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	<id>https://wiki.nbi.ku.dk/w/cleanroom/api.php?action=feedcontributions&amp;feedformat=atom&amp;user=Chenglee</id>
	<title>cleanroom - User contributions [en-gb]</title>
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	<updated>2026-04-20T10:53:15Z</updated>
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		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Training&amp;diff=2795</id>
		<title>Training</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Training&amp;diff=2795"/>
		<updated>2026-04-17T09:59:18Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom [[Tools|tools]] is that a [[About|cleanroom staff]] member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the prerequisites below and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk]. &lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. &lt;br /&gt;
However, after a certain period of inactivity (typically 90 days) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Cleanroom General Introduction ==&lt;br /&gt;
&lt;br /&gt;
=== Cleanroom general introduction ===&lt;br /&gt;
Request cleanroom introduction training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Name a superuser from your group who will follow you in the cleanroom 2-3 times after your training.&lt;br /&gt;
* Introduction training requires acceptance from all of you and typically runs from 9.30 to 15.00.&lt;br /&gt;
* Before training, read the safety information: https://wiki.nbi.ku.dk/cleanroom/Safety&lt;br /&gt;
* Typical schedule:&lt;br /&gt;
** 9.15-10.30: Cleanroom introduction&lt;br /&gt;
** Coffee break&lt;br /&gt;
** 10.45-12.00: Asher, spinners, and optical microscopes&lt;br /&gt;
** Lunch break&lt;br /&gt;
** 13.00-14.00: Practical information inside and outside the lab&lt;br /&gt;
** 14.00-15.00: Q&amp;amp;A and account setup&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Lithography ==&lt;br /&gt;
&lt;br /&gt;
=== Elionix 7000 (100 kV) ===&lt;br /&gt;
Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.&lt;br /&gt;
&lt;br /&gt;
Contact Harry (cleanroom@nbi.ku.dk) to request training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
==== Prerequisites ====&lt;br /&gt;
* You must be at least a Master student or signed up for a long term (&amp;gt;6 months) project to be allowed to use the tool.&lt;br /&gt;
* Elionix is a high level tool. Make sure you are already trained to:&lt;br /&gt;
** Enter the cleanroom&lt;br /&gt;
** Use the microscope, spinner, asher&lt;br /&gt;
&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 4 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 1 hr.) - teaches you how to load/unload the sample and how to condition the beam.&lt;br /&gt;
** Session 2 ( 3 hr.) - involves exposing alignment marks and test patterns (any design: preferably one half of the overlay ,so to understand alignment later ).&lt;br /&gt;
** Session 3 ( 3 hr.) -  involves using the exposed alignment marks for marker registration and exposing the 2nd pattern (i.e. the 2nd half of the overlay pattern).&lt;br /&gt;
** Session 4 involves exposing a &amp;quot;real&amp;quot; pattern on a &amp;quot;real&amp;quot; chip on your own to gain access.&lt;br /&gt;
&lt;br /&gt;
==== Preparation ====&lt;br /&gt;
Before any training slots are booked on the tool you&#039;ll need all of the following prepared:&lt;br /&gt;
* Shadow senior users on the tool 2-3 times.&lt;br /&gt;
* Chip (comfortable to handle) spin coated with resist. This chip will be used for sessions 1 &amp;amp; 2. Please be aware of the coating and baking parameters for the resist.&lt;br /&gt;
* Any test design is preferred which has marks, overlay patterns that you will use to test alignment precision between two lithography steps. A Vernier pattern is commonly used. Feel free to test your ideas. Make sure you have something for both &#039;&#039;x&#039;&#039; and &#039;&#039;y&#039;&#039; directions. If you don&#039;t know how to start, check the [[Design template for EBL]].&lt;br /&gt;
* Convert your design files into the Elionix exposure format .co7. This can be done using Beamer in 4th floor design computers.&lt;br /&gt;
* Make sure all write fields are entirely in the positive coordinate space.&lt;br /&gt;
* Make sure neither exposure will take longer than 60 minutes at 500 pA current and dose of 1000 uC/cm2.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Elionix F-125 (125 kV at QuanTech) ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for Elionix F-125.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Heidelberg upg501 ===&lt;br /&gt;
Prepare your design file and coated chip before requesting Heidelberg upg501 training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Have a design file ready. GDS, DXF or CIF format works fine. Make sure you are familiar with the design before your actual session.&lt;br /&gt;
* Have a chip spin coated with an appropriate photoresist before the training session.&lt;br /&gt;
** The photoresist is sensitive to white light. Use the yellow filter on the microscopes. The light source in the both scribers is white and will already expose your resist.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video and read the standard operating procedure on the [[Heidelberg µPG 501|Heidelberg µPG 501 tool page]], shadow the tool with your group members, and ask for a sign-off session.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Characterization ==&lt;br /&gt;
&lt;br /&gt;
=== Bruker Dimension Icon Atomic Force Microscope (AFM) ===&lt;br /&gt;
Contact NBI-CR staff ([mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk]) to request for AFM training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #c9ddf8; border-left:6px solid #3366cc; background:#f5f9ff; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Have a sample ready that you want to characterize. Think about what you want to learn about the sample: step height, roughness, etc.&lt;br /&gt;
* Only request for training if you plan on using the tool regularly.&lt;br /&gt;
* Training is usually 2-3 sessions of 2-hour per session.&lt;br /&gt;
* Staff can also carry out user projects, subject to availability and timeframe.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== JEOL 7800-F ===&lt;br /&gt;
Prepare a real sample and imaging goals before booking JEOL 7800-F training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Training is usually 2-3 sessions of 2-hour per session.&lt;br /&gt;
* You need a chip/sample to be imaged before a session is booked. &lt;br /&gt;
* Be familiar with the materials on the sample to be imaged and what feature is it that is of critical interest -- something that makes or breaks your device.&lt;br /&gt;
* Request the training session only once you have gathered the chips and information. &lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== JEOL 7800-F prime (QuanTech) ===&lt;br /&gt;
Prepare a real sample and imaging goals before booking JEOL 7800-F Prime training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Training takes about 2-3 sessions.&lt;br /&gt;
* You need a chip/sample to be imaged before a session is booked.&lt;br /&gt;
* Be familiar with the materials on the sample to be imaged and what feature is it that is of critical interest -- something that makes or breaks your device.&lt;br /&gt;
* Request the training session only once you have gathered the chips and information.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Raith e-Line ===&lt;br /&gt;
Bring a prepared design package for sessions 1 and 2, including alignment and overlay test patterns.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* A design (gds, dxf, cif) for sessions 1 &amp;amp; 2 with:&lt;br /&gt;
** 4 alignment crosses (find out what marks work on the tool from your sub-group).&lt;br /&gt;
** Something to break the symmetry so you can tell chip orientation with your bare eye.&lt;br /&gt;
** A pattern that you will use to test overlay (alignment between two lithography steps). A Vernier pattern is commonly used. Feel free to test your ideas.&lt;br /&gt;
** Something creative, somethin fun :) This is an exercise in learning CAD as well.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Woollam alpha-SE Ellipsometer ===&lt;br /&gt;
Request Woollam alpha-SE Ellipsometer training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Filmetrics reflectometer ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for the Filmetrics reflectometer.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Thin Film Deposition ==&lt;br /&gt;
&lt;br /&gt;
=== PLASSYS Evaporator ===&lt;br /&gt;
Email your PLASSYS request with shadowing, sample, and process parameters.&lt;br /&gt;
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&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Specify the required process parameters( material,  thickness, tilt etc)&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 2 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 2 hr.) - teaches you how to load/unload the sample and how to run a recipe. &lt;br /&gt;
** Session 2 ( 2 hr.) - sign off session&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== AJA metallization, sputtering or ion milling ===&lt;br /&gt;
Email your training request with shadowing, sample, tool, process, and recipe details for AJA.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use: AJA1 or AJA2?&lt;br /&gt;
* What process do you want to run ?&lt;br /&gt;
* Either the recipe name or specify the required process parameters.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video on how to load/unload and read the standard operating procedures on the [[AJA Systems|AJA Systems tool page]]&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 2 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 2 hr.) - teaches you how to load/unload the sample and how to run a recipe. &lt;br /&gt;
** Session 2 ( 2 hr.) - sign off session&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== ALD 1 ===&lt;br /&gt;
Email your ALD 1 request with shadowing, sample, and full process details.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use.&lt;br /&gt;
* What process steps you want to run.&lt;br /&gt;
** Either the recipe name or all required process parameters.&lt;br /&gt;
** How long does the process take.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video(s) and read the standard operating procedure on the [[Cambridge ALD|ALD tool page]].&lt;br /&gt;
&lt;br /&gt;
=== AJA metallization, sputtering or ion milling ===&lt;br /&gt;
&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== ALD 2 ===&lt;br /&gt;
Email your ALD 2 request with shadowing, sample, and full process details.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
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&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use.&lt;br /&gt;
* What process steps you want to run.&lt;br /&gt;
** Either the recipe name or all required process parameters.&lt;br /&gt;
** How long does the process take.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video(s) and read the standard operating procedure on the [[Cambridge ALD|ALD tool page]].&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Packaging ==&lt;br /&gt;
&lt;br /&gt;
=== F&amp;amp;S autobonder ===&lt;br /&gt;
Prepare shadowing and bonding documentation, then request F&amp;amp;S autobonder training.&lt;br /&gt;
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&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
&lt;br /&gt;
* Shadow colleagues using the tool 2-3 times. &lt;br /&gt;
* You must have a &#039;&#039;&#039;chip&#039;&#039;&#039; for bonding.&lt;br /&gt;
* You must know which &#039;&#039;&#039;daughterboard&#039;&#039;&#039; you will use for bonding.&lt;br /&gt;
* You must know what material you use to &#039;&#039;&#039;mount&#039;&#039;&#039; the chip to the daughterboard (silver paint, PMMA or whatever is specific to your measurement).&lt;br /&gt;
* You must prepare a &#039;&#039;&#039;bonding schematic&#039;&#039;&#039; and have one of your team members verify that it is correct.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
* Read through the wiki page: https://wiki.nbi.ku.dk/cleanroom/FS_bonder  &lt;br /&gt;
* Request a training session at this point.&lt;br /&gt;
&lt;br /&gt;
Two training sessions are required to get access to the bonder:&lt;br /&gt;
&lt;br /&gt;
# 3 hours: Basic bonder training and chip bonding&lt;br /&gt;
# 2 hours: Sign-off session&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Manual bonder ===&lt;br /&gt;
Request manual bonder training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
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&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Miscellaneous ==&lt;br /&gt;
&lt;br /&gt;
=== Micromanipulator ===&lt;br /&gt;
Complete group-level training first, then request a micromanipulator sign-off session.&lt;br /&gt;
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&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please get trained within your research group first. Then request a sign-off session.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Training&amp;diff=2777</id>
		<title>Training</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Training&amp;diff=2777"/>
		<updated>2026-04-13T11:11:03Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom [[Tools|tools]] is that a [[About|cleanroom staff]] member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the prerequisites below and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk]. &lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. &lt;br /&gt;
However, after a certain period of inactivity (typically 90 days) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Cleanroom General Introduction ==&lt;br /&gt;
&lt;br /&gt;
=== Cleanroom general introduction ===&lt;br /&gt;
Request cleanroom introduction training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
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* Name a superuser from your group who will follow you in the cleanroom 2-3 times after your training.&lt;br /&gt;
* Introduction training requires acceptance from all of you and typically runs from 9.30 to 15.00.&lt;br /&gt;
* Before training, read the safety information: https://wiki.nbi.ku.dk/cleanroom/Safety&lt;br /&gt;
* Typical schedule:&lt;br /&gt;
** 9.15-10.30: Cleanroom introduction&lt;br /&gt;
** Coffee break&lt;br /&gt;
** 10.45-12.00: Asher, spinners, and optical microscopes&lt;br /&gt;
** Lunch break&lt;br /&gt;
** 13.00-14.00: Practical information inside and outside the lab&lt;br /&gt;
** 14.00-15.00: Q&amp;amp;A and account setup&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Lithography ==&lt;br /&gt;
&lt;br /&gt;
=== Elionix 7000 (100 kV) ===&lt;br /&gt;
Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.&lt;br /&gt;
&lt;br /&gt;
Contact Harry (cleanroom@nbi.ku.dk) to request training.&lt;br /&gt;
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==== Prerequisites ====&lt;br /&gt;
* You must be at least a Master student or signed up for a long term (&amp;gt;6 months) project to be allowed to use the tool.&lt;br /&gt;
* Elionix is a high level tool. Make sure you are already trained to:&lt;br /&gt;
** Enter the cleanroom&lt;br /&gt;
** Use the microscope, spinner, asher&lt;br /&gt;
&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 4 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 1 hr.) - teaches you how to load/unload the sample and how to condition the beam.&lt;br /&gt;
** Session 2 ( 3 hr.) - involves exposing alignment marks and test patterns (any design: preferably one half of the overlay ,so to understand alignment later ).&lt;br /&gt;
** Session 3 ( 3 hr.) -  involves using the exposed alignment marks for marker registration and exposing the 2nd pattern (i.e. the 2nd half of the overlay pattern).&lt;br /&gt;
** Session 4 involves exposing a &amp;quot;real&amp;quot; pattern on a &amp;quot;real&amp;quot; chip on your own to gain access.&lt;br /&gt;
&lt;br /&gt;
==== Preparation ====&lt;br /&gt;
Before any training slots are booked on the tool you&#039;ll need all of the following prepared:&lt;br /&gt;
* Shadow senior users on the tool 2-3 times.&lt;br /&gt;
* Chip (comfortable to handle) spin coated with resist. This chip will be used for sessions 1 &amp;amp; 2. Please be aware of the coating and baking parameters for the resist.&lt;br /&gt;
* Any test design is preferred which has marks, overlay patterns that you will use to test alignment precision between two lithography steps. A Vernier pattern is commonly used. Feel free to test your ideas. Make sure you have something for both &#039;&#039;x&#039;&#039; and &#039;&#039;y&#039;&#039; directions.&lt;br /&gt;
* Convert your design files into the Elionix exposure format .co7. This can be done using Beamer in 4th floor design computers.&lt;br /&gt;
* Make sure all write fields are entirely in the positive coordinate space.&lt;br /&gt;
* Make sure neither exposure will take longer than 15 minutes at 500 pA current and dose of 1000 uC/cm2.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Elionix F-125 (125 kV at QuanTech) ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for Elionix F-125.&lt;br /&gt;
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* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Heidelberg upg501 ===&lt;br /&gt;
Prepare your design file and coated chip before requesting Heidelberg upg501 training.&lt;br /&gt;
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&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Have a design file ready. GDS, DXF or CIF format works fine. Make sure you are familiar with the design before your actual session.&lt;br /&gt;
* Have a chip spin coated with an appropriate photoresist before the training session.&lt;br /&gt;
** The photoresist is sensitive to white light. Use the yellow filter on the microscopes. The light source in the both scribers is white and will already expose your resist.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video and read the standard operating procedure on the [[Heidelberg µPG 501|Heidelberg µPG 501 tool page]], shadow the tool with your group members, and ask for a sign-off session.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Characterization ==&lt;br /&gt;
&lt;br /&gt;
=== Bruker Dimension Icon Atomic Force Microscope (AFM) ===&lt;br /&gt;
Contact NBI-CR staff (cleanroom[at]nbi[dot]ku.dk) to request for AFM training.&lt;br /&gt;
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* Have a sample ready that you want to characterize. Think about what you want to learn about the sample: step height, roughness, etc.&lt;br /&gt;
* Only request for training if you plan on using the tool regularly.&lt;br /&gt;
* Training is usually 2-3 sessions of 2-hour per session.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== JEOL 7800-F ===&lt;br /&gt;
Prepare a real sample and imaging goals before booking JEOL 7800-F training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Training is usually 2-3 sessions of 2-hour per session.&lt;br /&gt;
* You need a chip/sample to be imaged before a session is booked. &lt;br /&gt;
* Be familiar with the materials on the sample to be imaged and what feature is it that is of critical interest -- something that makes or breaks your device.&lt;br /&gt;
* Request the training session only once you have gathered the chips and information. &lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== JEOL 7800-F prime (QuanTech) ===&lt;br /&gt;
Prepare a real sample and imaging goals before booking JEOL 7800-F Prime training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Training takes about 2-3 sessions.&lt;br /&gt;
* You need a chip/sample to be imaged before a session is booked.&lt;br /&gt;
* Be familiar with the materials on the sample to be imaged and what feature is it that is of critical interest -- something that makes or breaks your device.&lt;br /&gt;
* Request the training session only once you have gathered the chips and information.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Raith e-Line ===&lt;br /&gt;
Bring a prepared design package for sessions 1 and 2, including alignment and overlay test patterns.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* A design (gds, dxf, cif) for sessions 1 &amp;amp; 2 with:&lt;br /&gt;
** 4 alignment crosses (find out what marks work on the tool from your sub-group).&lt;br /&gt;
** Something to break the symmetry so you can tell chip orientation with your bare eye.&lt;br /&gt;
** A pattern that you will use to test overlay (alignment between two lithography steps). A Vernier pattern is commonly used. Feel free to test your ideas.&lt;br /&gt;
** Something creative, somethin fun :) This is an exercise in learning CAD as well.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Woollam alpha-SE Ellipsometer ===&lt;br /&gt;
Request Woollam alpha-SE Ellipsometer training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
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&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Filmetrics reflectometer ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for the Filmetrics reflectometer.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Thin Film Deposition ==&lt;br /&gt;
&lt;br /&gt;
=== PLASSYS Evaporator ===&lt;br /&gt;
Email your PLASSYS request with shadowing, sample, and process parameters.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Specify the required process parameters( material,  thickness, tilt etc)&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 3 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 1 hr.) - teaches you how to load/unload the sample and how to run a recipe. &lt;br /&gt;
** Session 2 ( 2 hr.) - how to create your own recipe and run the process. &lt;br /&gt;
** Session 3 ( 3 hr.) - sign off session &lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== AJA metallization, sputtering or ion milling ===&lt;br /&gt;
Email your training request with shadowing, sample, tool, process, and recipe details for AJA.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use: AJA1 or AJA2?&lt;br /&gt;
* What process do you want to run ?&lt;br /&gt;
* Either the recipe name or specify the required process parameters.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video on how to load/unload and read the standard operating procedures on the [[AJA Systems|AJA Systems tool page]]&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== ALD 1 ===&lt;br /&gt;
Email your ALD 1 request with shadowing, sample, and full process details.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use.&lt;br /&gt;
* What process steps you want to run.&lt;br /&gt;
** Either the recipe name or all required process parameters.&lt;br /&gt;
** How long does the process take.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video(s) and read the standard operating procedure on the [[Cambridge ALD|ALD tool page]].&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== ALD 2 ===&lt;br /&gt;
Email your ALD 2 request with shadowing, sample, and full process details.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use.&lt;br /&gt;
* What process steps you want to run.&lt;br /&gt;
** Either the recipe name or all required process parameters.&lt;br /&gt;
** How long does the process take.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video(s) and read the standard operating procedure on the [[Cambridge ALD|ALD tool page]].&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Packaging ==&lt;br /&gt;
&lt;br /&gt;
=== F&amp;amp;S autobonder ===&lt;br /&gt;
Prepare shadowing and bonding documentation, then request F&amp;amp;S autobonder training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d9c8b7; border-left:6px solid #8b5e3c; background:#fbf6f1; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
&lt;br /&gt;
* Shadow colleagues using the tool 2-3 times. &lt;br /&gt;
* You must have a &#039;&#039;&#039;chip&#039;&#039;&#039; for bonding.&lt;br /&gt;
* You must know which &#039;&#039;&#039;daughterboard&#039;&#039;&#039; you will use for bonding.&lt;br /&gt;
* You must know what material you use to &#039;&#039;&#039;mount&#039;&#039;&#039; the chip to the daughterboard (silver paint, PMMA or whatever is specific to your measurement).&lt;br /&gt;
* You must prepare a &#039;&#039;&#039;bonding schematic&#039;&#039;&#039; and have one of your team members verify that it is correct.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
* Read through the wiki page: https://wiki.nbi.ku.dk/cleanroom/FS_bonder  &lt;br /&gt;
* Request a training session at this point.&lt;br /&gt;
&lt;br /&gt;
Two training sessions are required to get access to the bonder:&lt;br /&gt;
&lt;br /&gt;
# 3 hours: Basic bonder training and chip bonding&lt;br /&gt;
# 2 hours: Sign-off session&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Manual bonder ===&lt;br /&gt;
Request manual bonder training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Miscellaneous ==&lt;br /&gt;
&lt;br /&gt;
=== Micromanipulator ===&lt;br /&gt;
Complete group-level training first, then request a micromanipulator sign-off session.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d9c8b7; border-left:6px solid #8b5e3c; background:#fbf6f1; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please get trained within your research group first. Then request a sign-off session.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Training&amp;diff=2776</id>
		<title>Training</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Training&amp;diff=2776"/>
		<updated>2026-04-13T09:57:26Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom [[Tools|tools]] is that a [[About|cleanroom staff]] member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the prerequisites below and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk]. &lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. &lt;br /&gt;
However, after a certain period of inactivity (typically 90 days) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Cleanroom General Introduction ==&lt;br /&gt;
&lt;br /&gt;
=== Cleanroom general introduction ===&lt;br /&gt;
Request cleanroom introduction training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Name a superuser from your group who will follow you in the cleanroom 2-3 times after your training.&lt;br /&gt;
* Introduction training requires acceptance from both of you and typically runs from 9.30 to 15.00.&lt;br /&gt;
* Before training, read the safety information: https://wiki.nbi.ku.dk/cleanroom/Safety&lt;br /&gt;
* Typical schedule:&lt;br /&gt;
** 9.15-10.30: Cleanroom introduction&lt;br /&gt;
** Coffee break&lt;br /&gt;
** 10.45-12.00: Asher, spinners, and optical microscopes&lt;br /&gt;
** Lunch break&lt;br /&gt;
** 13.00-14.00: Practical information inside and outside the lab&lt;br /&gt;
** 14.00-15.00: Q&amp;amp;A and account setup&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Lithography ==&lt;br /&gt;
&lt;br /&gt;
=== Elionix 7000 (100 kV) ===&lt;br /&gt;
Elionix 7000 training is for advanced users and requires prior cleanroom tool competency.&lt;br /&gt;
&lt;br /&gt;
Contact Harry (cleanroom@nbi.ku.dk) to request training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
==== Prerequisites ====&lt;br /&gt;
* You must be at least a Master student or signed up for a long term (&amp;gt;6 months) project to be allowed to use the tool.&lt;br /&gt;
* Elionix is a high level tool. Make sure you are already trained to:&lt;br /&gt;
** Enter the cleanroom&lt;br /&gt;
** Use the microscope, spinner, asher&lt;br /&gt;
&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 4 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 1 hr.) - teaches you how to load/unload the sample and how to condition the beam.&lt;br /&gt;
** Session 2 ( 3 hr.) - involves exposing alignment marks and test patterns (any design: preferably one half of the overlay ,so to understand alignment later ).&lt;br /&gt;
** Session 3 ( 3 hr.) -  involves using the exposed alignment marks for marker registration and exposing the 2nd pattern (i.e. the 2nd half of the overlay pattern).&lt;br /&gt;
** Session 4 involves exposing a &amp;quot;real&amp;quot; pattern on a &amp;quot;real&amp;quot; chip on your own to gain access.&lt;br /&gt;
&lt;br /&gt;
==== Preparation ====&lt;br /&gt;
Before any training slots are booked on the tool you&#039;ll need all of the following prepared:&lt;br /&gt;
* Shadow senior users on the tool 2-3 times.&lt;br /&gt;
* Chip (comfortable to handle) spin coated with resist. This chip will be used for sessions 1 &amp;amp; 2. Please be aware of the coating and baking parameters for the resist.&lt;br /&gt;
* Any test design is preferred which has marks, overlay patterns that you will use to test alignment precision between two lithography steps. A Vernier pattern is commonly used. Feel free to test your ideas. Make sure you have something for both &#039;&#039;x&#039;&#039; and &#039;&#039;y&#039;&#039; directions.&lt;br /&gt;
* Convert your design files into the Elionix exposure format .co7. This can be done using Beamer in 4th floor design computers.&lt;br /&gt;
* Make sure all write fields are entirely in the positive coordinate space.&lt;br /&gt;
* Make sure neither exposure will take longer than 15 minutes at 500 pA current and dose of 1000 uC/cm2.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Elionix F-125 (125 kV at QuanTech) ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for Elionix F-125.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Heidelberg upg501 ===&lt;br /&gt;
Prepare your design file and coated chip before requesting Heidelberg upg501 training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Have a design file ready. GDS, DXF or CIF format works fine. Make sure you are familiar with the design before your actual session.&lt;br /&gt;
* Have a chip spin coated with an appropriate photoresist before the training session.&lt;br /&gt;
** The photoresist is sensitive to white light. Use the yellow filter on the microscopes. The light source in the both scribers is white and will already expose your resist.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video and read the standard operating procedure on the [[Heidelberg µPG 501|Heidelberg µPG 501 tool page]]&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Characterization ==&lt;br /&gt;
&lt;br /&gt;
=== Bruker Dimension Icon Atomic Force Microscope (AFM) ===&lt;br /&gt;
Contact NBI-CR staff (cleanroom[at]nbi[dot]ku.dk) to request for AFM training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #c9ddf8; border-left:6px solid #3366cc; background:#f5f9ff; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Have a sample ready that you want to characterize. Think about what you want to learn about the sample: step height, roughness, etc.&lt;br /&gt;
* Only request for training if you plan on using the tool regularly.&lt;br /&gt;
* Training is usually 2-3 sessions of 2-hour per session.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== JEOL 7800-F ===&lt;br /&gt;
Prepare a real sample and imaging goals before booking JEOL 7800-F training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Training is usually 2-3 sessions of 2-hour per session.&lt;br /&gt;
* You need a chip/sample to be imaged before a session is booked. &lt;br /&gt;
* Be familiar with the materials on the sample to be imaged and what feature is it that is of critical interest -- something that makes or breaks your device.&lt;br /&gt;
* Request the training session only once you have gathered the chips and information. &lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== JEOL 7800-F prime (QuanTech) ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for JEOL 7800-F prime.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Raith e-Line ===&lt;br /&gt;
Bring a prepared design package for sessions 1 and 2, including alignment and overlay test patterns.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b8e2d5; border-left:6px solid #14866d; background:#f2fbf8; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* A design (gds, dxf, cif) for sessions 1 &amp;amp; 2 with:&lt;br /&gt;
** 4 alignment crosses (find out what marks work on the tool from your sub-group).&lt;br /&gt;
** Something to break the symmetry so you can tell chip orientation with your bare eye.&lt;br /&gt;
** A pattern that you will use to test overlay (alignment between two lithography steps). A Vernier pattern is commonly used. Feel free to test your ideas.&lt;br /&gt;
** Something creative, somethin fun :) This is an exercise in learning CAD as well.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Woollam alpha-SE Ellipsometer ===&lt;br /&gt;
Request Woollam alpha-SE Ellipsometer training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Filmetrics reflectometer ===&lt;br /&gt;
Contact Zhe Liu to arrange access and training for the Filmetrics reflectometer.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #b7e1c1; border-left:6px solid #2a9d5b; background:#f2fbf5; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please contact Zhe Liu ([mailto:zhe.liu@nbi.ku.dk zhe.liu@nbi.ku.dk])&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Thin Film Deposition ==&lt;br /&gt;
&lt;br /&gt;
=== PLASSYS Evaporator ===&lt;br /&gt;
Email your PLASSYS request with shadowing, sample, and process parameters.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Specify the required process parameters( material,  thickness, tilt etc)&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
==== Training ====&lt;br /&gt;
* You&#039;ll need 3 sessions to get trained on this tool.&lt;br /&gt;
** Session 1 ( 1 hr.) - teaches you how to load/unload the sample and how to run a recipe. &lt;br /&gt;
** Session 2 ( 2 hr.) - how to create your own recipe and run the process. &lt;br /&gt;
** Session 3 ( 3 hr.) - sign off session &lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== AJA metallization, sputtering or ion milling ===&lt;br /&gt;
Email your training request with shadowing, sample, tool, process, and recipe details for AJA.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use: AJA1 or AJA2?&lt;br /&gt;
* What process do you want to run ?&lt;br /&gt;
* Either the recipe name or specify the required process parameters.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video on how to load/unload and read the standard operating procedures on the [[AJA Systems|AJA Systems tool page]]&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== ALD 1 ===&lt;br /&gt;
Email your ALD 1 request with shadowing, sample, and full process details.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use.&lt;br /&gt;
* What process steps you want to run.&lt;br /&gt;
** Either the recipe name or all required process parameters.&lt;br /&gt;
** How long does the process take.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video(s) and read the standard operating procedure on the [[Cambridge ALD|ALD tool page]].&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== ALD 2 ===&lt;br /&gt;
Email your ALD 2 request with shadowing, sample, and full process details.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #f0d4ac; border-left:6px solid #c77700; background:#fff8ef; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
* The name of the person you have shadowed and the number of times you&#039;ve done it.&lt;br /&gt;
* Confirm that you have a sample ready.&lt;br /&gt;
* Which tool you want to use.&lt;br /&gt;
* What process steps you want to run.&lt;br /&gt;
** Either the recipe name or all required process parameters.&lt;br /&gt;
** How long does the process take.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&lt;br /&gt;
Before the training session:&lt;br /&gt;
* Watch the instruction video(s) and read the standard operating procedure on the [[Cambridge ALD|ALD tool page]].&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Packaging ==&lt;br /&gt;
&lt;br /&gt;
=== F&amp;amp;S autobonder ===&lt;br /&gt;
Prepare shadowing and bonding documentation, then request F&amp;amp;S autobonder training.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d9c8b7; border-left:6px solid #8b5e3c; background:#fbf6f1; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
Send an email with the following info before the training can be arranged:&lt;br /&gt;
&lt;br /&gt;
* Shadow colleagues using the tool 2-3 times. &lt;br /&gt;
* You must have a &#039;&#039;&#039;chip&#039;&#039;&#039; for bonding.&lt;br /&gt;
* You must know which &#039;&#039;&#039;daughterboard&#039;&#039;&#039; you will use for bonding.&lt;br /&gt;
* You must know what material you use to &#039;&#039;&#039;mount&#039;&#039;&#039; the chip to the daughterboard (silver paint, PMMA or whatever is specific to your measurement).&lt;br /&gt;
* You must prepare a &#039;&#039;&#039;bonding schematic&#039;&#039;&#039; and have one of your team members verify that it is correct.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
* Read through the wiki page: https://wiki.nbi.ku.dk/cleanroom/FS_bonder  &lt;br /&gt;
* Request a training session at this point.&lt;br /&gt;
&lt;br /&gt;
Two training sessions are required to get access to the bonder:&lt;br /&gt;
&lt;br /&gt;
# 3 hours: Basic bonder training and chip bonding&lt;br /&gt;
# 2 hours: Sign-off session&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
=== Manual bonder ===&lt;br /&gt;
Request manual bonder training via [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d8dde3; border-left:6px solid #72777d; background:#f8f9fa; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Miscellaneous ==&lt;br /&gt;
&lt;br /&gt;
=== Micromanipulator ===&lt;br /&gt;
Complete group-level training first, then request a micromanipulator sign-off session.&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible mw-collapsed&amp;quot; style=&amp;quot;border:1px solid #d9c8b7; border-left:6px solid #8b5e3c; background:#fbf6f1; border-radius:6px; margin:0.45em 0 1.0em; padding:0.55em 0.75em 0.55em;&amp;quot;&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-toggle&amp;quot; style=&amp;quot;text-align:right; margin:-0.62em 0 0.25em; line-height:1;&amp;quot;&amp;gt;&#039;&#039;&#039;Expand&#039;&#039;&#039;&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;div class=&amp;quot;mw-collapsible-content&amp;quot;&amp;gt;&lt;br /&gt;
* Please get trained within your research group first. Then request a sign-off session.&lt;br /&gt;
* What is your project alias? If unsure, contact your supervisor first.&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&amp;lt;/div&amp;gt;&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2775</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2775"/>
		<updated>2026-04-13T09:49:29Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&#039;&#039;&#039;Welcome to the NBI Cleanroom wiki!&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
This site contains public information for the users of the cleanroom and related facilities. All items are available &#039;&#039;&#039;without login&#039;&#039;&#039;. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki]. &lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| style=&amp;quot;width: 60%;&amp;quot; align=&amp;quot;center&amp;quot; &lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]&lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Maintenance: Gun exchange. expected date: Fri 27 Mar 2026&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFBF00&amp;quot; | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn&#039;t responding. &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! The chamber is dedicated to In &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F prime]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Talos F200i S/TEM|TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Wed 11 Mar 2026&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&amp;lt;!--&lt;br /&gt;
Colour palette&lt;br /&gt;
#c6e0b4&amp;quot;  | All good!&lt;br /&gt;
#FFBF00&amp;quot; | Minor issue&lt;br /&gt;
#ff9f9f&amp;quot; | Tool maintenance / failure&lt;br /&gt;
--&amp;gt;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2774</id>
		<title>Tools</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2774"/>
		<updated>2026-04-13T09:45:29Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]&lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Tool list ==&lt;br /&gt;
{| style=&amp;quot;width: 85%;&amp;quot;&lt;br /&gt;
|- style=&amp;quot;text-align:left;&amp;quot;&lt;br /&gt;
! Lithography !! Thin film &amp;amp; III-Vs !! Characterization !! Other&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot; &lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
&amp;lt;!-- * [[Süss mask aligner]] --&amp;gt;&lt;br /&gt;
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
* [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[AJA systems]]&lt;br /&gt;
* [[Plassys Evaporator]]&lt;br /&gt;
* [[E-Gun evaporator]]&lt;br /&gt;
&amp;lt;!-- * [[Edwards evaporator|Edwards thermal evaporator]] --&amp;gt;&lt;br /&gt;
* [[Laurell spinners]]&lt;br /&gt;
* [[Cambridge ALD]]&lt;br /&gt;
* [[Leica sputter coater]]&lt;br /&gt;
* [[MBE]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
* [[Raith eLine]]&lt;br /&gt;
* [[Talos F200i S/TEM]]&lt;br /&gt;
* [[Tencor profilometer]]&lt;br /&gt;
* [[Alpha-SE ellipsometer]]&lt;br /&gt;
* [[Sensofar optical profiler]]&lt;br /&gt;
* [[Olympus microscopes]]&lt;br /&gt;
* [[Lynx EVO stereomicroscope]]&lt;br /&gt;
* [[Bruker Dimension Icon AFM]]&lt;br /&gt;
* [[Filmetrics reflectometer]]&lt;br /&gt;
* [[Probe station]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Süss scriber|Manual Süss scriber]]&lt;br /&gt;
* [[Loomis scriber|Automatic Loomis scriber]]&lt;br /&gt;
* [[Dicing saw]]&lt;br /&gt;
* [[AccuThermo RTA]]&lt;br /&gt;
* [[Biorad]]&lt;br /&gt;
* [[Plasma-Preen asher]]&lt;br /&gt;
* [[Diener plasma asher]]&lt;br /&gt;
* [[Tergeo plasma asher]]&lt;br /&gt;
* [[FS bonder]]&lt;br /&gt;
* [[K&amp;amp;S bonder]]&lt;br /&gt;
* [[Micromanipulator]]&lt;br /&gt;
* [[Präzitherm hotplates]]&lt;br /&gt;
* [[Critical point dryer]]&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Tool access requirement guidelines ==&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: center;&amp;quot;&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; align=&amp;quot;right&amp;quot;  | &lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Bachelor&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Master&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | PhD&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Postdoc&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; |  [[Raith eLine|eLine]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA Systems|AJAs]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator|Plassys]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator|E-gun]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Leica sputter coater|Leica sputter]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Talos F200i S/TEM |TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tencor profilometer|Profilometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Alpha-SE Ellipsometer|Ellipsometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
&amp;lt;!-- | style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Sensofar optical profiler|Sensofar]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|- --&amp;gt;&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Filmetrics reflectometer|Filmetrics]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Süss scriber|Manual scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AccuThermo RTA|RTA]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Biorad]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plasma-Preen asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tergeo Plasma Asher|Tergeo asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Laurell spinners|Spinners]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2773</id>
		<title>Tools</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2773"/>
		<updated>2026-04-13T09:44:33Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]&lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Tool list ==&lt;br /&gt;
{| style=&amp;quot;width: 85%;&amp;quot;&lt;br /&gt;
|- style=&amp;quot;text-align:left;&amp;quot;&lt;br /&gt;
! Lithography !! Thin film &amp;amp; III-Vs !! Characterization !! Other&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot; &lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
&amp;lt;!-- * [[Süss mask aligner]] --&amp;gt;&lt;br /&gt;
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
* [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[AJA systems]]&lt;br /&gt;
* [[Plassys Evaporator]]&lt;br /&gt;
* [[E-Gun evaporator]]&lt;br /&gt;
&amp;lt;!-- * [[Edwards evaporator|Edwards thermal evaporator]] --&amp;gt;&lt;br /&gt;
* [[Laurell spinners]]&lt;br /&gt;
* [[Cambridge ALD]]&lt;br /&gt;
* [[Leica sputter coater]]&lt;br /&gt;
* [[MBE]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
* [[Raith eLine]]&lt;br /&gt;
* [[Philips TEM]]&lt;br /&gt;
* [[Tencor profilometer]]&lt;br /&gt;
* [[Alpha-SE ellipsometer]]&lt;br /&gt;
* [[Sensofar optical profiler]]&lt;br /&gt;
* [[Olympus microscopes]]&lt;br /&gt;
* [[Lynx EVO stereomicroscope]]&lt;br /&gt;
* [[Bruker Dimension Icon AFM]]&lt;br /&gt;
* [[Filmetrics reflectometer]]&lt;br /&gt;
* [[Probe station]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Süss scriber|Manual Süss scriber]]&lt;br /&gt;
* [[Loomis scriber|Automatic Loomis scriber]]&lt;br /&gt;
* [[Dicing saw]]&lt;br /&gt;
* [[AccuThermo RTA]]&lt;br /&gt;
* [[Biorad]]&lt;br /&gt;
* [[Plasma-Preen asher]]&lt;br /&gt;
* [[Diener plasma asher]]&lt;br /&gt;
* [[Tergeo plasma asher]]&lt;br /&gt;
* [[FS bonder]]&lt;br /&gt;
* [[K&amp;amp;S bonder]]&lt;br /&gt;
* [[Micromanipulator]]&lt;br /&gt;
* [[Präzitherm hotplates]]&lt;br /&gt;
* [[Critical point dryer]]&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Tool access requirement guidelines ==&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: center;&amp;quot;&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; align=&amp;quot;right&amp;quot;  | &lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Bachelor&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Master&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | PhD&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Postdoc&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; |  [[Raith eLine|eLine]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA Systems|AJAs]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator|Plassys]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator|E-gun]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Leica sputter coater|Leica sputter]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Talos F200i S/TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tencor profilometer|Profilometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Alpha-SE Ellipsometer|Ellipsometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
&amp;lt;!-- | style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Sensofar optical profiler|Sensofar]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|- --&amp;gt;&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Filmetrics reflectometer|Filmetrics]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Süss scriber|Manual scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AccuThermo RTA|RTA]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Biorad]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plasma-Preen asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tergeo Plasma Asher|Tergeo asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Laurell spinners|Spinners]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Philips_TEM&amp;diff=2772</id>
		<title>Philips TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Philips_TEM&amp;diff=2772"/>
		<updated>2026-04-13T09:43:46Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Chenglee moved page Philips TEM to Talos F200i S/TEM: Replacing obsolete system&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;#REDIRECT [[Talos F200i S/TEM]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2771</id>
		<title>Talos F200i S/TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2771"/>
		<updated>2026-04-13T09:43:46Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Chenglee moved page Philips TEM to Talos F200i S/TEM: Replacing obsolete system&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = Talos F200i.jpg&lt;br /&gt;
|toolfullname = Talos F200i S/TEM&lt;br /&gt;
|website = https://www.thermofisher.com&lt;br /&gt;
|company = Thermo Fisher Scientific&lt;br /&gt;
|description = Electron microscope&lt;br /&gt;
|primary = Martin&lt;br /&gt;
|secondary = Nikki&lt;br /&gt;
}}&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;br /&gt;
&lt;br /&gt;
Thermo Fisher Scientific Talos F200i S/TEM is a versatile 200-kV field-emission (scanning) transmission electron microscope designed for high-throughput, high resolution materials characterization in multi-user research environments. &lt;br /&gt;
&lt;br /&gt;
Combining TEM and STEM imaging modes, it enables sub-nanometer structural and chemical analysis, including advanced techniques such as EDS mapping, diffraction and 4D-STEM. &lt;br /&gt;
&lt;br /&gt;
The facility additionally provides focused (Ga) ion beam (FIB) capabilities for site-specific sample preparation, enabling precise lamella fabrication and cross-sectioning to support advanced S/TEM workflows.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For more information, kindly contact NBI-Cleanroom staff.&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2770</id>
		<title>Tools</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2770"/>
		<updated>2026-04-13T09:34:08Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]&lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Tool list ==&lt;br /&gt;
{| style=&amp;quot;width: 85%;&amp;quot;&lt;br /&gt;
|- style=&amp;quot;text-align:left;&amp;quot;&lt;br /&gt;
! Lithography !! Thin film &amp;amp; III-Vs !! Characterization !! Other&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot; &lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
&amp;lt;!-- * [[Süss mask aligner]] --&amp;gt;&lt;br /&gt;
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
* [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[AJA systems]]&lt;br /&gt;
* [[Plassys Evaporator]]&lt;br /&gt;
* [[E-Gun evaporator]]&lt;br /&gt;
&amp;lt;!-- * [[Edwards evaporator|Edwards thermal evaporator]] --&amp;gt;&lt;br /&gt;
* [[Laurell spinners]]&lt;br /&gt;
* [[Cambridge ALD]]&lt;br /&gt;
* [[Leica sputter coater]]&lt;br /&gt;
* [[MBE]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
* [[Raith eLine]]&lt;br /&gt;
* [[Philips TEM]]&lt;br /&gt;
* [[Tencor profilometer]]&lt;br /&gt;
* [[Alpha-SE ellipsometer]]&lt;br /&gt;
* [[Sensofar optical profiler]]&lt;br /&gt;
* [[Olympus microscopes]]&lt;br /&gt;
* [[Lynx EVO stereomicroscope]]&lt;br /&gt;
* [[Bruker Dimension Icon AFM]]&lt;br /&gt;
* [[Filmetrics reflectometer]]&lt;br /&gt;
* [[Probe station]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Süss scriber|Manual Süss scriber]]&lt;br /&gt;
* [[Loomis scriber|Automatic Loomis scriber]]&lt;br /&gt;
* [[Dicing saw]]&lt;br /&gt;
* [[AccuThermo RTA]]&lt;br /&gt;
* [[Biorad]]&lt;br /&gt;
* [[Plasma-Preen asher]]&lt;br /&gt;
* [[Diener plasma asher]]&lt;br /&gt;
* [[Tergeo plasma asher]]&lt;br /&gt;
* [[FS bonder]]&lt;br /&gt;
* [[K&amp;amp;S bonder]]&lt;br /&gt;
* [[Micromanipulator]]&lt;br /&gt;
* [[Präzitherm hotplates]]&lt;br /&gt;
* [[Critical point dryer]]&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Tool access requirement guidelines ==&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: center;&amp;quot;&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; align=&amp;quot;right&amp;quot;  | &lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Bachelor&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Master&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | PhD&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Postdoc&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; |  [[Raith eLine|eLine]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA Systems|AJAs]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator|Plassys]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator|E-gun]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Leica sputter coater|Leica sputter]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Philips TEM|TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tencor profilometer|Profilometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Alpha-SE Ellipsometer|Ellipsometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
&amp;lt;!-- | style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Sensofar optical profiler|Sensofar]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|- --&amp;gt;&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Filmetrics reflectometer|Filmetrics]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Süss scriber|Manual scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AccuThermo RTA|RTA]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Biorad]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plasma-Preen asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tergeo Plasma Asher|Tergeo asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Laurell spinners|Spinners]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2769</id>
		<title>Talos F200i S/TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2769"/>
		<updated>2026-04-10T16:54:10Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = Talos F200i.jpg&lt;br /&gt;
|toolfullname = Talos F200i S/TEM&lt;br /&gt;
|website = https://www.thermofisher.com&lt;br /&gt;
|company = Thermo Fisher Scientific&lt;br /&gt;
|description = Electron microscope&lt;br /&gt;
|primary = Martin&lt;br /&gt;
|secondary = Nikki&lt;br /&gt;
}}&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;br /&gt;
&lt;br /&gt;
Thermo Fisher Scientific Talos F200i S/TEM is a versatile 200-kV field-emission (scanning) transmission electron microscope designed for high-throughput, high resolution materials characterization in multi-user research environments. &lt;br /&gt;
&lt;br /&gt;
Combining TEM and STEM imaging modes, it enables sub-nanometer structural and chemical analysis, including advanced techniques such as EDS mapping, diffraction and 4D-STEM. &lt;br /&gt;
&lt;br /&gt;
The facility additionally provides focused (Ga) ion beam (FIB) capabilities for site-specific sample preparation, enabling precise lamella fabrication and cross-sectioning to support advanced S/TEM workflows.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For more information, kindly contact NBI-Cleanroom staff.&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2768</id>
		<title>Talos F200i S/TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2768"/>
		<updated>2026-04-10T16:35:33Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = Talos F200i.jpg&lt;br /&gt;
|toolfullname = Talos F200i S/TEM&lt;br /&gt;
|website = https://www.thermofisher.com&lt;br /&gt;
|company = Thermo Fisher Scientific&lt;br /&gt;
|description = Electron microscope&lt;br /&gt;
|primary = Martin&lt;br /&gt;
|secondary = Nikki&lt;br /&gt;
}}&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;br /&gt;
&lt;br /&gt;
Thermo Fisher Scientific is a versatile 200-kV field-emission (scanning) transmission electron microscope designed for high-throughput, high resolution materials characterization in multi-user research environments. &lt;br /&gt;
&lt;br /&gt;
Combining TEM and STEM imaging modes, it enables sub-nanometer structural and chemical analysis, including advanced techniques such as EDS mapping, diffraction and 4D-STEM. &lt;br /&gt;
&lt;br /&gt;
The facility additionally provides focused (Ga) ion beam (FIB) capabilities for site-specific sample preparation, enabling precise lamella fabrication and cross-sectioning to support advanced S/TEM workflows.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For more information, kindly contact NBI-Cleanroom staff.&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2767</id>
		<title>Talos F200i S/TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2767"/>
		<updated>2026-04-10T16:26:35Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = Talos F200i.jpg&lt;br /&gt;
|toolfullname = Talos F200i S/TEM&lt;br /&gt;
|website = https://www.thermofisher.com&lt;br /&gt;
|company = Thermo Fisher Scientific&lt;br /&gt;
|description =  Electron microscope&lt;br /&gt;
|primary = Martin&lt;br /&gt;
|secondary = Nikki&lt;br /&gt;
}}&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2766</id>
		<title>Talos F200i S/TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2766"/>
		<updated>2026-04-10T16:26:10Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = Talos F200i.jpg&lt;br /&gt;
|toolfullname = Talos F200i S/TEM&lt;br /&gt;
|website = https://www.thermofisher.com&lt;br /&gt;
|company = Thermo Fisher Scientific&lt;br /&gt;
|description = Electron microscope&lt;br /&gt;
|primary = Martin&lt;br /&gt;
|secondary = Nikki&lt;br /&gt;
}}&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Talos_F200i.jpg&amp;diff=2763</id>
		<title>File:Talos F200i.jpg</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Talos_F200i.jpg&amp;diff=2763"/>
		<updated>2026-04-10T16:22:36Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2761</id>
		<title>Talos F200i S/TEM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Talos_F200i_S/TEM&amp;diff=2761"/>
		<updated>2026-04-10T16:21:50Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = Talos F200i.jpg&lt;br /&gt;
|toolfullname = Talos F200i S/TEM&lt;br /&gt;
|website = https://www.thermofisher.com/dk&lt;br /&gt;
|company = Philips Electron Optics BV&lt;br /&gt;
|description = Electron microscope&lt;br /&gt;
|primary = Martin&lt;br /&gt;
|secondary = Nikki&lt;br /&gt;
}}&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Tool_Philips_TEM.jpg&amp;diff=2760</id>
		<title>File:Tool Philips TEM.jpg</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Tool_Philips_TEM.jpg&amp;diff=2760"/>
		<updated>2026-04-10T16:17:25Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Chenglee uploaded a new version of File:Tool Philips TEM.jpg&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2714</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2714"/>
		<updated>2026-02-04T09:27:47Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&#039;&#039;&#039;Welcome to the NBI Cleanroom wiki!&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
This site contains public information for the users of the cleanroom and related facilities. All items are available &#039;&#039;&#039;without login&#039;&#039;&#039;. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki]. &lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| style=&amp;quot;width: 60%;&amp;quot; align=&amp;quot;center&amp;quot; &lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]&lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!	&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Tool maintenance: Baking in progress...&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFBF00&amp;quot; | No Au available	&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Available materials In, Ni, SiOx,Au&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F prime]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Turbo failure, service on February 2nd &amp;amp; 3rd&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Tue 3 Jan 2026&#039;&#039;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2711</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2711"/>
		<updated>2026-02-02T17:14:02Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&#039;&#039;&#039;Welcome to the NBI Cleanroom wiki!&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
This site contains public information for the users of the cleanroom and related facilities. All items are available &#039;&#039;&#039;without login&#039;&#039;&#039;. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki]. &lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| style=&amp;quot;width: 60%;&amp;quot; align=&amp;quot;center&amp;quot; &lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]&lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!	&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Almost good! The bellow is slowly outgassing, pressure will drop in the next weeks&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!	&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Available materials In, Ni, SiOx,Au&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot;  | Microscope downtime due to N2 gas supply. Expect to be operational on 4 February 2026.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F prime]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Turbo failure, service on February 2nd &amp;amp; 3rd&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Wed 28 Jan 2026&#039;&#039;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2707</id>
		<title>Bruker Dimension Icon AFM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2707"/>
		<updated>2026-01-27T15:53:16Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = AFM_ICON.jpeg&lt;br /&gt;
|toolfullname = Dimension Icon PT&lt;br /&gt;
|company = Bruker&lt;br /&gt;
|description = Atomic Force Microscope&lt;br /&gt;
|website = https://www.bruker.com/en/products-and-solutions/microscopes/materials-afm/dimension-icon-afm.html&lt;br /&gt;
|location = Characterization room (03.01.K08)&lt;br /&gt;
|primary = Nikki&lt;br /&gt;
|secondary = Zhe&lt;br /&gt;
|limits = None&lt;br /&gt;
}}&lt;br /&gt;
Bruker Dimension Icon is an atomic force microscope used for accurate surface topography measurements.&lt;br /&gt;
Users can measure film thickness, roughness and other topographical data characteristics with Ångstrom accuracy.&lt;br /&gt;
&lt;br /&gt;
Other alternatives for surface characterization at the [[Main Page|NBI cleanroom]] facilities:&lt;br /&gt;
* [[Tencor profilometer]] for step height and profile roughness&lt;br /&gt;
* [[Alpha-SE ellipsometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[Filmetrics reflectometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[JEOL 7800F]] SEM for film thickness by observing material cross-sections, elemental analysis&lt;br /&gt;
== &#039;&#039;&#039;Quick-Start Instruction Manual for ScanAsyst Operation&#039;&#039;&#039; ==&lt;br /&gt;
&#039;&#039;&#039;Before You Begin&#039;&#039;&#039;&lt;br /&gt;
* Complete and pass AFM training by NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Before Your Session&#039;&#039;&#039;&lt;br /&gt;
* Make sure your sample is ready.&lt;br /&gt;
* Book your session in advance and be on time.&lt;br /&gt;
&#039;&#039;&#039;During Your Session&#039;&#039;&#039;&lt;br /&gt;
 &#039;&#039;&#039;Laboratory Reminders&#039;&#039;&#039;&lt;br /&gt;
 * Wear shoe covers in the lab.&lt;br /&gt;
 * Wear nitrile gloves before touching the tool.&lt;br /&gt;
 * Keep the workstation clean and tidy.&lt;br /&gt;
 * Make sure both main and support PCs are ON.&lt;br /&gt;
 * Ensure AFM (Nanoscope 9.7) software is closed before starting. This ensures the laser is OFF.&lt;br /&gt;
 * Check if a tip is already mounted. Use logbook (AFM Log) on the support PC to confirm.&lt;br /&gt;
 * If needed, load or change the tip (see next section).&lt;br /&gt;
&#039;&#039;&#039;Unloading the Tip Holder from the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Make sure the scan head is up, and the sample stage is not directly under.&lt;br /&gt;
* Loosen the side screw a few turns to release the scan head. 📍Do not remove the screw. &lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Gently pull out the tip holder from the bottom of the scanner.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Mount the tip holder on the loading station. The loading station is a black, round block with 3 sets of probe-mounting slots.&lt;br /&gt;
* Place the loading station on the table.&lt;br /&gt;
&#039;&#039;&#039;Mounting the Tip&#039;&#039;&#039;&lt;br /&gt;
* Pick the right tip for your scan. Tip specifications can be found on the Gel-Pak box. The default tip for ScanAsyst mode is “ScanAsyst Air”. The tip holder looks like a small circuit board with 4-holes and a metal clip to hold the tip in position.&lt;br /&gt;
* Gently press down and slide the metal clip to the back until the groove (slot for the tip) is fully visible.&lt;br /&gt;
* Remove the old tip from the holder. Discard by placing it in a Gel-Pak box (aligning the tip horizontally).&lt;br /&gt;
* Use tweezers to carefully lift a new tip (by its side) from the Gel-Pak box. New tips are aligned vertically in the Gel-Pak box. 📍Do not flip or drop the tip!&lt;br /&gt;
* Gently place the tip into the groove. Make sure it sits neatly in the groove with the cantilever at the open end of the groove.&lt;br /&gt;
* Gently press down and slide the metal clip to the front until it locks the tip in place.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-tip.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Tip onto the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Connect the tip holder to the bottom of the scanner. Align the 4 pins to the matching sockets and press it gently but firmly. Make sure the tip is facing downwards.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Tighten the screw to lock the scan head. 📍Do not overtighten.&lt;br /&gt;
&#039;&#039;&#039;Starting Your AFM Session&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Launching the Software&#039;&#039;&#039;&lt;br /&gt;
* Open Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Wait for the Dimension Icon window to load and automatically pop up.&lt;br /&gt;
Choosing Your Experiment Settings&lt;br /&gt;
* By default, the “ScanAsyst in Air” experiment is selected so you can directly click “Load Experiment”. You will hear a sound, and the laser will activate (red LED lights up).&lt;br /&gt;
&#039;&#039;&#039;SETUP Tab&#039;&#039;&#039;&lt;br /&gt;
 Adjust the illumination and zoom until the tip is visible on the screen. If you do not see the cantilever even at the lowest magnification, you may need to reposition the tip holder or replace the tip.&lt;br /&gt;
&#039;&#039;&#039;Probe Setup&#039;&#039;&#039;&lt;br /&gt;
* Check that the ScanAsyst-Air probe parameters are selected. Otherwise, choose the ScanAsyst-Air probe from the database.&lt;br /&gt;
&#039;&#039;&#039;Aligning the Laser&#039;&#039;&#039;&lt;br /&gt;
* Click “Move to the Alignment Station”.&lt;br /&gt;
* Use the top X-Y control knobs on the scanner to align the laser to the tip. Adjust the laser spot until the sum photodetector signal is at least 3.5V.&lt;br /&gt;
* Use the side X-Y control knobs on the scanner to align the laser at the center of the photodetector. Adjust the laser to center the red dot on the crosshair. Aim for ~ 0V offset on both axes but below 0.2V is acceptable.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-laser.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Focusing the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Return from Alignment Station”.&lt;br /&gt;
* Use the Focus Controls (Up/Down arrows) to focus the tip of the cantilever.&lt;br /&gt;
* Adjust the illumination, zoom and focus until the tip image is sharp.&lt;br /&gt;
* Click near the tip apex (~ 7 µm) to mark the cantilever position. &lt;br /&gt;
&lt;br /&gt;
[[File:Figure-cantilever.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;NAVIGATE Tab&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Sample&#039;&#039;&#039;&lt;br /&gt;
* Make sure the stage is at “Sample Load Position”. &lt;br /&gt;
* Place your sample on the stage and turn on the vacuum.&lt;br /&gt;
* Use trackball or on-screen controls to move the sample under the tip.&lt;br /&gt;
* If you already scanned a sample before changing the tip and did not close the software, you can click “Sample Scan Position” to return to your previous scan position.&lt;br /&gt;
&#039;&#039;&#039;Focusing the Sample&#039;&#039;&#039; &lt;br /&gt;
* Choose “Sample (Default)” focus method if your sample has features, like lithography on the surface, you can use to identify the surface plane. Choose “Tip Reflection” for thin films.&lt;br /&gt;
* Use a low-speed setting.&lt;br /&gt;
* Use the Up/Down arrows (start with the Down arrow) to bring the sample into focus. For tip reflection, the mirror image of the cantilever should be brought into focus. &lt;br /&gt;
* Adjust the illumination, zoom and focus until the sample looks sharp and clear. 📍 Focus gradually to avoid tip crash. Moving too fast may break the tip!&lt;br /&gt;
* Close the AFM enclosure when done.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-focus.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Check Parameters&#039;&#039;&#039;&lt;br /&gt;
* Before scanning, confirm the basic scan settings (for standard use).&lt;br /&gt;
** Scan size: 500 nm&lt;br /&gt;
** Aspect ratio: 1.00&lt;br /&gt;
** X offset / Y offset: 0.000 nm&lt;br /&gt;
** Scan angle. 0.00°&lt;br /&gt;
** Scan rate: 1 Hz&lt;br /&gt;
** Samples per line: 256&lt;br /&gt;
** Spring constant: 0.4000 N/m&lt;br /&gt;
** Do not change other settings unless agreed with NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Engaging the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Engage” to lower the tip and start scanning.&lt;br /&gt;
&#039;&#039;&#039;Scanning &amp;amp; Data Collection&#039;&#039;&#039;&lt;br /&gt;
* Monitor the Trace/Retrace lines in the Scope window. They should have similar shapes but not necessarily overlapping. Assess whether the features look physical or noise-like.&lt;br /&gt;
* Increase the scan size in steps (2 µm, 10 µm, 50 µm, 90 µm) until you see the area of interest. Use the zoom or offset tool to center and choose scan direction.&lt;br /&gt;
* Before moving to other areas, click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Engage” again when ready for a new scan.&lt;br /&gt;
📍The tip must be retracted before any stage movement.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Saving Your Data&#039;&#039;&#039;&lt;br /&gt;
* Go to:&lt;br /&gt;
  Capture &amp;gt; Capture Filename &amp;gt; Change Directory &amp;gt; Rename File &amp;gt; OK&lt;br /&gt;
* Choose:&lt;br /&gt;
** Capture - captures a single scan&lt;br /&gt;
** Capture Continuous - captures every scan&lt;br /&gt;
** Capture Now - immediately captures whatever has been scanned since the beginning of the frame.&lt;br /&gt;
** Stop Capture - aborts the capture action.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-software.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Ending Your Session&#039;&#039;&#039;&lt;br /&gt;
* Click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Navigate”, then “Sample Load Position”.&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Turn off the vacuum and remove your sample.&lt;br /&gt;
  Tip Condition:&lt;br /&gt;
  If the tip is broken, replace and align it before ending your session.&lt;br /&gt;
  If the tip is still usable, exit Nanoscope 9.7 software (laser turns off).&lt;br /&gt;
* Close Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Close the AFM enclosure.&lt;br /&gt;
* Copy your data and fill in the session log. &lt;br /&gt;
* Clean up the workspace and dispose used items properly.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For help with scan settings and data analysis, contact NBI-Cleanroom staff.&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2705</id>
		<title>Bruker Dimension Icon AFM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2705"/>
		<updated>2026-01-22T09:00:49Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = AFM_ICON.jpeg&lt;br /&gt;
|toolfullname = Dimension Icon PT&lt;br /&gt;
|company = Bruker&lt;br /&gt;
|description = Atomic Force Microscope&lt;br /&gt;
|website = https://www.bruker.com/en/products-and-solutions/microscopes/materials-afm/dimension-icon-afm.html&lt;br /&gt;
|location = Characterization room (03.01.K08)&lt;br /&gt;
|primary = Nikki&lt;br /&gt;
|secondary = Zhe&lt;br /&gt;
|limits = None&lt;br /&gt;
}}&lt;br /&gt;
Bruker Dimension Icon is an atomic force microscope used for accurate surface topography measurements.&lt;br /&gt;
Users can measure film thickness, roughness and other topographical data characteristics with Ångstrom accuracy.&lt;br /&gt;
&lt;br /&gt;
Other alternatives for surface characterization at the [[Main Page|NBI cleanroom]] facilities:&lt;br /&gt;
* [[Tencor profilometer]] for step height and profile roughness&lt;br /&gt;
* [[Alpha-SE ellipsometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[Filmetrics reflectometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[JEOL 7800F]] SEM for film thickness by observing material cross-sections, elemental analysis&lt;br /&gt;
== &#039;&#039;&#039;Quick-Start Instruction Manual for ScanAsyst Operation&#039;&#039;&#039; ==&lt;br /&gt;
&#039;&#039;&#039;Before You Begin&#039;&#039;&#039;&lt;br /&gt;
* Complete and pass AFM training by NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Before Your Session&#039;&#039;&#039;&lt;br /&gt;
* Make sure your sample is ready.&lt;br /&gt;
* Book your session in advance and be on time.&lt;br /&gt;
&#039;&#039;&#039;During Your Session&#039;&#039;&#039;&lt;br /&gt;
 &#039;&#039;&#039;Laboratory Reminders&#039;&#039;&#039;&lt;br /&gt;
 * Wear shoe covers in the lab.&lt;br /&gt;
 * Wear nitrile gloves before touching the tool.&lt;br /&gt;
 * Keep the workstation clean and tidy.&lt;br /&gt;
 * Make sure both main and support PCs are ON.&lt;br /&gt;
 * Ensure AFM (Nanoscope 9.7) software is closed before starting. This ensures the laser is OFF.&lt;br /&gt;
 * Check if a tip is already mounted. Use logbook (AFM Log) on the support PC to confirm.&lt;br /&gt;
 * If needed, load or change the tip (see next section).&lt;br /&gt;
&#039;&#039;&#039;Unloading the Tip Holder from the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Make sure the scan head is up, and the sample stage is not directly under.&lt;br /&gt;
* Loosen the side screw a few turns to release the scan head. 📍Do not remove the screw. &lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Gently pull out the tip holder from the bottom of the scanner.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Mount the tip holder on the loading station. The loading station is a black, round block with 3 sets of probe-mounting slots.&lt;br /&gt;
* Place the loading station on the table.&lt;br /&gt;
&#039;&#039;&#039;Mounting the Tip&#039;&#039;&#039;&lt;br /&gt;
* Pick the right tip for your scan. Tip specifications can be found on the Gel-Pak box. The default tip for ScanAsyst mode is “ScanAsyst Air”. The tip holder looks like a small circuit board with 4-holes and a metal clip to hold the tip in position.&lt;br /&gt;
* Gently press down and slide the metal clip to the back until the groove (slot for the tip) is fully visible.&lt;br /&gt;
* Remove the old tip from the holder. Discard by placing it in a Gel-Pak box (aligning the tip horizontally).&lt;br /&gt;
* Use tweezers to carefully lift a new tip (by its side) from the Gel-Pak box. New tips are aligned vertically in the Gel-Pak box. 📍Do not flip or drop the tip!&lt;br /&gt;
* Gently place the tip into the groove. Make sure it sits neatly in the groove with the cantilever at the open end of the groove.&lt;br /&gt;
* Gently press down and slide the metal clip to the front until it locks the tip in place.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-tip.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Tip onto the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Connect the tip holder to the bottom of the scanner. Align the 4 pins to the matching sockets and press it gently but firmly. Make sure the tip is facing downwards.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Tighten the screw to lock the scan head. 📍Do not overtighten.&lt;br /&gt;
&#039;&#039;&#039;Starting Your AFM Session&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Launching the software&#039;&#039;&#039;&lt;br /&gt;
* Open Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Wait for the Dimension Icon window to load and automatically pop up.&lt;br /&gt;
Choosing Your Experiment Settings&lt;br /&gt;
* By default, the “ScanAsyst in Air” experiment is selected so you can directly click “Load Experiment”. You will hear a sound, and the laser will activate (red LED lights up).&lt;br /&gt;
&#039;&#039;&#039;SETUP Tab&#039;&#039;&#039;&lt;br /&gt;
 Adjust the illumination and zoom until the tip is visible on the screen. If you do not see the cantilever even at the lowest magnification, you may need to reposition the tip holder or replace the tip.&lt;br /&gt;
&#039;&#039;&#039;Probe Setup&#039;&#039;&#039;&lt;br /&gt;
* Check that the ScanAsyst-Air probe parameters are selected. Otherwise, choose the ScanAsyst-Air probe from the database.&lt;br /&gt;
&#039;&#039;&#039;Aligning the Laser&#039;&#039;&#039;&lt;br /&gt;
* Click “Move to the Alignment Station”.&lt;br /&gt;
* Use the top X-Y control knobs on the scanner to align the laser to the tip. Adjust the laser spot until the sum photodetector signal is at least 3.5V.&lt;br /&gt;
* Use the side X-Y control knobs on the scanner to align the laser at the center of the photodetector. Adjust the laser to center the red dot on the crosshair. Aim for ~ 0V offset on both axes but below 0.2V is acceptable.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-laser.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Focusing the tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Return from Alignment Station”.&lt;br /&gt;
* Use the Focus Controls (Up/Down arrows) to focus the tip of the cantilever.&lt;br /&gt;
* Adjust the illumination, zoom and focus until the tip image is sharp.&lt;br /&gt;
* Click near the tip apex (~ 7 µm) to mark the cantilever position. &lt;br /&gt;
&lt;br /&gt;
[[File:Figure-cantilever.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;NAVIGATE Tab&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Sample&#039;&#039;&#039;&lt;br /&gt;
* Make sure the stage is at “Sample Load Position”. &lt;br /&gt;
* Place your sample on the stage and turn on the vacuum.&lt;br /&gt;
* Use trackball or on-screen controls to move the sample under the tip.&lt;br /&gt;
* If you already scanned a sample before changing the tip and did not close the software, you can click “Sample Scan Position” to return to your previous scan position.&lt;br /&gt;
&#039;&#039;&#039;Focusing the Sample&#039;&#039;&#039; &lt;br /&gt;
* Choose “Sample (Default)” focus method if your sample has features, like lithography on the surface, you can use to identify the surface plane. Choose “Tip Reflection” for thin films.&lt;br /&gt;
* Use a low-speed setting.&lt;br /&gt;
* Use the Up/Down arrows (start with the Down arrow) to bring the sample into focus. For tip reflection, the mirror image of the cantilever should be brought into focus. &lt;br /&gt;
* Adjust the illumination, zoom and focus until the sample looks sharp and clear. 📍 Focus gradually to avoid tip crash. Moving too fast may break the tip!&lt;br /&gt;
* Close the AFM enclosure when done.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-focus.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Check Parameters&#039;&#039;&#039;&lt;br /&gt;
* Before scanning, confirm the basic scan settings (for standard use).&lt;br /&gt;
** Scan size: 500 nm&lt;br /&gt;
** Aspect ratio: 1.00&lt;br /&gt;
** X offset / Y offset: 0.000 nm&lt;br /&gt;
** Scan angle. 0.00°&lt;br /&gt;
** Scan rate: 1 Hz&lt;br /&gt;
** Samples per line: 256&lt;br /&gt;
** Spring constant: 0.4000 N/m&lt;br /&gt;
** Do not change other settings unless agreed with NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Engaging the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Engage” to lower the tip and start scanning.&lt;br /&gt;
&#039;&#039;&#039;Scanning &amp;amp; Data Collection&#039;&#039;&#039;&lt;br /&gt;
* Monitor the Trace/Retrace lines in the Scope window. They should have similar shapes but not necessarily overlapping. Assess whether the features look physical or noise-like.&lt;br /&gt;
* Increase the scan size in steps (2 µm, 10 µm, 50 µm, 90 µm) until you see the area of interest. Use the zoom or offset tool to center and choose scan direction.&lt;br /&gt;
* Before moving to other areas, click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Engage” again when ready for a new scan.&lt;br /&gt;
&#039;&#039;&#039;Saving Your Data&#039;&#039;&#039;&lt;br /&gt;
* Go to:&lt;br /&gt;
  Capture &amp;gt; Capture Filename &amp;gt; Change Directory &amp;gt; Rename File &amp;gt; OK&lt;br /&gt;
* Choose:&lt;br /&gt;
** Capture - captures a single scan&lt;br /&gt;
** Capture Continuous - captures every scan&lt;br /&gt;
** Capture Now - immediately captures whatever has been scanned since the beginning of the frame.&lt;br /&gt;
** Stop Capture - aborts the capture action.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-software.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Ending Your Session&#039;&#039;&#039;&lt;br /&gt;
* Click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Navigate”, then “Sample Load Position”.&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Turn off the vacuum and remove your sample.&lt;br /&gt;
  Tip Condition:&lt;br /&gt;
  If the tip is broken, replace and align it before ending your session.&lt;br /&gt;
  If the tip is still usable, exit Nanoscope 9.7 software (laser turns off).&lt;br /&gt;
* Close Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Close the AFM enclosure.&lt;br /&gt;
* Copy your data and fill in the session log. &lt;br /&gt;
* Clean up the workspace and dispose used items properly.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For help with scan settings and data analysis, contact NBI-Cleanroom staff.&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2691</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2691"/>
		<updated>2025-11-19T12:38:11Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&#039;&#039;&#039;Welcome to the NBI Cleanroom wiki!&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
This site contains public information for the users of the cleanroom and related facilities. All items are available &#039;&#039;&#039;without login&#039;&#039;&#039;. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki]. &lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| style=&amp;quot;width: 60%;&amp;quot; align=&amp;quot;center&amp;quot; &lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]&lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service &amp;amp; gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 49]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Al5(AlNQCP) is refilled and melted&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Available materials In, Ni, SiOx&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Scroll pump tip seal service is done!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 47 - experiencing delivery delays]. Once we receive it back, we will set up a bondhead with Au wire!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Dual PC is not working, the tool is okay to use with a single operating PC &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F prime]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Tue 18 Nov 2025&#039;&#039;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2690</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2690"/>
		<updated>2025-11-19T12:37:44Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&#039;&#039;&#039;Welcome to the NBI Cleanroom wiki!&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
This site contains public information for the users of the cleanroom and related facilities. All items are available &#039;&#039;&#039;without login&#039;&#039;&#039;. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki]. &lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| style=&amp;quot;width: 60%;&amp;quot; align=&amp;quot;center&amp;quot; &lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]&lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service &amp;amp; gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 49]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Al5(AlNQCP) is refilled and melted&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Available materials In, Ni, SiOx&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Scroll pump tip seal service is done!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 47 - experiencing delivery delays]. Once we receive it back, we will set up a bondhead with Au wire!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Dual PC is not working, the tool is okay to use with a single operating PC &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot;  | All good!.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F prime]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Tue 18 Nov 2025&#039;&#039;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2651</id>
		<title>Main Page</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Main_Page&amp;diff=2651"/>
		<updated>2025-11-07T09:06:20Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;&#039;&#039;&#039;Welcome to the NBI Cleanroom wiki!&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
This site contains public information for the users of the cleanroom and related facilities. All items are available &#039;&#039;&#039;without login&#039;&#039;&#039;. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki]. &lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| style=&amp;quot;width: 60%;&amp;quot; align=&amp;quot;center&amp;quot; &lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]&lt;br /&gt;
|- style=&amp;quot;text-align:center;&amp;quot;&lt;br /&gt;
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Tool down. Stage controller is being received next week [reassembling the tool on week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125 kV]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service &amp;amp; gun fillament exchange. [down time: Weeks 45 and 46]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair. Scheduled for evaluation in factory: Week 45.[estimated return: Week 50]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! Available materials In (x2), SiOx&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a new venting MAC valve from buch &amp;amp; holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! [Scheduled servicing of the scroll pump: Week 47]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;. The primary bondhead (SN:004) is in the factory for servicing [estimated return: end of Week 46]. Once we receive it back, we will set up a bondhead with Au wire!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Dual PC is not working, the tool is okay to use with a single operating PC &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot;  | System down. Planning to send parts for repair. Estimated lead time: min. 4 weeks.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F|JEOL JSM-7800F prime]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot;  | All good!&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Wed 5 Nov 2025&#039;&#039;&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2627</id>
		<title>Tools</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2627"/>
		<updated>2025-10-30T15:48:02Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]&lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Tool list ==&lt;br /&gt;
{| style=&amp;quot;width: 85%;&amp;quot;&lt;br /&gt;
|- style=&amp;quot;text-align:left;&amp;quot;&lt;br /&gt;
! Lithography !! Thin film &amp;amp; III-Vs !! Characterization !! Other&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot; &lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
&amp;lt;!-- * [[Süss mask aligner]] --&amp;gt;&lt;br /&gt;
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
* [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[AJA systems]]&lt;br /&gt;
* [[Plassys Evaporator]]&lt;br /&gt;
* [[E-Gun evaporator]]&lt;br /&gt;
&amp;lt;!-- * [[Edwards evaporator|Edwards thermal evaporator]] --&amp;gt;&lt;br /&gt;
* [[Laurell spinners]]&lt;br /&gt;
* [[Cambridge ALD]]&lt;br /&gt;
* [[Leica sputter coater]]&lt;br /&gt;
* [[MBE]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
* [[Raith eLine]]&lt;br /&gt;
&amp;lt;!-- * [[Philips TEM]] --&amp;gt;&lt;br /&gt;
* [[Tencor profilometer]]&lt;br /&gt;
* [[Alpha-SE ellipsometer]]&lt;br /&gt;
* [[Sensofar optical profiler]]&lt;br /&gt;
* [[Olympus microscopes]]&lt;br /&gt;
* [[Lynx EVO stereomicroscope]]&lt;br /&gt;
* [[Bruker Dimension Icon AFM]]&lt;br /&gt;
* [[Filmetrics reflectometer]]&lt;br /&gt;
* [[Probe station]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Süss scriber|Manual Süss scriber]]&lt;br /&gt;
* [[Loomis scriber|Automatic Loomis scriber]]&lt;br /&gt;
* [[Dicing saw]]&lt;br /&gt;
* [[AccuThermo RTA]]&lt;br /&gt;
* [[Biorad]]&lt;br /&gt;
* [[Plasma-Preen asher]]&lt;br /&gt;
* [[Diener plasma asher]]&lt;br /&gt;
* [[Tergeo plasma asher]]&lt;br /&gt;
* [[FS bonder]]&lt;br /&gt;
* [[K&amp;amp;S bonder]]&lt;br /&gt;
* [[Micromanipulator]]&lt;br /&gt;
* [[Präzitherm hotplates]]&lt;br /&gt;
* [[Critical point dryer]]&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Tool down. Stage controller is being received next week [reassembling the tool on week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125kV EBL]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service &amp;amp; gun fillament exchange. [down time: Weeks 45 and 46]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a new venting MAC valve from buch &amp;amp; holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! [Scheduled servicing of the scroll pump: Week 47]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Dual PC is not working, the tool is okay to use with a single operating PC &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot;  | System down. Troubleshooting in progress.&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Thursday 30 Oct 2025&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
== Tool access requirement guidelines ==&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: center;&amp;quot;&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; align=&amp;quot;right&amp;quot;  | &lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Bachelor&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Master&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | PhD&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Postdoc&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; |  [[Raith eLine|eLine]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA Systems|AJAs]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator|Plassys]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator|E-gun]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Leica sputter coater|Leica sputter]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Philips TEM|TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tencor profilometer|Profilometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Alpha-SE Ellipsometer|Ellipsometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
&amp;lt;!-- | style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Sensofar optical profiler|Sensofar]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|- --&amp;gt;&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Filmetrics reflectometer|Filmetrics]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Süss scriber|Manual scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AccuThermo RTA|RTA]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Biorad]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plasma-Preen asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tergeo Plasma Asher|Tergeo asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Laurell spinners|Spinners]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2626</id>
		<title>Tools</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2626"/>
		<updated>2025-10-30T15:47:29Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]&lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Tool list ==&lt;br /&gt;
{| style=&amp;quot;width: 85%;&amp;quot;&lt;br /&gt;
|- style=&amp;quot;text-align:left;&amp;quot;&lt;br /&gt;
! Lithography !! Thin film &amp;amp; III-Vs !! Characterization !! Other&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot; &lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
&amp;lt;!-- * [[Süss mask aligner]] --&amp;gt;&lt;br /&gt;
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
* [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[AJA systems]]&lt;br /&gt;
* [[Plassys Evaporator]]&lt;br /&gt;
* [[E-Gun evaporator]]&lt;br /&gt;
&amp;lt;!-- * [[Edwards evaporator|Edwards thermal evaporator]] --&amp;gt;&lt;br /&gt;
* [[Laurell spinners]]&lt;br /&gt;
* [[Cambridge ALD]]&lt;br /&gt;
* [[Leica sputter coater]]&lt;br /&gt;
* [[MBE]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
* [[Raith eLine]]&lt;br /&gt;
&amp;lt;!-- * [[Philips TEM]] --&amp;gt;&lt;br /&gt;
* [[Tencor profilometer]]&lt;br /&gt;
* [[Alpha-SE ellipsometer]]&lt;br /&gt;
* [[Sensofar optical profiler]]&lt;br /&gt;
* [[Olympus microscopes]]&lt;br /&gt;
* [[Lynx EVO stereomicroscope]]&lt;br /&gt;
* [[Bruker Dimension Icon AFM]]&lt;br /&gt;
* [[Filmetrics reflectometer]]&lt;br /&gt;
* [[Probe station]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Süss scriber|Manual Süss scriber]]&lt;br /&gt;
* [[Loomis scriber|Automatic Loomis scriber]]&lt;br /&gt;
* [[Dicing saw]]&lt;br /&gt;
* [[AccuThermo RTA]]&lt;br /&gt;
* [[Biorad]]&lt;br /&gt;
* [[Plasma-Preen asher]]&lt;br /&gt;
* [[Diener plasma asher]]&lt;br /&gt;
* [[Tergeo plasma asher]]&lt;br /&gt;
* [[FS bonder]]&lt;br /&gt;
* [[K&amp;amp;S bonder]]&lt;br /&gt;
* [[Micromanipulator]]&lt;br /&gt;
* [[Präzitherm hotplates]]&lt;br /&gt;
* [[Critical point dryer]]&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Tool down. Stage controller is being received next week [reassembling the tool on week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125kV EBL]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service &amp;amp; gun fillament exchange. [down time: Weeks 45 and 46]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a new venting MAC valve from buch &amp;amp; holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! [Scheduled servicing of the scroll pump: Week 47]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Dual PC is not working, the tool is okay to use with a single operating PC &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | System down. Troubleshooting in progress.&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Thursday 30 Oct 2025&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
== Tool access requirement guidelines ==&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: center;&amp;quot;&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; align=&amp;quot;right&amp;quot;  | &lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Bachelor&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Master&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | PhD&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Postdoc&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; |  [[Raith eLine|eLine]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA Systems|AJAs]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator|Plassys]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator|E-gun]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Leica sputter coater|Leica sputter]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Philips TEM|TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tencor profilometer|Profilometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Alpha-SE Ellipsometer|Ellipsometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
&amp;lt;!-- | style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Sensofar optical profiler|Sensofar]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|- --&amp;gt;&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Filmetrics reflectometer|Filmetrics]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Süss scriber|Manual scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AccuThermo RTA|RTA]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Biorad]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plasma-Preen asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tergeo Plasma Asher|Tergeo asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Laurell spinners|Spinners]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2625</id>
		<title>Tools</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&amp;diff=2625"/>
		<updated>2025-10-30T15:44:27Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Current tool status */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.&lt;br /&gt;
This includes basic instruments such as hotplates and microscopes.&lt;br /&gt;
For &#039;&#039;&#039;all&#039;&#039;&#039; training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]&lt;br /&gt;
A cleanroom staff member will typically respond within one workday.&lt;br /&gt;
Do not contact individual staff members for training. &lt;br /&gt;
&lt;br /&gt;
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.&lt;br /&gt;
&lt;br /&gt;
== Tool list ==&lt;br /&gt;
{| style=&amp;quot;width: 85%;&amp;quot;&lt;br /&gt;
|- style=&amp;quot;text-align:left;&amp;quot;&lt;br /&gt;
! Lithography !! Thin film &amp;amp; III-Vs !! Characterization !! Other&lt;br /&gt;
|- valign=&amp;quot;top&amp;quot; &lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
&amp;lt;!-- * [[Süss mask aligner]] --&amp;gt;&lt;br /&gt;
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
* [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[AJA systems]]&lt;br /&gt;
* [[Plassys Evaporator]]&lt;br /&gt;
* [[E-Gun evaporator]]&lt;br /&gt;
&amp;lt;!-- * [[Edwards evaporator|Edwards thermal evaporator]] --&amp;gt;&lt;br /&gt;
* [[Laurell spinners]]&lt;br /&gt;
* [[Cambridge ALD]]&lt;br /&gt;
* [[Leica sputter coater]]&lt;br /&gt;
* [[MBE]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[JEOL 7800F|JEOL JSM-7800F]]&lt;br /&gt;
* [[Raith eLine]]&lt;br /&gt;
&amp;lt;!-- * [[Philips TEM]] --&amp;gt;&lt;br /&gt;
* [[Tencor profilometer]]&lt;br /&gt;
* [[Alpha-SE ellipsometer]]&lt;br /&gt;
* [[Sensofar optical profiler]]&lt;br /&gt;
* [[Olympus microscopes]]&lt;br /&gt;
* [[Lynx EVO stereomicroscope]]&lt;br /&gt;
* [[Bruker Dimension Icon AFM]]&lt;br /&gt;
* [[Filmetrics reflectometer]]&lt;br /&gt;
* [[Probe station]]&lt;br /&gt;
| style=&amp;quot;width: 20%;&amp;quot; |&lt;br /&gt;
* [[Süss scriber|Manual Süss scriber]]&lt;br /&gt;
* [[Loomis scriber|Automatic Loomis scriber]]&lt;br /&gt;
* [[Dicing saw]]&lt;br /&gt;
* [[AccuThermo RTA]]&lt;br /&gt;
* [[Biorad]]&lt;br /&gt;
* [[Plasma-Preen asher]]&lt;br /&gt;
* [[Diener plasma asher]]&lt;br /&gt;
* [[Tergeo plasma asher]]&lt;br /&gt;
* [[FS bonder]]&lt;br /&gt;
* [[K&amp;amp;S bonder]]&lt;br /&gt;
* [[Micromanipulator]]&lt;br /&gt;
* [[Präzitherm hotplates]]&lt;br /&gt;
* [[Critical point dryer]]&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
==Current tool status==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: left;&amp;quot;&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|Heidelberg LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Raith eLine|Raith eLine 30 kV EBL/SEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Tool down. Stage controller is being received next week [reassembling the tool on week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_7000|Elionix 7000 100 kV EBL]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix_F-125|Elionix F-125 125kV EBL]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | Annual service &amp;amp; gun fillament exchange. [down time: Weeks 45 and 46]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (e-gun)]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA1 (milling and sputtering)]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA systems|AJA2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD1]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Waiting for a new venting MAC valve from buch &amp;amp; holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD2]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! [Scheduled servicing of the scroll pump: Week 47]&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[FS bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good! &#039;&#039;&#039; Please return the hex Wera screwdrivers&#039;&#039;&#039;. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[K&amp;amp;S bonder]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #FFD700&amp;quot; | Dual PC is not working, the tool is okay to use with a single operating PC &lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | All good!&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | System down. Troubleshooting in progress.&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;List updated: Thursday 30 Oct 2025&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
== Tool access requirement guidelines ==&lt;br /&gt;
&lt;br /&gt;
{| cellspacing=0px style=&amp;quot;text-align: center;&amp;quot;&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; align=&amp;quot;right&amp;quot;  | &lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Bachelor&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Master&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | PhD&lt;br /&gt;
! scope=&amp;quot;col&amp;quot; width=&amp;quot;20%&amp;quot; | Postdoc&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; |  [[Raith eLine|eLine]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Elionix]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Heidelberg µPG 501|LED writer]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AJA Systems|AJAs]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plassys Evaporator|Plassys]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[E-Gun evaporator|E-gun]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Cambridge ALD|ALD]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Leica sputter coater|Leica sputter]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[JEOL 7800F]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Philips TEM|TEM]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tencor profilometer|Profilometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Alpha-SE Ellipsometer|Ellipsometer]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
&amp;lt;!-- | style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Sensofar optical profiler|Sensofar]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|- --&amp;gt;&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Bruker Dimension Icon AFM|AFM]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Filmetrics reflectometer|Filmetrics]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;padding-bottom:6px;&amp;quot; |&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Süss scriber|Manual scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Dicing saw]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Loomis scriber]]&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
| style=&amp;quot;background-color: #ff9f9f&amp;quot; | No&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[AccuThermo RTA|RTA]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Biorad]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Plasma-Preen asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Tergeo Plasma Asher|Tergeo asher]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|-&lt;br /&gt;
| style=&amp;quot;text-align:right; padding-right:6px;&amp;quot; | [[Laurell spinners|Spinners]]&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
| style=&amp;quot;background-color: #c6e0b4&amp;quot; | Yes&lt;br /&gt;
|}&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2487</id>
		<title>Bruker Dimension Icon AFM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2487"/>
		<updated>2025-07-18T14:15:28Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = AFM_ICON.jpeg&lt;br /&gt;
|toolfullname = Dimension Icon PT&lt;br /&gt;
|company = Bruker&lt;br /&gt;
|description = Atomic Force Microscope&lt;br /&gt;
|website = https://www.bruker.com/en/products-and-solutions/microscopes/materials-afm/dimension-icon-afm.html&lt;br /&gt;
|location = Characterization room (03.01.K08)&lt;br /&gt;
|primary = Nikki&lt;br /&gt;
|secondary = Zhe&lt;br /&gt;
|limits = None&lt;br /&gt;
}}&lt;br /&gt;
Bruker Dimension Icon is an atomic force microscope used for accurate surface topography measurements.&lt;br /&gt;
Users can measure film thickness, roughness and other topographical data characteristics with Ångstrom accuracy.&lt;br /&gt;
&lt;br /&gt;
Other alternatives for surface characterization at the [[Main Page|NBI cleanroom]] facilities:&lt;br /&gt;
* [[Tencor profilometer]] for step height and profile roughness&lt;br /&gt;
* [[Alpha-SE ellipsometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[Filmetrics reflectometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[JEOL 7800F]] SEM for film thickness by observing material cross-sections, elemental analysis&lt;br /&gt;
== &#039;&#039;&#039;Quick-Start Instruction Manual for ScanAsyst Operation&#039;&#039;&#039; ==&lt;br /&gt;
&#039;&#039;&#039;Before You Begin&#039;&#039;&#039;&lt;br /&gt;
* Complete and pass AFM training by NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Before Your Session&#039;&#039;&#039;&lt;br /&gt;
* Make sure your sample is ready.&lt;br /&gt;
* Book your session in advance and be on time.&lt;br /&gt;
&#039;&#039;&#039;During Your Session&#039;&#039;&#039;&lt;br /&gt;
 &#039;&#039;&#039;Laboratory Reminders&#039;&#039;&#039;&lt;br /&gt;
 * Wear shoe covers in the lab.&lt;br /&gt;
 * Wear nitrile gloves before touching the tool.&lt;br /&gt;
 * Keep the workstation clean and tidy.&lt;br /&gt;
 * Make sure both main and support PCs are ON.&lt;br /&gt;
 * Ensure AFM (Nanoscope 9.7) software is closed before starting. This ensures the laser is OFF.&lt;br /&gt;
 * Check if a tip is already mounted. Use logbook (AFM Log) on the support PC to confirm.&lt;br /&gt;
 * If needed, load or change the tip (see next section).&lt;br /&gt;
&#039;&#039;&#039;Unloading the Tip Holder from the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Make sure the scan head is up, and the sample stage is not directly under.&lt;br /&gt;
* Loosen the side screw a few turns to release the scan head. 📍Do not remove the screw. &lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Gently pull out the tip holder from the bottom of the scanner.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Mount the tip holder on the loading station. The loading station is a black, round block with 3 sets of probe-mounting slots.&lt;br /&gt;
* Place the loading station on the table.&lt;br /&gt;
&#039;&#039;&#039;Mounting the Tip&#039;&#039;&#039;&lt;br /&gt;
* Pick the right tip for your scan. Tip specifications can be found on the Gel-Pak box. The default tip for ScanAsyst mode is “ScanAsyst Air”. The tip holder looks like a small circuit board with 4-holes and a metal clip to hold the tip in position.&lt;br /&gt;
* Gently press down and slide the metal clip to the back until the groove (slot for the tip) is fully visible.&lt;br /&gt;
* Remove the old tip from the holder. Discard by placing it in a Gel-Pak box (aligning the tip horizontally).&lt;br /&gt;
* Use tweezers to carefully lift a new tip (by its side) from the Gel-Pak box. New tips are aligned vertically in the Gel-Pak box. 📍Do not flip or drop the tip!&lt;br /&gt;
* Gently place the tip into the groove. Make sure it sits neatly in the groove with the cantilever at the open end of the groove.&lt;br /&gt;
* Gently press down and slide the metal clip to the front until it locks the tip in place.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-tip.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Tip onto the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Connect the tip holder to the bottom of the scanner. Align the 4 pins to the matching sockets and press it gently but firmly. Make sure the tip is facing downwards.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Tighten the screw to lock the scan head. 📍Do not overtighten.&lt;br /&gt;
&#039;&#039;&#039;Starting Your AFM Session&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Launching the software&#039;&#039;&#039;&lt;br /&gt;
* Open Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Wait for the Dimension Icon window to load and automatically pop up.&lt;br /&gt;
Choosing Your Experiment Settings&lt;br /&gt;
* By default, the “ScanAsyst in Air” experiment is selected so you can directly click “Load Experiment”. You will hear a sound, and the laser will activate (red LED lights up).&lt;br /&gt;
&#039;&#039;&#039;SETUP Tab&#039;&#039;&#039;&lt;br /&gt;
 Adjust the illumination and zoom until the tip is visible on the screen. If you do not see the cantilever even at the lowest magnification, you may need to reposition the tip holder or replace the tip.&lt;br /&gt;
&#039;&#039;&#039;Probe Setup&#039;&#039;&#039;&lt;br /&gt;
* Check that the ScanAsyst-Air probe parameters are selected. Otherwise, choose the ScanAsyst-Air probe from the database.&lt;br /&gt;
&#039;&#039;&#039;Aligning the Laser&#039;&#039;&#039;&lt;br /&gt;
* Click “Move to the Alignment Station”.&lt;br /&gt;
* Use the top X-Y control knobs on the scanner to align the laser to the tip. Adjust the laser spot until the sum photodetector signal is at least 3.5V.&lt;br /&gt;
* Use the side X-Y control knobs on the scanner to align the laser at the center of the photodetector. Adjust the laser to center the red dot on the crosshair. Aim for ~ 0V offset on both axes but below 0.2V is acceptable.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-laser.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Focusing the tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Return from Alignment Station”.&lt;br /&gt;
* Use the Focus Controls (Up/Down arrows) to focus the tip of the cantilever.&lt;br /&gt;
* Adjust the illumination, zoom and focus until the tip image is sharp.&lt;br /&gt;
* Click near the tip apex (~ 7 µm) to mark the cantilever position. &lt;br /&gt;
&lt;br /&gt;
[[File:Figure-cantilever.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;NAVIGATE Tab&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Sample&#039;&#039;&#039;&lt;br /&gt;
* Make sure the stage is at “Sample Load Position”. &lt;br /&gt;
* Place your sample on the stage and turn on the vacuum.&lt;br /&gt;
* Use trackball or on-screen controls to move the sample under the tip.&lt;br /&gt;
* If you already scanned a sample before changing the tip and did not close the software, you can click “Sample Scan Position” to return to your previous scan position.&lt;br /&gt;
&#039;&#039;&#039;Focusing the Sample&#039;&#039;&#039; &lt;br /&gt;
* Choose “Sample (Default)” focus method if your sample has features, like lithography on the surface, you can use to identify the surface plane. Choose “Tip Reflection” for thin films.&lt;br /&gt;
* Use a low-speed setting.&lt;br /&gt;
* Use the Up/Down arrows (start with the Down arrow) to bring the sample into focus. For tip reflection, the mirror image of the cantilever should be brought into focus. &lt;br /&gt;
* Adjust the illumination, zoom and focus until the sample looks sharp and clear. 📍 Focus gradually to avoid tip crash. Moving too fast may break the tip!&lt;br /&gt;
* Close the AFM enclosure when done.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-focus.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Check Parameters&#039;&#039;&#039;&lt;br /&gt;
* Before scanning, confirm the basic scan settings (for standard use).&lt;br /&gt;
** Scan size: 500 nm&lt;br /&gt;
** Aspect ratio: 1.00&lt;br /&gt;
** X offset / Y offset: 0.000 nm&lt;br /&gt;
** Scan angle. 0.00°&lt;br /&gt;
** Scan rate: 1 Hz&lt;br /&gt;
** Samples per line: 256&lt;br /&gt;
** Spring constant: 0.4000 N/m&lt;br /&gt;
** Do not change other settings unless agreed with NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Engaging the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Engage” to lower the tip and start scanning.&lt;br /&gt;
&#039;&#039;&#039;Scanning &amp;amp; Data Collection&#039;&#039;&#039;&lt;br /&gt;
* Monitor the Trace/Retrace lines in the Scope window. They should have similar shapes but not necessarily overlapping. Assess whether the features look physical or noise-like.&lt;br /&gt;
* Increase the scan size in steps (2 µm, 10 µm, 50 µm, 90 µm) until you see the area of interest. Use the zoom or offset tool to center and choose scan direction.&lt;br /&gt;
* Before moving to other areas, click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Engage” again when ready for a new scan.&lt;br /&gt;
&#039;&#039;&#039;Saving Your Data&#039;&#039;&#039;&lt;br /&gt;
* Go to:&lt;br /&gt;
  Capture &amp;gt; Capture Filename &amp;gt; Change Directory &amp;gt; Rename File &amp;gt; OK&lt;br /&gt;
* Choose:&lt;br /&gt;
** Capture - captures a single scan&lt;br /&gt;
** Capture Continuous - captures every scan&lt;br /&gt;
** Capture Now - immediately captures whatever has been scanned since the beginning of the frame.&lt;br /&gt;
** Stop Capture - aborts the capture action.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-software.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Ending Your Session&#039;&#039;&#039;&lt;br /&gt;
* Click “Withdraw” to safely lift the tip.&lt;br /&gt;
*	Click “Navigate”, then “Sample Load Position”.&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Turn off the vacuum and remove your sample.&lt;br /&gt;
  Tip Condition:&lt;br /&gt;
  If the tip is broken, replace and align it before ending your session.&lt;br /&gt;
  If the tip is still usable, exit Nanoscope 9.7 software (laser turns off).&lt;br /&gt;
*Close the AFM enclosure.&lt;br /&gt;
* Copy your data and fill in the session log. &lt;br /&gt;
* Clean up the workspace and dispose used items properly.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For help with scan settings and data analysis, contact NBI-Cleanroom staff.&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2486</id>
		<title>Bruker Dimension Icon AFM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2486"/>
		<updated>2025-07-18T14:13:47Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: &lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = AFM_ICON.jpeg&lt;br /&gt;
|toolfullname = Dimension Icon PT&lt;br /&gt;
|company = Bruker&lt;br /&gt;
|description = Atomic Force Microscope&lt;br /&gt;
|website = https://www.bruker.com/en/products-and-solutions/microscopes/materials-afm/dimension-icon-afm.html&lt;br /&gt;
|location = Characterization room (03.01.K08)&lt;br /&gt;
|primary = Nikki&lt;br /&gt;
|secondary = Zhe&lt;br /&gt;
|limits = None&lt;br /&gt;
}}&lt;br /&gt;
Bruker Dimension Icon is an atomif force microscope used for accurate surface topography measurements.&lt;br /&gt;
Users can measure tilm thickness, roughness and get other topographical data characteristics with Ångstrom accuracy.&lt;br /&gt;
&lt;br /&gt;
Other alternatives for surface characterization at the [[Main Page|NBI cleanroom]] facilities:&lt;br /&gt;
* [[Tencor profilometer]] for step height and profile roughness&lt;br /&gt;
* [[Alpha-SE ellipsometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[Filmetrics reflectometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[JEOL 7800F]] SEM for film thickness by observing material cross-sections, elemental analysis&lt;br /&gt;
== &#039;&#039;&#039;Quick-Start Instruction Manual for ScanAsyst Operation&#039;&#039;&#039; ==&lt;br /&gt;
&#039;&#039;&#039;Before You Begin&#039;&#039;&#039;&lt;br /&gt;
* Complete and pass AFM training by NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Before Your Session&#039;&#039;&#039;&lt;br /&gt;
* Make sure your sample is ready.&lt;br /&gt;
* Book your session in advance and be on time.&lt;br /&gt;
&#039;&#039;&#039;During Your Session&#039;&#039;&#039;&lt;br /&gt;
 &#039;&#039;&#039;Laboratory Reminders&#039;&#039;&#039;&lt;br /&gt;
 * Wear shoe covers in the lab.&lt;br /&gt;
 * Wear nitrile gloves before touching the tool.&lt;br /&gt;
 * Keep the workstation clean and tidy.&lt;br /&gt;
 * Make sure both main and support PCs are ON.&lt;br /&gt;
 * Ensure AFM (Nanoscope 9.7) software is closed before starting. This ensures the laser is OFF.&lt;br /&gt;
 * Check if a tip is already mounted. Use logbook (AFM Log) on the support PC to confirm.&lt;br /&gt;
 * If needed, load or change the tip (see next section).&lt;br /&gt;
&#039;&#039;&#039;Unloading the Tip Holder from the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Make sure the scan head is up, and the sample stage is not directly under.&lt;br /&gt;
* Loosen the side screw a few turns to release the scan head. 📍Do not remove the screw. &lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Gently pull out the tip holder from the bottom of the scanner.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Mount the tip holder on the loading station. The loading station is a black, round block with 3 sets of probe-mounting slots.&lt;br /&gt;
* Place the loading station on the table.&lt;br /&gt;
&#039;&#039;&#039;Mounting the Tip&#039;&#039;&#039;&lt;br /&gt;
* Pick the right tip for your scan. Tip specifications can be found on the Gel-Pak box. The default tip for ScanAsyst mode is “ScanAsyst Air”. The tip holder looks like a small circuit board with 4-holes and a metal clip to hold the tip in position.&lt;br /&gt;
* Gently press down and slide the metal clip to the back until the groove (slot for the tip) is fully visible.&lt;br /&gt;
* Remove the old tip from the holder. Discard by placing it in a Gel-Pak box (aligning the tip horizontally).&lt;br /&gt;
* Use tweezers to carefully lift a new tip (by its side) from the Gel-Pak box. New tips are aligned vertically in the Gel-Pak box. 📍Do not flip or drop the tip!&lt;br /&gt;
* Gently place the tip into the groove. Make sure it sits neatly in the groove with the cantilever at the open end of the groove.&lt;br /&gt;
* Gently press down and slide the metal clip to the front until it locks the tip in place.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-tip.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Tip onto the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Connect the tip holder to the bottom of the scanner. Align the 4 pins to the matching sockets and press it gently but firmly. Make sure the tip is facing downwards.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Tighten the screw to lock the scan head. 📍Do not overtighten.&lt;br /&gt;
&#039;&#039;&#039;Starting Your AFM Session&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Launching the software&#039;&#039;&#039;&lt;br /&gt;
* Open Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Wait for the Dimension Icon window to load and automatically pop up.&lt;br /&gt;
Choosing Your Experiment Settings&lt;br /&gt;
* By default, the “ScanAsyst in Air” experiment is selected so you can directly click “Load Experiment”. You will hear a sound, and the laser will activate (red LED lights up).&lt;br /&gt;
&#039;&#039;&#039;SETUP Tab&#039;&#039;&#039;&lt;br /&gt;
 Adjust the illumination and zoom until the tip is visible on the screen. If you do not see the cantilever even at the lowest magnification, you may need to reposition the tip holder or replace the tip.&lt;br /&gt;
&#039;&#039;&#039;Probe Setup&#039;&#039;&#039;&lt;br /&gt;
* Check that the ScanAsyst-Air probe parameters are selected. Otherwise, choose the ScanAsyst-Air probe from the database.&lt;br /&gt;
&#039;&#039;&#039;Aligning the Laser&#039;&#039;&#039;&lt;br /&gt;
* Click “Move to the Alignment Station”.&lt;br /&gt;
* Use the top X-Y control knobs on the scanner to align the laser to the tip. Adjust the laser spot until the sum photodetector signal is at least 3.5V.&lt;br /&gt;
* Use the side X-Y control knobs on the scanner to align the laser at the center of the photodetector. Adjust the laser to center the red dot on the crosshair. Aim for ~ 0V offset on both axes but below 0.2V is acceptable.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-laser.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Focusing the tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Return from Alignment Station”.&lt;br /&gt;
* Use the Focus Controls (Up/Down arrows) to focus the tip of the cantilever.&lt;br /&gt;
* Adjust the illumination, zoom and focus until the tip image is sharp.&lt;br /&gt;
* Click near the tip apex (~ 7 µm) to mark the cantilever position. &lt;br /&gt;
&lt;br /&gt;
[[File:Figure-cantilever.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;NAVIGATE Tab&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Sample&#039;&#039;&#039;&lt;br /&gt;
* Make sure the stage is at “Sample Load Position”. &lt;br /&gt;
* Place your sample on the stage and turn on the vacuum.&lt;br /&gt;
* Use trackball or on-screen controls to move the sample under the tip.&lt;br /&gt;
* If you already scanned a sample before changing the tip and did not close the software, you can click “Sample Scan Position” to return to your previous scan position.&lt;br /&gt;
&#039;&#039;&#039;Focusing the Sample&#039;&#039;&#039; &lt;br /&gt;
* Choose “Sample (Default)” focus method if your sample has features, like lithography on the surface, you can use to identify the surface plane. Choose “Tip Reflection” for thin films.&lt;br /&gt;
* Use a low-speed setting.&lt;br /&gt;
* Use the Up/Down arrows (start with the Down arrow) to bring the sample into focus. For tip reflection, the mirror image of the cantilever should be brought into focus. &lt;br /&gt;
* Adjust the illumination, zoom and focus until the sample looks sharp and clear. 📍 Focus gradually to avoid tip crash. Moving too fast may break the tip!&lt;br /&gt;
* Close the AFM enclosure when done.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-focus.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Check Parameters&#039;&#039;&#039;&lt;br /&gt;
* Before scanning, confirm the basic scan settings (for standard use).&lt;br /&gt;
** Scan size: 500 nm&lt;br /&gt;
** Aspect ratio: 1.00&lt;br /&gt;
** X offset / Y offset: 0.000 nm&lt;br /&gt;
** Scan angle. 0.00°&lt;br /&gt;
** Scan rate: 1 Hz&lt;br /&gt;
** Samples per line: 256&lt;br /&gt;
** Spring constant: 0.4000 N/m&lt;br /&gt;
** Do not change other settings unless agreed with NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Engaging the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Engage” to lower the tip and start scanning.&lt;br /&gt;
&#039;&#039;&#039;Scanning &amp;amp; Data Collection&#039;&#039;&#039;&lt;br /&gt;
* Monitor the Trace/Retrace lines in the Scope window. They should have similar shapes but not necessarily overlapping. Assess whether the features look physical or noise-like.&lt;br /&gt;
* Increase the scan size in steps (2 µm, 10 µm, 50 µm, 90 µm) until you see the area of interest. Use the zoom or offset tool to center and choose scan direction.&lt;br /&gt;
* Before moving to other areas, click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Engage” again when ready for a new scan.&lt;br /&gt;
&#039;&#039;&#039;Saving Your Data&#039;&#039;&#039;&lt;br /&gt;
* Go to:&lt;br /&gt;
  Capture &amp;gt; Capture Filename &amp;gt; Change Directory &amp;gt; Rename File &amp;gt; OK&lt;br /&gt;
* Choose:&lt;br /&gt;
** Capture - captures a single scan&lt;br /&gt;
** Capture Continuous - captures every scan&lt;br /&gt;
** Capture Now - immediately captures whatever has been scanned since the beginning of the frame.&lt;br /&gt;
** Stop Capture - aborts the capture action.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-software.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Ending Your Session&#039;&#039;&#039;&lt;br /&gt;
* Click “Withdraw” to safely lift the tip.&lt;br /&gt;
*	Click “Navigate”, then “Sample Load Position”.&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Turn off the vacuum and remove your sample.&lt;br /&gt;
  Tip Condition:&lt;br /&gt;
  If the tip is broken, replace and align it before ending your session.&lt;br /&gt;
  If the tip is still usable, exit Nanoscope 9.7 software (laser turns off).&lt;br /&gt;
*Close the AFM enclosure.&lt;br /&gt;
* Copy your data and fill in the session log. &lt;br /&gt;
* Clean up the workspace and dispose used items properly.&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For help with scan settings and data analysis, contact NBI-Cleanroom staff.&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2485</id>
		<title>Bruker Dimension Icon AFM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2485"/>
		<updated>2025-07-18T14:07:25Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Quick-Start Instruction Manual for ScanAsyst Operation */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = AFM_ICON.jpeg&lt;br /&gt;
|toolfullname = Dimension Icon PT&lt;br /&gt;
|company = Bruker&lt;br /&gt;
|description = Atomic Force Microscope&lt;br /&gt;
|website = https://www.bruker.com/en/products-and-solutions/microscopes/materials-afm/dimension-icon-afm.html&lt;br /&gt;
|location = Characterization room (03.01.K08)&lt;br /&gt;
|primary = Nikki&lt;br /&gt;
|secondary = Zhe&lt;br /&gt;
|limits = None&lt;br /&gt;
}}&lt;br /&gt;
Bruker Dimension Icon is an atomif force microscope used for accurate surface topography measurements.&lt;br /&gt;
Users can measure tilm thickness, roughness and get other topographical data characteristics with Ångstrom accuracy.&lt;br /&gt;
&lt;br /&gt;
Other alternatives for surface characterization at the [[Main Page|NBI cleanroom]] facilities:&lt;br /&gt;
* [[Tencor profilometer]] for step height and profile roughness&lt;br /&gt;
* [[Alpha-SE ellipsometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[Filmetrics reflectometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[JEOL 7800F]] SEM for film thickness by observing material cross-sections, elemental analysis&lt;br /&gt;
== &#039;&#039;&#039;Quick-Start Instruction Manual for ScanAsyst Operation&#039;&#039;&#039; ==&lt;br /&gt;
&#039;&#039;&#039;Before You Begin&#039;&#039;&#039;&lt;br /&gt;
* Complete and pass AFM training by NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Before Your Session&#039;&#039;&#039;&lt;br /&gt;
* Make sure your sample is ready.&lt;br /&gt;
* Book your session in advance and be on time.&lt;br /&gt;
&#039;&#039;&#039;During Your Session&#039;&#039;&#039;&lt;br /&gt;
 &#039;&#039;&#039;Laboratory Reminders&#039;&#039;&#039;&lt;br /&gt;
 * Wear shoe covers in the lab.&lt;br /&gt;
 * Wear nitrile gloves before touching the tool.&lt;br /&gt;
 * Keep the workstation clean and tidy.&lt;br /&gt;
 * Make sure both main and support PCs are ON.&lt;br /&gt;
 * Ensure AFM (Nanoscope 9.7) software is closed before starting. This ensures the laser is OFF.&lt;br /&gt;
 * Check if a tip is already mounted. Use logbook (AFM Log) on the support PC to confirm.&lt;br /&gt;
 * If needed, load or change the tip (see next section).&lt;br /&gt;
&#039;&#039;&#039;Unloading the Tip Holder from the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Make sure the scan head is up, and the sample stage is not directly under.&lt;br /&gt;
* Loosen the side screw a few turns to release the scan head. 📍Do not remove the screw. &lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Gently pull out the tip holder from the bottom of the scanner.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Mount the tip holder on the loading station. The loading station is a black, round block with 3 sets of probe-mounting slots.&lt;br /&gt;
* Place the loading station on the table.&lt;br /&gt;
&#039;&#039;&#039;Mounting the Tip&#039;&#039;&#039;&lt;br /&gt;
* Pick the right tip for your scan. Tip specifications can be found on the Gel-Pak box. The default tip for ScanAsyst mode is “ScanAsyst Air”. The tip holder looks like a small circuit board with 4-holes and a metal clip to hold the tip in position.&lt;br /&gt;
* Gently press down and slide the metal clip to the back until the groove (slot for the tip) is fully visible.&lt;br /&gt;
* Remove the old tip from the holder. Discard by placing it in a Gel-Pak box (aligning the tip horizontally).&lt;br /&gt;
* Use tweezers to carefully lift a new tip (by its side) from the Gel-Pak box. New tips are aligned vertically in the Gel-Pak box. 📍Do not flip or drop the tip!&lt;br /&gt;
* Gently place the tip into the groove. Make sure it sits neatly in the groove with the cantilever at the open end of the groove.&lt;br /&gt;
* Gently press down and slide the metal clip to the front until it locks the tip in place.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-tip.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Tip onto the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Connect the tip holder to the bottom of the scanner. Align the 4 pins to the matching sockets and press it gently but firmly. Make sure the tip is facing downwards.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Tighten the screw to lock the scan head. 📍Do not overtighten.&lt;br /&gt;
&#039;&#039;&#039;Starting Your AFM Session&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Launching the software&#039;&#039;&#039;&lt;br /&gt;
* Open Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Wait for the Dimension Icon window to load and automatically pop up.&lt;br /&gt;
Choosing Your Experiment Settings&lt;br /&gt;
* By default, the “ScanAsyst in Air” experiment is selected so you can directly click “Load Experiment”. You will hear a sound, and the laser will activate (red LED lights up).&lt;br /&gt;
&#039;&#039;&#039;SETUP Tab&#039;&#039;&#039;&lt;br /&gt;
 Adjust the illumination and zoom until the tip is visible on the screen. If you do not see the cantilever even at the lowest magnification, you may need to reposition the tip holder or replace the tip.&lt;br /&gt;
&#039;&#039;&#039;Probe Setup&#039;&#039;&#039;&lt;br /&gt;
* Check that the ScanAsyst-Air probe parameters are selected. Otherwise, choose the ScanAsyst-Air probe from the database.&lt;br /&gt;
&#039;&#039;&#039;Aligning the Laser&#039;&#039;&#039;&lt;br /&gt;
* Click “Move to the Alignment Station”.&lt;br /&gt;
* Use the top X-Y control knobs on the scanner to align the laser to the tip. Adjust the laser spot until the sum photodetector signal is at least 3.5V.&lt;br /&gt;
* Use the side X-Y control knobs on the scanner to align the laser at the center of the photodetector. Adjust the laser to center the red dot on the crosshair. Aim for ~ 0V offset on both axes but below 0.2V is acceptable.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-laser.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Focusing the tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Return from Alignment Station”.&lt;br /&gt;
* Use the Focus Controls (Up/Down arrows) to focus the tip of the cantilever.&lt;br /&gt;
* Adjust the illumination, zoom and focus until the tip image is sharp.&lt;br /&gt;
* Click near the tip apex (~ 7 µm) to mark the cantilever position. &lt;br /&gt;
&lt;br /&gt;
[[File:Figure-cantilever.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;NAVIGATE Tab&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Sample&#039;&#039;&#039;&lt;br /&gt;
* Make sure the stage is at “Sample Load Position”. &lt;br /&gt;
* Place your sample on the stage and turn on the vacuum.&lt;br /&gt;
* Use trackball or on-screen controls to move the sample under the tip.&lt;br /&gt;
* If you already scanned a sample before changing the tip and did not close the software, you can click “Sample Scan Position” to return to your previous scan position.&lt;br /&gt;
&#039;&#039;&#039;Focusing the Sample&#039;&#039;&#039; &lt;br /&gt;
* Choose “Sample (Default)” focus method if your sample has features, like lithography on the surface, you can use to identify the surface plane. Choose “Tip Reflection” for thin films.&lt;br /&gt;
* Use a low-speed setting.&lt;br /&gt;
* Use the Up/Down arrows (start with the Down arrow) to bring the sample into focus. For tip reflection, the mirror image of the cantilever should be brought into focus. &lt;br /&gt;
* Adjust the illumination, zoom and focus until the sample looks sharp and clear. 📍 Focus gradually to avoid tip crash. Moving too fast may break the tip!&lt;br /&gt;
* Close the AFM enclosure when done.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-focus.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Check Parameters&#039;&#039;&#039;&lt;br /&gt;
* Before scanning, confirm the basic scan settings (for standard use).&lt;br /&gt;
** Scan size: 500 nm&lt;br /&gt;
** Aspect ratio: 1.00&lt;br /&gt;
** X offset / Y offset: 0.000 nm&lt;br /&gt;
** Scan angle. 0.00°&lt;br /&gt;
** Scan rate: 1 Hz&lt;br /&gt;
** Samples per line: 256&lt;br /&gt;
** Spring constant: 0.4000 N/m&lt;br /&gt;
** Do not change other settings unless agreed with NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Engaging the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Engage” to lower the tip and start scanning.&lt;br /&gt;
&#039;&#039;&#039;Scanning &amp;amp; Data Collection&#039;&#039;&#039;&lt;br /&gt;
* Monitor the Trace/Retrace lines in the Scope window. They should have similar shapes but not necessarily overlapping. Assess whether the features look physical or noise-like.&lt;br /&gt;
* Increase the scan size in steps (2 µm, 10 µm, 50 µm, 90 µm) until you see the area of interest. Use the zoom or offset tool to center and choose scan direction.&lt;br /&gt;
* Before moving to other areas, click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Engage” again when ready for a new scan.&lt;br /&gt;
&#039;&#039;&#039;Saving Your Data&#039;&#039;&#039;&lt;br /&gt;
* Go to:&lt;br /&gt;
  Capture &amp;gt; Capture Filename &amp;gt; Change Directory &amp;gt; Rename File &amp;gt; OK&lt;br /&gt;
* Choose:&lt;br /&gt;
** Capture - captures a single scan&lt;br /&gt;
** Capture Continuous - captures every scan&lt;br /&gt;
** Capture Now - immediately captures whatever has been scanned since the beginning of the frame.&lt;br /&gt;
** Stop Capture - aborts the capture action.&lt;br /&gt;
&#039;&#039;&#039;Ending Your Session&#039;&#039;&#039;&lt;br /&gt;
* Click “Withdraw” to safely lift the tip.&lt;br /&gt;
*	Click “Navigate”, then “Sample Load Position”.&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Turn off the vacuum and remove your sample.&lt;br /&gt;
  Tip Condition:&lt;br /&gt;
  If the tip is broken, replace and align it before ending your session.&lt;br /&gt;
  If the tip is still usable, exit Nanoscope 9.7 software (laser turns off).&lt;br /&gt;
*Close the AFM enclosure.&lt;br /&gt;
* Copy your data and fill in the session log. &lt;br /&gt;
* Clean up the workspace and dispose used items properly.&lt;br /&gt;
&lt;br /&gt;
[[File:Figure-software.png|thumb]]&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For help with scan settings and data analysis, contact NBI-Cleanroom staff.&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-software.png&amp;diff=2484</id>
		<title>File:Figure-software.png</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-software.png&amp;diff=2484"/>
		<updated>2025-07-18T13:57:45Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Bruker AFM&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;== Summary ==&lt;br /&gt;
Bruker AFM&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-focus.png&amp;diff=2483</id>
		<title>File:Figure-focus.png</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-focus.png&amp;diff=2483"/>
		<updated>2025-07-18T13:56:59Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Bruker AFM&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;== Summary ==&lt;br /&gt;
Bruker AFM&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-cantilever.png&amp;diff=2482</id>
		<title>File:Figure-cantilever.png</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-cantilever.png&amp;diff=2482"/>
		<updated>2025-07-18T13:56:31Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Bruker AFM&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;== Summary ==&lt;br /&gt;
Bruker AFM&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-laser.png&amp;diff=2481</id>
		<title>File:Figure-laser.png</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-laser.png&amp;diff=2481"/>
		<updated>2025-07-18T13:56:00Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Bruker AFM&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;== Summary ==&lt;br /&gt;
Bruker AFM&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-tip.png&amp;diff=2480</id>
		<title>File:Figure-tip.png</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=File:Figure-tip.png&amp;diff=2480"/>
		<updated>2025-07-18T13:54:31Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: Bruker AFM&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;== Summary ==&lt;br /&gt;
Bruker AFM&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
	<entry>
		<id>https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2479</id>
		<title>Bruker Dimension Icon AFM</title>
		<link rel="alternate" type="text/html" href="https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Bruker_Dimension_Icon_AFM&amp;diff=2479"/>
		<updated>2025-07-18T13:51:58Z</updated>

		<summary type="html">&lt;p&gt;Chenglee: /* Quick start - ScanAsyst mode */&lt;/p&gt;
&lt;hr /&gt;
&lt;div&gt;{{Infobox tool&lt;br /&gt;
|image = AFM_ICON.jpeg&lt;br /&gt;
|toolfullname = Dimension Icon PT&lt;br /&gt;
|company = Bruker&lt;br /&gt;
|description = Atomic Force Microscope&lt;br /&gt;
|website = https://www.bruker.com/en/products-and-solutions/microscopes/materials-afm/dimension-icon-afm.html&lt;br /&gt;
|location = Characterization room (03.01.K08)&lt;br /&gt;
|primary = Nikki&lt;br /&gt;
|secondary = Zhe&lt;br /&gt;
|limits = None&lt;br /&gt;
}}&lt;br /&gt;
Bruker Dimension Icon is an atomif force microscope used for accurate surface topography measurements.&lt;br /&gt;
Users can measure tilm thickness, roughness and get other topographical data characteristics with Ångstrom accuracy.&lt;br /&gt;
&lt;br /&gt;
Other alternatives for surface characterization at the [[Main Page|NBI cleanroom]] facilities:&lt;br /&gt;
* [[Tencor profilometer]] for step height and profile roughness&lt;br /&gt;
* [[Alpha-SE ellipsometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[Filmetrics reflectometer]] for transparent film overall thickness and roughness&lt;br /&gt;
* [[JEOL 7800F]] SEM for film thickness by observing material cross-sections, elemental analysis&lt;br /&gt;
== &#039;&#039;&#039;Quick-Start Instruction Manual for ScanAsyst Operation&#039;&#039;&#039; ==&lt;br /&gt;
&#039;&#039;&#039;Before You Begin&#039;&#039;&#039;&lt;br /&gt;
* Complete and pass AFM training by NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Before Your Session&#039;&#039;&#039;&lt;br /&gt;
* Make sure your sample is ready.&lt;br /&gt;
* Book your session in advance and be on time.&lt;br /&gt;
&#039;&#039;&#039;During Your Session&#039;&#039;&#039;&lt;br /&gt;
 &#039;&#039;&#039;Laboratory Reminders&#039;&#039;&#039;&lt;br /&gt;
 * Wear shoe covers in the lab.&lt;br /&gt;
 * Wear nitrile gloves before touching the tool.&lt;br /&gt;
 * Keep the workstation clean and tidy.&lt;br /&gt;
 * Make sure both main and support PCs are ON.&lt;br /&gt;
 * Ensure AFM (Nanoscope 9.7) software is closed before starting. This ensures the laser is OFF.&lt;br /&gt;
 * Check if a tip is already mounted. Use logbook (AFM Log) on the support PC to confirm.&lt;br /&gt;
 * If needed, load or change the tip (see next section).&lt;br /&gt;
&#039;&#039;&#039;Unloading the Tip Holder from the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Make sure the scan head is up, and the sample stage is not directly under.&lt;br /&gt;
* Loosen the side screw a few turns to release the scan head. 📍Do not remove the screw. &lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Gently pull out the tip holder from the bottom of the scanner.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Mount the tip holder on the loading station. The loading station is a black, round block with 3 sets of probe-mounting slots.&lt;br /&gt;
* Place the loading station on the table.&lt;br /&gt;
&#039;&#039;&#039;Mounting the Tip&#039;&#039;&#039;&lt;br /&gt;
* Pick the right tip for your scan. Tip specifications can be found on the Gel-Pak box. The default tip for ScanAsyst mode is “ScanAsyst Air”. The tip holder looks like a small circuit board with 4-holes and a metal clip to hold the tip in position.&lt;br /&gt;
* Gently press down and slide the metal clip to the back until the groove (slot for the tip) is fully visible.&lt;br /&gt;
* Remove the old tip from the holder. Discard by placing it in a Gel-Pak box (aligning the tip horizontally).&lt;br /&gt;
* Use tweezers to carefully lift a new tip (by its side) from the Gel-Pak box. New tips are aligned vertically in the Gel-Pak box. 📍Do not flip or drop the tip!&lt;br /&gt;
* Gently place the tip into the groove. Make sure it sits neatly in the groove with the cantilever at the open end of the groove.&lt;br /&gt;
* Gently press down and slide the metal clip to the front until it locks the tip in place.&lt;br /&gt;
&#039;&#039;&#039;Loading the Tip onto the Scan Head&#039;&#039;&#039;&lt;br /&gt;
* Slide the scan head out of the dovetail groove and hold it carefully.&lt;br /&gt;
* Connect the tip holder to the bottom of the scanner. Align the 4 pins to the matching sockets and press it gently but firmly. Make sure the tip is facing downwards.&lt;br /&gt;
* Slide the scan head back into the dovetail groove. Keep holding until it is fully seated at the bottom of the groove.&lt;br /&gt;
* Tighten the screw to lock the scan head. 📍Do not overtighten.&lt;br /&gt;
&#039;&#039;&#039;Starting Your AFM Session&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Launching the software&#039;&#039;&#039;&lt;br /&gt;
* Open Nanoscope 9.7 on the desktop.&lt;br /&gt;
* Wait for the Dimension Icon window to load and automatically pop up.&lt;br /&gt;
Choosing Your Experiment Settings&lt;br /&gt;
* By default, the “ScanAsyst in Air” experiment is selected so you can directly click “Load Experiment”. You will hear a sound, and the laser will activate (red LED lights up).&lt;br /&gt;
&#039;&#039;&#039;SETUP Tab&#039;&#039;&#039;&lt;br /&gt;
 Adjust the illumination and zoom until the tip is visible on the screen. If you do not see the cantilever even at the lowest magnification, you may need to reposition the tip holder or replace the tip.&lt;br /&gt;
&#039;&#039;&#039;Probe Setup&#039;&#039;&#039;&lt;br /&gt;
* Check that the ScanAsyst-Air probe parameters are selected. Otherwise, choose the ScanAsyst-Air probe from the database.&lt;br /&gt;
&#039;&#039;&#039;Aligning the Laser&#039;&#039;&#039;&lt;br /&gt;
* Click “Move to the Alignment Station”.&lt;br /&gt;
* Use the top X-Y control knobs on the scanner to align the laser to the tip. Adjust the laser spot until the sum photodetector signal is at least 3.5V.&lt;br /&gt;
* Use the side X-Y control knobs on the scanner to align the laser at the center of the photodetector. Adjust the laser to center the red dot on the crosshair. Aim for ~ 0V offset on both axes but below 0.2V is acceptable.&lt;br /&gt;
&#039;&#039;&#039;Focusing the tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Return from Alignment Station”.&lt;br /&gt;
* Use the Focus Controls (Up/Down arrows) to focus the tip of the cantilever.&lt;br /&gt;
* Adjust the illumination, zoom and focus until the tip image is sharp.&lt;br /&gt;
* Click near the tip apex (~ 7 µm) to mark the cantilever position. &lt;br /&gt;
&#039;&#039;&#039;NAVIGATE Tab&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
&#039;&#039;&#039;Loading the Sample&#039;&#039;&#039;&lt;br /&gt;
* Make sure the stage is at “Sample Load Position”. &lt;br /&gt;
* Place your sample on the stage and turn on the vacuum.&lt;br /&gt;
* Use trackball or on-screen controls to move the sample under the tip.&lt;br /&gt;
* If you already scanned a sample before changing the tip and did not close the software, you can click “Sample Scan Position” to return to your previous scan position.&lt;br /&gt;
&#039;&#039;&#039;Focusing the Sample&#039;&#039;&#039; &lt;br /&gt;
* Choose “Sample (Default)” focus method if your sample has features, like lithography on the surface, you can use to identify the surface plane. Choose “Tip Reflection” for thin films.&lt;br /&gt;
* Use a low-speed setting.&lt;br /&gt;
* Use the Up/Down arrows (start with the Down arrow) to bring the sample into focus. For tip reflection, the mirror image of the cantilever should be brought into focus. &lt;br /&gt;
* Adjust the illumination, zoom and focus until the sample looks sharp and clear. 📍 Focus gradually to avoid tip crash. Moving too fast may break the tip!&lt;br /&gt;
* Close the AFM enclosure when done.&lt;br /&gt;
&#039;&#039;&#039;Check Parameters&#039;&#039;&#039;&lt;br /&gt;
* Before scanning, confirm the basic scan settings (for standard use).&lt;br /&gt;
** Scan size: 500 nm&lt;br /&gt;
** Aspect ratio: 1.00&lt;br /&gt;
** X offset / Y offset: 0.000 nm&lt;br /&gt;
** Scan angle. 0.00°&lt;br /&gt;
** Scan rate: 1 Hz&lt;br /&gt;
** Samples per line: 256&lt;br /&gt;
** Spring constant: 0.4000 N/m&lt;br /&gt;
** Do not change other settings unless agreed with NBI-Cleanroom staff.&lt;br /&gt;
&#039;&#039;&#039;Engaging the Tip&#039;&#039;&#039;&lt;br /&gt;
* Click “Engage” to lower the tip and start scanning.&lt;br /&gt;
&#039;&#039;&#039;Scanning &amp;amp; Data Collection&#039;&#039;&#039;&lt;br /&gt;
* Monitor the Trace/Retrace lines in the Scope window. They should have similar shapes but not necessarily overlapping. Assess whether the features look physical or noise-like.&lt;br /&gt;
* Increase the scan size in steps (2 µm, 10 µm, 50 µm, 90 µm) until you see the area of interest. Use the zoom or offset tool to center and choose scan direction.&lt;br /&gt;
* Before moving to other areas, click “Withdraw” to safely lift the tip.&lt;br /&gt;
* Click “Engage” again when ready for a new scan.&lt;br /&gt;
&#039;&#039;&#039;Saving Your Data&#039;&#039;&#039;&lt;br /&gt;
* Go to:&lt;br /&gt;
  Capture &amp;gt; Capture Filename &amp;gt; Change Directory &amp;gt; Rename File &amp;gt; OK&lt;br /&gt;
* Choose:&lt;br /&gt;
** Capture - captures a single scan&lt;br /&gt;
** Capture Continuous - captures every scan&lt;br /&gt;
** Capture Now - immediately captures whatever has been scanned since the beginning of the frame.&lt;br /&gt;
** Stop Capture - aborts the capture action.&lt;br /&gt;
&#039;&#039;&#039;Ending Your Session&#039;&#039;&#039;&lt;br /&gt;
* Click “Withdraw” to safely lift the tip.&lt;br /&gt;
*	Click “Navigate”, then “Sample Load Position”.&lt;br /&gt;
* Open the AFM enclosure.&lt;br /&gt;
* Turn off the vacuum and remove your sample.&lt;br /&gt;
  Tip Condition:&lt;br /&gt;
  If the tip is broken, replace and align it before ending your session.&lt;br /&gt;
  If the tip is still usable, exit Nanoscope 9.7 software (laser turns off).&lt;br /&gt;
*Close the AFM enclosure.&lt;br /&gt;
* Copy your data and fill in the session log. &lt;br /&gt;
* Clean up the workspace and dispose used items properly.&lt;br /&gt;
&#039;&#039;&#039;💡Questions?&#039;&#039;&#039;&lt;br /&gt;
&lt;br /&gt;
For help with scan settings and data analysis, contact NBI-Cleanroom staff.&lt;br /&gt;
&lt;br /&gt;
[[Category:Tools]]&lt;br /&gt;
[[Category:Characterization]]&lt;/div&gt;</summary>
		<author><name>Chenglee</name></author>
	</entry>
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