AJA systems

Harry — Tue, 06 Oct 2026 09:07:07 GMT

System pre-checks

← Older revision		Revision as of 09:07, 6 October 2026
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	* Check the cryo-pump monitor. It should be between '''12-17 K'''. If it's higher than 20 K, grab a tool responsible or a technical staff member.		* Check the cryo-pump monitor. It should be between '''12-17 K'''. If it's higher than 20 K, grab a tool responsible or a technical staff member.
	* Check that the turbo frequency is '''1500 Hz'''. The turbo pumps on the load lock.
	* Check that the pressure in the main chamber (ion gauge sensor) is '''<1x10<sup>-7</sup> Torr'''.		* Check that the pressure in the main chamber (ion gauge sensor) is '''<1x10<sup>-7</sup> Torr'''.
	*:'''Log this value.'''		*:'''Log this value.'''

Etching

Harry — Mon, 05 Oct 2026 14:31:05 GMT

Dry etching

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 For dry etching, you can use [[AJA systems]] or [[Plassys Evaporator]]. AJA1 and Plassys have an Ion gun for DC Kaufman milling, and in AJA2 you can do RF milling.
 ==Erch rate with AJA1==
-* Argon flow: 15 sccm.
-* pressure:  1 mTorr.
+Based on the logs, from Jan 2023 the tool has been used with the following conditions:
 * Angle: 90 degree tilt , i.e. head on.
-* Milling duration: 2 minutes warm-up followed by 4 minutes milling.
+* Argon flow: 15 sccm
 === Kaufmann settings ===
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 * Neutralizer Amps = 11.0
-=== Gold ===
+===October 2026===
 {| class="wikitable"
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 [[File:AJA1_Au.jpg|500px]]
-=== Aluminum ===
+==== Aluminum ====
 {| class="wikitable"
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 [[File:AJA1_Al.jpg|500px]]
 ==Erch rate with AJA2==
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 {| class="wikitable"
-|+ PECVD SiOx on Si (001)
+|+ PECVD SiOx on Si (001) - Au holder
 |-
 ! Power!! Pressure !! Flow !! Time !! &Delta;h