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Chenglee — Fri, 09 Oct 2026 09:01:36 GMT

Current Tool Status

← Older revision		Revision as of 09:01, 9 October 2026
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	==Current Tool Status==		==Current Tool Status==

	''List updated: Monday ~~7 September~~ 2026''		''List updated: Monday 9 October 2026''

	{\| cellspacing=0px style="text-align: left;"		{\| cellspacing=0px style="text-align: left;"
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	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F]]		\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F]]
	\| style="background-color: #ff9f9f" \| Service: ~~Unable~~ to ~~maintain chamber pressure~~. Expected recovery date: ~~Until further notice~~.		\| style="background-color: #ff9f9f" \| Service: Awaiting parts to be delivered and resume repair service. EDS is unavailable until further notice. Expected recovery date for SEM: Week 43 (from 19 October).
	\|-		\|-
	\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F prime]]		\| style="text-align:right; padding-right:6px;" \| [[JEOL 7800F\|JEOL JSM-7800F prime]]

Harry — Tue, 06 Oct 2026 09:07:07 GMT

System pre-checks

← Older revision		Revision as of 09:07, 6 October 2026
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	<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">		<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
	* Check the cryo-pump monitor. It should be between '''12-17 K'''. If it's higher than 20 K, grab a tool responsible or a technical staff member.		* Check the cryo-pump monitor. It should be between '''12-17 K'''. If it's higher than 20 K, grab a tool responsible or a technical staff member.
	* Check that the turbo frequency is '''1500 Hz'''. The turbo pumps on the load lock.
	* Check that the pressure in the main chamber (ion gauge sensor) is '''<1x10<sup>-7</sup> Torr'''.		* Check that the pressure in the main chamber (ion gauge sensor) is '''<1x10<sup>-7</sup> Torr'''.
	*:'''Log this value.'''		*:'''Log this value.'''

Harry — Mon, 05 Oct 2026 14:31:05 GMT

Dry etching

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 For dry etching, you can use [[AJA systems]] or [[Plassys Evaporator]]. AJA1 and Plassys have an Ion gun for DC Kaufman milling, and in AJA2 you can do RF milling.
 ==Erch rate with AJA1==
 Based on the logs, from Jan 2023 the tool has been used with the following conditions:
 * Volts: 100, 200, 220, 300, 600, 800 V
 * Pressure:  1, 1.1, 0.4, 0.5 mTorr
 * Argon flow: 15 sccm
-* 5 mins discharge & 2 mins warm up
+* Discharge: 5 mins
+* Warm up: 2 mins
+===Erch rates October 2026===
 * Angle: 90 degree tilt , i.e. head on.
-* Milling duration: 2 minutes warm-up followed by 4 minutes milling.
+* Argon flow: 15 sccm
 === Kaufmann settings ===
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 * Neutralizer Amps = 11.0
-=== Gold ===
+===October 2026===
 {| class="wikitable"
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 [[File:AJA1_Au.jpg|500px]]
-=== Aluminum ===
+==== Aluminum ====
 {| class="wikitable"