|?
|?
|500 <ref name="Hertel" />
|745
|?
|-
|}

{| class="wikitable"
|+[[Elionix 7000|100 kV]]
|-
|[[Resists|Resist]]
|Si
|InAsUC
|InPUC
|GaAsUC
|SiGe
|-
|A2
|900
|?
|620 <ref name="Drachmann" />
|?
|1500-1600 <ref name="Ansaloni" />
|-
|A4
|900
|640-680 <ref name="Whiticar">[https://nbi.ku.dk/english/theses/phd-theses/alexander-m-whiticar/Whiticar_thesis.pdf Whiticar PhD thesis]</ref>
|608-640 <ref name="Drachmann">[https://nbi.ku.dk/english/theses/phd-theses/asbjorn-cliff-drachmann/Drachmann_PhD_Thesis.pdf/Drachmann_PhD_Thesis.pdf Drachmann PhD thesis]</ref>
|630
|900 <ref name="Ansaloni">[https://nbi.ku.dk/english/theses/phd-theses/fabio-ansaloni/thesis_Ansaloni.pdf Ansaloni PhD thesis]</ref>
|-
|A6
|1000
|?
|?
|670
|?
|-
|EL6
|?
|?
|?
|?
|?
|-
|EL9
|?
|250
|380 <ref name="Hertel">[https://nbi.ku.dk/english/theses/phd-theses/hertel/dissertation_Hertel.pdf Hertel PhD thesis]</ref>
|200 <ref name="Drachmann" />
|?
|-
|CSAR4
|400
|?
|?
|?
|335 <ref name="Ansaloni" />
|-
|CSAR9
|?
|?
|?
|?
|335 <ref name="Ansaloni" />
|-
|CSAR13
|?
|?
|?
|?
|?
|-
|50k+A4
|?
|?
|?
|630
|?
|-
|}

= How to choose the correct parameters yourself =

A good place to start is the [https://sid.erda.dk/share_redirect/HUEfw6ttjf/index.html Unofficial dose calculator]

* Choose the EBL tool ('''100''' or '''125''' keV)
* '''Write field size (µm)''' and '''Dots''': The combination of these two will give you the pixel size for a default pitch of 1.
** It is recommended to use high number of dots with a pitch multiplier for fine exposures
* '''Aperture''' and '''Beam current''': The combination of these two will give you the beam spot size

<blockquote style="background-color: #F0F0F0; border: dashed thin grey;">
The '''pixel size''' should be equal to the '''beam spot size'''
</blockquote>

* '''Area dose''': The recommended dose for the combination of substrate and resist stack that you have. If you don't know this value you can do a dose test for your substrate/resist combination or consult the [[Doses]] page

Fabrication

Harry — Thu, 09 Apr 2026 07:53:18 GMT

@@ Line 11: / Line 11: @@
 [[Booking Calendar]]
 =Lithography=
@@ Line 28: / Line 40: @@
 [[Ga removal from backside of GaAs wafers]]
 =Processing your sample=
@@ Line 43: / Line 48: @@
 [[Category:Fabrication]]

Remote access and N-Drive

Harry — Wed, 08 Apr 2026 13:05:46 GMT

Created page with "= Requests for N-drive and remote access = All the requests are handled via the KUIT webpage. Log in with your credentials at the following webpage [https://identity.ku.dk identity.ku.dk]. * Click on <code> Manage user access</code> * <code> Select Users</code> : find your name and click next * Search: ** <code>SGT-FORSK_S4_NBI_CLEANROOM-USER</code> for remote access ** <code>N-SCI-NBI-Cleanroom-W</code> for N-Drive access : ''if you cannot see one of the above options..."

New page

= Requests for N-drive and remote access =
All the requests are handled via the KUIT webpage. Log in with your credentials at the following webpage [https://identity.ku.dk identity.ku.dk].
* Click on <code> Manage user access</code>
* <code> Select Users</code> : find your name and click next
* Search:
** <code>SGT-FORSK_S4_NBI_CLEANROOM-USER</code> for remote access
** <code>N-SCI-NBI-Cleanroom-W</code> for N-Drive access
: ''if you cannot see one of the above options please contact your local administration and request to be added to the group.''
* Select the service that you would like to get access
* <code> Review and Submit</code>: Press submit
* One of the cleanroom administrators will approve your request.

= Mount N-drive to your PC=
To mount the Cleanroom N-drive on your own (non-KU) computer, map the following network drive

'''NB: You need to be on a wired KU network (ethernet connection) or connected to AnyConnect VPN: '''
* Windows: <code>\\unicph.domain\groupdir\SCI-NBI-Cleanroom </code>
* Mac: <code>smb://unicph.domain/groupdir/SCI-NBI-Cleanroom</code>
**User name: unicph\”your KU username”
**Password: “your KU password”

=Remote control of the lab computers=
* Log in to AnyConnect VPN
* Open VNC viewer
* Add the desired connection
* Connect

Cleanroom computers

Harry — Wed, 08 Apr 2026 12:57:16 GMT

Created page with "There is a number of PCs connected to cleanroom tools. Cleanroom staff is responsible for those. They are used to control fabrication related systems and/or transfer data between them and N-drive. Do not use flash drives or other removable media."

New page

There is a number of PCs connected to cleanroom tools.

Cleanroom staff is responsible for those.

They are used to control fabrication related systems and/or transfer data between them and N-drive.

Do not use flash drives or other removable media.

Fabrication

Harry — Wed, 08 Apr 2026 12:55:38 GMT

Computers and software

← Older revision		Revision as of 12:55, 8 April 2026
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	__NOTOC__		__NOTOC__
	=Computers and software=		=Computers and software=

			[[Remote access and N-Drive]]

			[[Cleanroom computers]]

	[[Design computers]]		[[Design computers]]

	[[Design software]]		[[Design software]]

	~~[[Cleanroom PCs]]~~

	[[Booking Calendar]]		[[Booking Calendar]]

Design computers

Harry — Wed, 08 Apr 2026 12:53:38 GMT

Design PCs

← Older revision		Revision as of 12:53, 8 April 2026
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	~~= Design PCs =~~

	There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8.		There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8.

Design computers

Harry — Wed, 08 Apr 2026 12:53:30 GMT

Created page with "= Design PCs = There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8. They are located in '''321'''. Please be mindful that a lot of other people want to use them. Booking is '''mandatory''' on the Booking Calendar, schedule ''3rd Design'', regardless of whether the work is performed locally or remotely. Clean up after yourself -- do not leave windows open and programs ru..."

New page

= Design PCs =

There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8.

They are located in '''321'''.

Please be mindful that a lot of other people want to use them. Booking is '''mandatory''' on the [[Booking Calendar]], schedule ''3rd Design'', regardless of whether the work is performed locally or remotely.

Clean up after yourself -- do not leave windows open and programs running once you are done.

Do not use flash drives or other removable media - use N-Drive instead.

Fabrication

Harry — Wed, 08 Apr 2026 12:53:21 GMT

Computers and software

← Older revision		Revision as of 12:53, 8 April 2026
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	__NOTOC__		__NOTOC__
	=Computers and software=		=Computers and software=

			[[Design computers]]

	[[Design software]]		[[Design software]]

Design software

Harry — Wed, 08 Apr 2026 12:49:42 GMT

← Older revision		Revision as of 12:49, 8 April 2026
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	There ~~is a number of~~ common computers at QDev/NBI cleanroom ~~for shared use~~.		= Design PCs =
			There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8.

			They are located in '''321'''.

	Please be mindful that a lot of other people want to use them. So, ~~always book before starting to use a PC~~.		Please be mindful that a lot of other people want to use them. Booking is '''mandatory''' on the [[Booking Calendar]], schedule ''3rd Design'', regardless of whether the work is performed locally or remotely.

	Clean up after yourself -- do not leave windows open and programs running once you are done.		Clean up after yourself -- do not leave windows open and programs running once you are done.

	Do not use flash drives or other removable media.		Do not use flash drives or other removable media - use N-Drive instead.
	~~Use~~ N-Drive instead.

	~~= Design PCs =~~
	~~There are 4 PCs dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8.~~

	~~They are located in 321.~~

	~~They have N-Drive access.~~

	~~= Booking rules =~~
	~~Booking is '''mandatory''' on the [[Booking Calendar]], schedule ''3rd Design'', regardless of whether the work is performed locally or remotely~~.

	= CAD software =		= CAD software =

Main Page

Harry — Tue, 24 Mar 2026 16:34:38 GMT

Current tool status

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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Heidelberg µPG 501\|Heidelberg LED writer]]		\| style="text-align:right; padding-right:6px;" \| [[Heidelberg µPG 501\|Heidelberg LED writer]]
	\| style="background-color: #~~FFBF00~~" \| ~~Cooling circulation pump will be replaced in week 11. The tool is available in the meantime.~~		\| style="background-color: #c6e0b4" \| All good!
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Raith eLine\|Raith eLine 30 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Raith eLine\|Raith eLine 30 kV]]
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Elionix_7000\|Elionix 7000 100 kV]]
	\| style="background-color: #ff9f9f" \| Maintenance: Gun exchange. expected date: Fri 13 Mar 2026		\| style="background-color: #ff9f9f" \| Maintenance: Gun exchange. expected date: Fri 27 Mar 2026
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Elionix_F-125\|Elionix F-125 125 kV]]		\| style="text-align:right; padding-right:6px;" \| [[Elionix_F-125\|Elionix F-125 125 kV]]
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA2]]		\| style="text-align:right; padding-right:6px;" \| [[AJA systems\|AJA2]]
	\| style="background-color: #~~FFBF00~~" \| ~~Concern about the deposition uniformity: Will be checked on Monday 9 of March~~		\| style="background-color: #c6e0b4" \| All good!
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Plassys Evaporator]]		\| style="text-align:right; padding-right:6px;" \| [[Plassys Evaporator]]
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[Cambridge ALD\|ALD2]]		\| style="text-align:right; padding-right:6px;" \| [[Cambridge ALD\|ALD2]]
	\| style="background-color: #~~FFBF00~~" \| ~~Concern about the vacuum. Will be checked on week 12~~		\| style="background-color: #c6e0b4" \| All good!
	\|-		\|-
	\| style="padding-bottom:6px;" \|		\| style="padding-bottom:6px;" \|

Etching

Harry — Tue, 24 Mar 2026 09:48:57 GMT

etching ALD HfOx

← Older revision		Revision as of 09:48, 24 March 2026
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	[[File:MIF_etch.jpg\|750px]]		[[File:MIF_etch.jpg\|750px]]

			== Etch rate with BHF ==
			===etching ALD HfOx===
			Blank Si samples with HfOx grown locally by ALD.
			The sample was etched for 2 mins and the film was measured by ellipsometry. Then, repeated the etch 3 times.

			{\| class="wikitable"
			\|-
			\| Time [minutes]
			\| 0
			\| 2
			\| 4
			\| 6
			\|-
			\| h [nm]
			\| 21.53
			\| 17.18
			\| 12.18
			\| 7.55
			\|}

	=Dry etching=		=Dry etching=

Safety

Martin — Fri, 20 Mar 2026 14:06:02 GMT

← Older revision		Revision as of 14:06, 20 March 2026
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	During the training, you will be introduced to the cleanroom, external labs, safety precautions, emergency protocols and chemical processes. A [https://wiki.nbi.ku.dk/w/cleanroom/images/8/82/Detailed_introduction_schedule.pdf detailed schedule] is used as a guide for the training.		During the training, you will be introduced to the cleanroom, external labs, safety precautions, emergency protocols and chemical processes. A [https://wiki.nbi.ku.dk/w/cleanroom/images/8/82/Detailed_introduction_schedule.pdf detailed schedule] is used as a guide for the training.
	* [https://wiki.nbi.ku.dk/w/cleanroom/images/9/9e/Topics_covered_during_Cleanroom_safety_training.pdf List of Topics covered during Cleanroom use and safety training - PDF]		* [https://wiki.nbi.ku.dk/w/cleanroom/images/9/9e/Topics_covered_during_Cleanroom_safety_training.pdf List of Topics covered during Cleanroom use and safety training - PDF]

			During the sign-up process, you must name a mentor/superuser (preferably from your group) who can assist you in the first few weeks after your safety/introduction training. The mentor should teach you the standard processes used in the group until you are both comfortable that you can work independently.
			When the mentor has assessed that you are ready to work independently, they must inform the cleanroom team and '''only then will you get full access to cleanroom labs'''.

	==Preparation==		==Preparation==